JPS51138159A - Manufacturing method of silicon semiconductor devices - Google Patents

Manufacturing method of silicon semiconductor devices

Info

Publication number
JPS51138159A
JPS51138159A JP6186775A JP6186775A JPS51138159A JP S51138159 A JPS51138159 A JP S51138159A JP 6186775 A JP6186775 A JP 6186775A JP 6186775 A JP6186775 A JP 6186775A JP S51138159 A JPS51138159 A JP S51138159A
Authority
JP
Japan
Prior art keywords
manufacturing
semiconductor devices
silicon semiconductor
prolong
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6186775A
Other languages
Japanese (ja)
Inventor
Yasuhiro Mochizuki
Hideyuki Yagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6186775A priority Critical patent/JPS51138159A/en
Publication of JPS51138159A publication Critical patent/JPS51138159A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To prolong the life time of the minority carrier.
COPYRIGHT: (C)1976,JPO&Japio
JP6186775A 1975-05-26 1975-05-26 Manufacturing method of silicon semiconductor devices Pending JPS51138159A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6186775A JPS51138159A (en) 1975-05-26 1975-05-26 Manufacturing method of silicon semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6186775A JPS51138159A (en) 1975-05-26 1975-05-26 Manufacturing method of silicon semiconductor devices

Publications (1)

Publication Number Publication Date
JPS51138159A true JPS51138159A (en) 1976-11-29

Family

ID=13183491

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6186775A Pending JPS51138159A (en) 1975-05-26 1975-05-26 Manufacturing method of silicon semiconductor devices

Country Status (1)

Country Link
JP (1) JPS51138159A (en)

Similar Documents

Publication Publication Date Title
JPS5224478A (en) Semiconductor device manufacturing process
JPS51118395A (en) Semiconductor emitting unit and manufacturing process
JPS5230167A (en) Method for production of semiconductor device
JPS5383467A (en) Production of semiconductor device
JPS5441665A (en) Manufacture for semiconductor device
JPS51138159A (en) Manufacturing method of silicon semiconductor devices
JPS5242365A (en) Tool for semiconductors
JPS51121272A (en) Manufacturing method for semiconductor devices
JPS51123558A (en) Manufacturing method of plate semiconductor
JPS5267271A (en) Formation of through-hole onto semiconductor substrate
JPS51138166A (en) Production method of semiconductor device
JPS51112292A (en) Semiconductor device
JPS5348457A (en) Production of semiconductor element
JPS5261956A (en) Production of semiconductor device
JPS51121271A (en) Manufacturing method for semiconductor devices
JPS5236978A (en) Process for production of semiconductor devices
JPS5270753A (en) Wafer for semiconductor device
JPS53142168A (en) Reproductive use of semiconductor substrate
JPS52141565A (en) Manufacture of semiconductor unit
JPS5424575A (en) Handling method of wafer
JPS52142481A (en) Production of semiconductor device
JPS51132762A (en) Heat-treatment method of semiconductor device
JPS526081A (en) Semiconductor wafer
JPS526090A (en) Semiconductor integrated circuit
JPS5242366A (en) Method of preventing occurence of crystal defects of silicon wafers