JPS51135471A - Apparatus for coating ultra small electronic circuits - Google Patents

Apparatus for coating ultra small electronic circuits

Info

Publication number
JPS51135471A
JPS51135471A JP51053756A JP5375676A JPS51135471A JP S51135471 A JPS51135471 A JP S51135471A JP 51053756 A JP51053756 A JP 51053756A JP 5375676 A JP5375676 A JP 5375676A JP S51135471 A JPS51135471 A JP S51135471A
Authority
JP
Japan
Prior art keywords
electronic circuits
small electronic
ultra small
coating ultra
silicon dioxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP51053756A
Other languages
English (en)
Japanese (ja)
Inventor
Kai Koo Tsuu
Jiyosefu Antonii Banbe Aamando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NCR Voyix Corp
Original Assignee
NCR Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NCR Corp filed Critical NCR Corp
Publication of JPS51135471A publication Critical patent/JPS51135471A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/042—Coating on selected surface areas, e.g. using masks using masks
    • H10P14/6334—
    • H10P14/6682—
    • H10P14/69215—
    • H10P95/00—
    • H10W74/131—
    • H10W72/0198—
    • H10W72/073—
    • H10W72/07336—
    • H10W72/07533—
    • H10W72/076—
    • H10W72/5449—
    • H10W72/884—
    • H10W74/00—
    • H10W90/736—
    • H10W90/756—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Lead Frames For Integrated Circuits (AREA)
  • Wire Bonding (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Chemical Vapour Deposition (AREA)
  • Formation Of Insulating Films (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Electrodes Of Semiconductors (AREA)
JP51053756A 1975-05-12 1976-05-11 Apparatus for coating ultra small electronic circuits Pending JPS51135471A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/576,517 US4041896A (en) 1975-05-12 1975-05-12 Microelectronic circuit coating system

Publications (1)

Publication Number Publication Date
JPS51135471A true JPS51135471A (en) 1976-11-24

Family

ID=24304755

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51053756A Pending JPS51135471A (en) 1975-05-12 1976-05-11 Apparatus for coating ultra small electronic circuits

Country Status (8)

Country Link
US (1) US4041896A (enExample)
JP (1) JPS51135471A (enExample)
CA (1) CA1059648A (enExample)
DE (1) DE2620707C3 (enExample)
FR (1) FR2311404A1 (enExample)
GB (1) GB1519251A (enExample)
IT (1) IT1060415B (enExample)
NL (1) NL7604980A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4401053A (en) * 1981-07-17 1983-08-30 Riley Thomas J Coating fixture

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2704992A (en) * 1951-12-28 1955-03-29 Erie Resistor Corp Gas plating apparatus
US2879188A (en) * 1956-03-05 1959-03-24 Westinghouse Electric Corp Processes for making transistors
US3117025A (en) * 1961-08-31 1964-01-07 Space Technology Lab Inc Thin filming apparatus
BE623233A (enExample) * 1961-10-12 1900-01-01
US3207126A (en) * 1961-11-14 1965-09-21 Byron Ernest Mask changer means for vacuum deposition device
US3312572A (en) * 1963-06-07 1967-04-04 Barnes Eng Co Process of preparing thin film semiconductor thermistor bolometers and articles
US3276423A (en) * 1963-10-04 1966-10-04 David P Triller Pattern mask for use in making thin film circuitry
US3465209A (en) * 1966-07-07 1969-09-02 Rca Corp Semiconductor devices and methods of manufacture thereof
FR1518843A (fr) * 1967-02-13 1968-03-29 Radiotechnique Coprim Rtc Dispositif pour le dépôt de couches minces sur des supports semi-conducteurs
US3597834A (en) * 1968-02-14 1971-08-10 Texas Instruments Inc Method in forming electrically continuous circuit through insulating layer
US3621812A (en) * 1969-06-18 1971-11-23 Texas Instruments Inc Epitaxial deposition reactor
US3647533A (en) * 1969-08-08 1972-03-07 Us Navy Substrate bonding bumps for large scale arrays
US3785046A (en) * 1970-03-06 1974-01-15 Hull Corp Thin film coils and method and apparatus for making the same
US3678892A (en) * 1970-05-19 1972-07-25 Western Electric Co Pallet and mask for substrates

Also Published As

Publication number Publication date
IT1060415B (it) 1982-08-20
FR2311404B1 (enExample) 1979-03-02
US4041896A (en) 1977-08-16
DE2620707C3 (de) 1979-05-23
DE2620707B2 (de) 1978-09-21
NL7604980A (nl) 1976-11-16
CA1059648A (en) 1979-07-31
DE2620707A1 (de) 1976-11-18
FR2311404A1 (fr) 1976-12-10
GB1519251A (en) 1978-07-26

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