JPS51134083A - Method to manufacture the insulation film - Google Patents

Method to manufacture the insulation film

Info

Publication number
JPS51134083A
JPS51134083A JP50057245A JP5724575A JPS51134083A JP S51134083 A JPS51134083 A JP S51134083A JP 50057245 A JP50057245 A JP 50057245A JP 5724575 A JP5724575 A JP 5724575A JP S51134083 A JPS51134083 A JP S51134083A
Authority
JP
Japan
Prior art keywords
insulation film
manufacture
lsi
conductors
semi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50057245A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5751925B2 (enrdf_load_stackoverflow
Inventor
Tadashi Serikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP50057245A priority Critical patent/JPS51134083A/ja
Publication of JPS51134083A publication Critical patent/JPS51134083A/ja
Publication of JPS5751925B2 publication Critical patent/JPS5751925B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP50057245A 1975-05-16 1975-05-16 Method to manufacture the insulation film Granted JPS51134083A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50057245A JPS51134083A (en) 1975-05-16 1975-05-16 Method to manufacture the insulation film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50057245A JPS51134083A (en) 1975-05-16 1975-05-16 Method to manufacture the insulation film

Publications (2)

Publication Number Publication Date
JPS51134083A true JPS51134083A (en) 1976-11-20
JPS5751925B2 JPS5751925B2 (enrdf_load_stackoverflow) 1982-11-05

Family

ID=13050134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50057245A Granted JPS51134083A (en) 1975-05-16 1975-05-16 Method to manufacture the insulation film

Country Status (1)

Country Link
JP (1) JPS51134083A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5751925B2 (enrdf_load_stackoverflow) 1982-11-05

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