JPS51130173A - Silicon etching method by gas plasma - Google Patents

Silicon etching method by gas plasma

Info

Publication number
JPS51130173A
JPS51130173A JP5514375A JP5514375A JPS51130173A JP S51130173 A JPS51130173 A JP S51130173A JP 5514375 A JP5514375 A JP 5514375A JP 5514375 A JP5514375 A JP 5514375A JP S51130173 A JPS51130173 A JP S51130173A
Authority
JP
Japan
Prior art keywords
etching method
gas plasma
silicon etching
plasma
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5514375A
Other languages
Japanese (ja)
Inventor
Hideki Isaka
Juichi Osuzu
Ryosuke Namazu
Kazutoshi Nagasawa
Takashi Nao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5514375A priority Critical patent/JPS51130173A/en
Publication of JPS51130173A publication Critical patent/JPS51130173A/en
Pending legal-status Critical Current

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  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: Si is etched in plasma of R12 (CCl2F2) and oxygen gas.
COPYRIGHT: (C)1976,JPO&Japio
JP5514375A 1975-05-07 1975-05-07 Silicon etching method by gas plasma Pending JPS51130173A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5514375A JPS51130173A (en) 1975-05-07 1975-05-07 Silicon etching method by gas plasma

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5514375A JPS51130173A (en) 1975-05-07 1975-05-07 Silicon etching method by gas plasma

Publications (1)

Publication Number Publication Date
JPS51130173A true JPS51130173A (en) 1976-11-12

Family

ID=12990537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5514375A Pending JPS51130173A (en) 1975-05-07 1975-05-07 Silicon etching method by gas plasma

Country Status (1)

Country Link
JP (1) JPS51130173A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008080186A (en) * 2006-09-26 2008-04-10 Ashimori Ind Co Ltd Dewatering bag body

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008080186A (en) * 2006-09-26 2008-04-10 Ashimori Ind Co Ltd Dewatering bag body

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