JPS51130173A - Silicon etching method by gas plasma - Google Patents
Silicon etching method by gas plasmaInfo
- Publication number
- JPS51130173A JPS51130173A JP5514375A JP5514375A JPS51130173A JP S51130173 A JPS51130173 A JP S51130173A JP 5514375 A JP5514375 A JP 5514375A JP 5514375 A JP5514375 A JP 5514375A JP S51130173 A JPS51130173 A JP S51130173A
- Authority
- JP
- Japan
- Prior art keywords
- etching method
- gas plasma
- silicon etching
- plasma
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: Si is etched in plasma of R12 (CCl2F2) and oxygen gas.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5514375A JPS51130173A (en) | 1975-05-07 | 1975-05-07 | Silicon etching method by gas plasma |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5514375A JPS51130173A (en) | 1975-05-07 | 1975-05-07 | Silicon etching method by gas plasma |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51130173A true JPS51130173A (en) | 1976-11-12 |
Family
ID=12990537
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5514375A Pending JPS51130173A (en) | 1975-05-07 | 1975-05-07 | Silicon etching method by gas plasma |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51130173A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008080186A (en) * | 2006-09-26 | 2008-04-10 | Ashimori Ind Co Ltd | Dewatering bag body |
-
1975
- 1975-05-07 JP JP5514375A patent/JPS51130173A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008080186A (en) * | 2006-09-26 | 2008-04-10 | Ashimori Ind Co Ltd | Dewatering bag body |
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