JPH1167424A5 - - Google Patents

Info

Publication number
JPH1167424A5
JPH1167424A5 JP1997238849A JP23884997A JPH1167424A5 JP H1167424 A5 JPH1167424 A5 JP H1167424A5 JP 1997238849 A JP1997238849 A JP 1997238849A JP 23884997 A JP23884997 A JP 23884997A JP H1167424 A5 JPH1167424 A5 JP H1167424A5
Authority
JP
Japan
Prior art keywords
furnace
recess
heating wire
cavity
processed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997238849A
Other languages
English (en)
Japanese (ja)
Other versions
JP3848442B2 (ja
JPH1167424A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP23884997A priority Critical patent/JP3848442B2/ja
Priority claimed from JP23884997A external-priority patent/JP3848442B2/ja
Publication of JPH1167424A publication Critical patent/JPH1167424A/ja
Publication of JPH1167424A5 publication Critical patent/JPH1167424A5/ja
Application granted granted Critical
Publication of JP3848442B2 publication Critical patent/JP3848442B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP23884997A 1997-08-20 1997-08-20 ヒータ支持装置及び半導体製造装置及び半導体装置の製造方法 Expired - Lifetime JP3848442B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23884997A JP3848442B2 (ja) 1997-08-20 1997-08-20 ヒータ支持装置及び半導体製造装置及び半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23884997A JP3848442B2 (ja) 1997-08-20 1997-08-20 ヒータ支持装置及び半導体製造装置及び半導体装置の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006104351A Division JP4145328B2 (ja) 2006-04-05 2006-04-05 ヒータ支持装置及び加熱装置及び半導体製造装置及び半導体装置の製造方法

Publications (3)

Publication Number Publication Date
JPH1167424A JPH1167424A (ja) 1999-03-09
JPH1167424A5 true JPH1167424A5 (enrdf_load_stackoverflow) 2005-02-24
JP3848442B2 JP3848442B2 (ja) 2006-11-22

Family

ID=17036185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23884997A Expired - Lifetime JP3848442B2 (ja) 1997-08-20 1997-08-20 ヒータ支持装置及び半導体製造装置及び半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JP3848442B2 (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100643661B1 (ko) 2005-04-11 2006-11-10 (주)비에이치티 열처리 장치의 히터 어셈블리 및 그 제조 방법
KR100933765B1 (ko) 2005-08-24 2009-12-24 가부시키가이샤 히다치 고쿠사이 덴키 기판처리장치, 이에 사용되는 가열장치, 이를 이용한 반도체의 제조방법 및 발열체의 보지구조
KR100808766B1 (ko) 2007-01-09 2008-02-29 홍진혁 절연내화 애자 및 이를 이용한 원통형 전기가열로
JP5114449B2 (ja) * 2009-03-31 2013-01-09 株式会社ハナガタ ヒートトンネル用加熱装置
JP5787563B2 (ja) 2010-05-11 2015-09-30 株式会社日立国際電気 ヒータ支持装置及び加熱装置及び基板処理装置及び半導体装置の製造方法及び基板の製造方法及び保持用ピース
JP5565188B2 (ja) * 2010-08-10 2014-08-06 東京エレクトロン株式会社 ヒータ装置
CN113811214B (zh) * 2019-03-11 2024-12-17 尼科创业贸易有限公司 气溶胶供应装置
CN111650237B (zh) * 2020-07-01 2024-07-12 西安交通大学 一种利用纳米力学测试仪测试微小试样热膨胀系数的装置
CN120313356A (zh) * 2024-01-12 2025-07-15 北京北方华创微电子装备有限公司 炉体结构和半导体工艺设备

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5623675Y2 (enrdf_load_stackoverflow) * 1977-03-16 1981-06-03
JPH0110921Y2 (enrdf_load_stackoverflow) * 1984-11-05 1989-03-29
JPH047598Y2 (enrdf_load_stackoverflow) * 1987-03-16 1992-02-27
JPH086237Y2 (ja) * 1990-03-13 1996-02-21 株式会社リケン 縦型環状炉の発熱体保持具
JPH079036Y2 (ja) * 1990-11-13 1995-03-06 東京エレクトロン東北株式会社 縦型熱処理炉
US5506389A (en) * 1993-11-10 1996-04-09 Tokyo Electron Kabushiki Kaisha Thermal processing furnace and fabrication method thereof
JPH0963963A (ja) * 1995-08-23 1997-03-07 Hitachi Ltd 半導体基板処理装置及び半導体基板処理方法

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