JP5565188B2 - ヒータ装置 - Google Patents
ヒータ装置 Download PDFInfo
- Publication number
- JP5565188B2 JP5565188B2 JP2010179592A JP2010179592A JP5565188B2 JP 5565188 B2 JP5565188 B2 JP 5565188B2 JP 2010179592 A JP2010179592 A JP 2010179592A JP 2010179592 A JP2010179592 A JP 2010179592A JP 5565188 B2 JP5565188 B2 JP 5565188B2
- Authority
- JP
- Japan
- Prior art keywords
- heater
- wire
- strand
- processing container
- strands
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000002265 prevention Effects 0.000 claims description 27
- 230000002093 peripheral effect Effects 0.000 claims description 12
- 238000009413 insulation Methods 0.000 claims description 6
- 229910010293 ceramic material Inorganic materials 0.000 claims description 4
- 230000032683 aging Effects 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 description 27
- 235000012431 wafers Nutrition 0.000 description 27
- 238000000034 method Methods 0.000 description 17
- 239000004065 semiconductor Substances 0.000 description 16
- 230000008569 process Effects 0.000 description 10
- 238000012423 maintenance Methods 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 239000010453 quartz Substances 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 230000004927 fusion Effects 0.000 description 6
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000000137 annealing Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000001154 acute effect Effects 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- -1 for example Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 244000126211 Hericium coralloides Species 0.000 description 1
- MXRIRQGCELJRSN-UHFFFAOYSA-N O.O.O.[Al] Chemical compound O.O.O.[Al] MXRIRQGCELJRSN-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910000953 kanthal Inorganic materials 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000011553 magnetic fluid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/16—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor the conductor being mounted on an insulating base
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49826—Assembling or joining
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Resistance Heating (AREA)
- Control Of Resistance Heating (AREA)
Description
本発明によれば、ヒータ素線同士の接触を防止することができ、ヒータ素線同士の融着や断線も阻止することができる。
本発明の関連技術は、加熱すべき被加熱体の外周に、螺旋状に巻回して配置したヒータ素線を有するヒータ装置に設けられ、前記ヒータ素線の間隔が、前記ヒータ素線の変形により前記ヒータ素線の配置時よりも狭まった箇所に対応させて前記ヒータ素線間に配置されることを特徴とする絶縁性の素線接触防止部材である。
本発明によれば、ヒータ素線同士の接触を防止することができ、ヒータ素線同士の融着や断線も阻止することができる。
本発明の関連技術によれば、ヒータ素線の間隔が、上記ヒータ素線の変形により上記ヒータ素線の配置時よりも狭まった箇所に対応させて上記ヒータ素線間に、上記素線接触防止部材を配置するようにしたので、ヒータ素線同士の接触を防止することができ、ヒータ素線同士の融着や断線も阻止することができる。
次に、上述したような素線接触防止部材60を実際に配置して装着した時の状態を説明する。図7は素線接触防止部材60をヒータ素線間に配置して装着した時の状態を示す図面代用写真である。また図7では比較のために素線接触防止部材を設けていないヒータ素線も示す。図7(A)は比較のために素線接触防止部材を設けていない時の状態を示す写真、図7(B)は素線接触防止部材を設けたヒータ素線を示す写真である。
4 処理容器
6 外筒
8 内筒
28 支持具(ウエハボート)
32 ガス導入手段
38 排気系
48 ヒータ装置
50 断熱層
51 保護カバー
52 ヒータ素線
60 素線接触防止部材
62 板状部材
70 ヒータ素線間隔が狭まった箇所
W 被加熱体
Claims (5)
- 加熱すべき被加熱体を収容した円筒状の処理容器の外周側に前記処理容器を囲むようにして設けられたヒータ装置において、
前記処理容器の外側を囲むようにして設けられた断熱層と、
前記断熱層の外周面に設けられた保護カバーと、
前記断熱層の内周側に配置されたヒータ素線と、
前記ヒータ素線の位置ずれを防止するために設けた素線保持枠と、
前記ヒータ素線の経年変化による永久伸びにより前記ヒータ素線の配置時よりも前記ヒータ素線同士の間隔が狭まった箇所に設けられる絶縁性の素線接触防止部材と、
を備えたことを特徴とするヒータ装置。 - 前記ヒータ素線は、螺旋状に巻回され、又は波形状に或いはUターンを繰り返すように屈曲されていることを特徴とする請求項1記載のヒータ装置。
- 前記素線接触防止部材は、セラミック材よりなることを特徴とする請求項1又は2記載のヒータ装置。
- 前記素線接触防止部材は、前記ヒータ素線間に挟持させて支持されることを特徴とする請求項1乃至3のいずれか一項に記載のヒータ装置。
- 前記素線接触防止部材は、その先端を前記断熱層に突き刺すことにより支持されていることを特徴とする請求項1乃至4のいずれか一項に記載のヒータ装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010179592A JP5565188B2 (ja) | 2010-08-10 | 2010-08-10 | ヒータ装置 |
TW100128011A TWI517745B (zh) | 2010-08-10 | 2011-08-05 | 加熱裝置 |
US13/205,235 US20120037613A1 (en) | 2010-08-10 | 2011-08-08 | Element wire contact prevention member and method for maintenance of heater device |
KR1020110079473A KR101449090B1 (ko) | 2010-08-10 | 2011-08-10 | 히터 장치의 메인터넌스 방법 |
CN201110228743.0A CN102378415B (zh) | 2010-08-10 | 2011-08-10 | 线材接触防止构件和加热器装置的维护方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010179592A JP5565188B2 (ja) | 2010-08-10 | 2010-08-10 | ヒータ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012039006A JP2012039006A (ja) | 2012-02-23 |
JP5565188B2 true JP5565188B2 (ja) | 2014-08-06 |
Family
ID=45564046
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010179592A Active JP5565188B2 (ja) | 2010-08-10 | 2010-08-10 | ヒータ装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20120037613A1 (ja) |
JP (1) | JP5565188B2 (ja) |
KR (1) | KR101449090B1 (ja) |
CN (1) | CN102378415B (ja) |
TW (1) | TWI517745B (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5868619B2 (ja) * | 2011-06-21 | 2016-02-24 | ニチアス株式会社 | 熱処理炉及び熱処理装置 |
JP2014082014A (ja) * | 2012-10-12 | 2014-05-08 | Tokyo Electron Ltd | ヒータ装置及び熱処理装置 |
JP7122856B2 (ja) * | 2018-05-02 | 2022-08-22 | 東京エレクトロン株式会社 | 熱処理装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3848442B2 (ja) * | 1997-08-20 | 2006-11-22 | 株式会社日立国際電気 | ヒータ支持装置及び半導体製造装置及び半導体装置の製造方法 |
US6660095B2 (en) * | 2001-01-15 | 2003-12-09 | Jusung Engineering Co., Ltd. | Single wafer LPCVD apparatus |
JP4185395B2 (ja) * | 2003-04-22 | 2008-11-26 | 株式会社日立国際電気 | 基板処理装置及び半導体装置の製造方法 |
KR20060078658A (ko) * | 2004-12-30 | 2006-07-05 | 동부일렉트로닉스 주식회사 | 확산공정용 가열로 히터의 변형방지장치 |
WO2007023855A1 (ja) * | 2005-08-24 | 2007-03-01 | Hitachi Kokusai Electric Inc. | 基板処理装置及びこれに用いられる加熱装置並びにこれらを利用した半導体の製造方法 |
JP4820137B2 (ja) * | 2005-09-26 | 2011-11-24 | 株式会社日立国際電気 | 発熱体の保持構造体 |
JP4145328B2 (ja) * | 2006-04-05 | 2008-09-03 | 株式会社日立国際電気 | ヒータ支持装置及び加熱装置及び半導体製造装置及び半導体装置の製造方法 |
CN101150049A (zh) * | 2006-09-22 | 2008-03-26 | 东京毅力科创株式会社 | 热处理炉及其制造方法 |
JP4445519B2 (ja) * | 2007-06-01 | 2010-04-07 | 東京エレクトロン株式会社 | 熱処理炉及びその製造方法 |
JP5096182B2 (ja) * | 2008-01-31 | 2012-12-12 | 東京エレクトロン株式会社 | 熱処理炉 |
-
2010
- 2010-08-10 JP JP2010179592A patent/JP5565188B2/ja active Active
-
2011
- 2011-08-05 TW TW100128011A patent/TWI517745B/zh active
- 2011-08-08 US US13/205,235 patent/US20120037613A1/en not_active Abandoned
- 2011-08-10 KR KR1020110079473A patent/KR101449090B1/ko active IP Right Grant
- 2011-08-10 CN CN201110228743.0A patent/CN102378415B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
TW201212697A (en) | 2012-03-16 |
KR20120014881A (ko) | 2012-02-20 |
TWI517745B (zh) | 2016-01-11 |
US20120037613A1 (en) | 2012-02-16 |
KR101449090B1 (ko) | 2014-10-08 |
CN102378415B (zh) | 2015-03-25 |
JP2012039006A (ja) | 2012-02-23 |
CN102378415A (zh) | 2012-03-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US11049742B2 (en) | Substrate processing apparatus, method of manufacturing semiconductor device, and thermocouple support | |
JP3598032B2 (ja) | 縦型熱処理装置及び熱処理方法並びに保温ユニット | |
KR101072356B1 (ko) | 기판 처리 장치, 반도체 장치의 제조 방법 및 천정 단열체 | |
US20140103024A1 (en) | Heater device and heat treatment apparatus | |
JP4794360B2 (ja) | 基板処理装置 | |
JP5565188B2 (ja) | ヒータ装置 | |
US11569098B2 (en) | Heat treatment apparatus | |
JP3307924B2 (ja) | 熱処理装置 | |
JP2006319175A (ja) | 基板処理装置 | |
KR102355535B1 (ko) | 플레이트 타입 가열장치 | |
TWI784215B (zh) | 熱處理裝置 | |
JP5006821B2 (ja) | 基板処理装置および半導体装置の製造方法 | |
JP2004311775A (ja) | 半導体処理装置 | |
KR101126098B1 (ko) | 배치식 기판처리 장치 | |
JP2008258280A (ja) | 加熱装置 | |
JP4618920B2 (ja) | 熱処理装置用ヒータの結線方法及び熱処理装置 | |
JP2009124161A (ja) | 熱処理装置 | |
WO2004027845A1 (ja) | 熱処理装置 | |
JP2007273673A (ja) | 縦型ウエハボート | |
JPH0799163A (ja) | バッチ型熱処理装置 | |
KR20060116639A (ko) | 퍼니스형 반도체 설비 | |
JP2006319187A (ja) | 基板処理装置 | |
JP2011202865A (ja) | 基板処理装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130402 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20131213 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140107 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20140116 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140220 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140311 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140422 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140520 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140602 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5565188 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |