JPH11510908A - ガス混合物中の酸化可能な成分の濃度を測定するためのセンサ - Google Patents
ガス混合物中の酸化可能な成分の濃度を測定するためのセンサInfo
- Publication number
- JPH11510908A JPH11510908A JP10501036A JP50103698A JPH11510908A JP H11510908 A JPH11510908 A JP H11510908A JP 10501036 A JP10501036 A JP 10501036A JP 50103698 A JP50103698 A JP 50103698A JP H11510908 A JPH11510908 A JP H11510908A
- Authority
- JP
- Japan
- Prior art keywords
- measuring
- sensor according
- semiconductor
- concentration
- donor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 12
- 239000007789 gas Substances 0.000 claims abstract description 40
- 239000004065 semiconductor Substances 0.000 claims abstract description 17
- 229930195735 unsaturated hydrocarbon Natural products 0.000 claims abstract description 5
- 229910002091 carbon monoxide Inorganic materials 0.000 claims abstract description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 16
- 239000007784 solid electrolyte Substances 0.000 claims description 16
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 10
- 229910052759 nickel Inorganic materials 0.000 claims description 8
- 229910052758 niobium Inorganic materials 0.000 claims description 7
- 239000010955 niobium Substances 0.000 claims description 7
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 229910017052 cobalt Inorganic materials 0.000 claims description 4
- 239000010941 cobalt Substances 0.000 claims description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 4
- 229910052723 transition metal Inorganic materials 0.000 claims description 4
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical group [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 239000011651 chromium Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 239000006104 solid solution Substances 0.000 claims description 2
- 238000011067 equilibration Methods 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims 1
- 239000007772 electrode material Substances 0.000 abstract description 3
- 239000007787 solid Substances 0.000 abstract 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 11
- 239000000370 acceptor Substances 0.000 description 8
- 238000005259 measurement Methods 0.000 description 8
- 229910052760 oxygen Inorganic materials 0.000 description 7
- 239000001301 oxygen Substances 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 229910052697 platinum Inorganic materials 0.000 description 5
- 230000003197 catalytic effect Effects 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000002485 combustion reaction Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 150000003624 transition metals Chemical class 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- QQONPFPTGQHPMA-UHFFFAOYSA-N Propene Chemical compound CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 2
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000036647 reaction Effects 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000004408 titanium dioxide Substances 0.000 description 2
- 230000005678 Seebeck effect Effects 0.000 description 1
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000274 adsorptive effect Effects 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- JUWSSMXCCAMYGX-UHFFFAOYSA-N gold platinum Chemical compound [Pt].[Au] JUWSSMXCCAMYGX-UHFFFAOYSA-N 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- -1 oxygen ion Chemical class 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4073—Composition or fabrication of the solid electrolyte
- G01N27/4074—Composition or fabrication of the solid electrolyte for detection of gases other than oxygen
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Molecular Biology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1.電気的に絶縁された1個の平坦な基板(6)の1つの大きな平面上の上下に 重なった層中に、ガス混合物の平衡調節を触媒する1個の参照電極(3)、1個 のイオン導電性固形電解質(5)およびガス混合物の平衡調節を触媒できないか またはごく僅かに触媒できるにすぎないような、測定ガスにさらされた少なくと も1個の測定電極(1、2)が配置されているような、ガス混合物中の酸化可能 な成分の濃度の測定のため、殊にNOx、CO、H2および有利に不飽和炭化水素 のようなガス1種以上の測定のためのセンサにおいて、測定電極(1、2)が主 要成分として1種以上の半導体を含有していることを特長とする、ガス混合物中 の酸化可能な成分の濃度の測定のためのセンサ。 2.固形電解質(5)上で2個の測定電極(1、2)が互いに間隔を開けて配置 されている、請求項1に記載のセンサ。 3.半導体が受容体および/または供与体をドーピングされている、請求項1ま たは2に記載のセンサ。 4.半導体が酸化物であるかまたは単相もしくは多相の混合酸化物、殊にルチル またはジルチルあるいはこれらの混合物である、請求項1から3までのいずれか 1項に記載のセンサ。 5.半導体が酸化チタンからなる、請求項4に記載のセンサ。 6.供与体が受容体よりも高濃度で存在している、請求項3から5までのいずれ か1項に記載のセンサ。 7.供与体が、半導体を形成する1種以上の金属よりも高い原子価を有する元素 である、請求項3から6までのいずれか1項に記載のセンサ。 8.供与体がタンタルおよび/またはニオブである請求項7に記載のセンサ。 9.半導体が、受容体として1種以上の遷移金属元素、殊にニッケル、銅、コバ ルトおよび/またはクロム、有利にニッケル、銅および/またはコバルトおよび /または希土類を含有している、請求項3から8までのいずれか1項に記載のセ ンサ。 10.受容体が、固溶体または解離した成分として半導体中に含有されている、 請求項9に記載のセンサ。 11.半導体が、供与体および/または受容体をそれぞれ0.01から25%の 濃度で含有している、請求項3から10までのいずれか1項に記載のセンサ。 12.半導体が、ニオブ0.5〜15%およびニッケル0.25〜7%、有利に ニオブ7%およびニッケル3%を含有している、請求項11に記載のセンサ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19623434.4 | 1996-06-12 | ||
DE19623434A DE19623434A1 (de) | 1996-06-12 | 1996-06-12 | Sensor zur Bestimmung der Konzentration oxidierbarer Bestandteile in einem Gasgemisch |
PCT/DE1997/000996 WO1997047963A1 (de) | 1996-06-12 | 1997-05-16 | Sensor zur bestimmung der konzentration oxidierbarer bestandteile in einem gasgemisch |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH11510908A true JPH11510908A (ja) | 1999-09-21 |
JP4162262B2 JP4162262B2 (ja) | 2008-10-08 |
Family
ID=7796739
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50103698A Expired - Fee Related JP4162262B2 (ja) | 1996-06-12 | 1997-05-16 | ガス混合物中の酸化可能な成分の濃度を測定するためのセンサ |
Country Status (7)
Country | Link |
---|---|
US (1) | US6022464A (ja) |
EP (1) | EP0843813A1 (ja) |
JP (1) | JP4162262B2 (ja) |
KR (1) | KR19990036337A (ja) |
CN (1) | CN1195403A (ja) |
DE (1) | DE19623434A1 (ja) |
WO (1) | WO1997047963A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012504235A (ja) * | 2008-09-30 | 2012-02-16 | イルジン カッパー ホイル カンパニー リミテッド | 長期信号安定性を有する窒素酸化物ガスセンサー |
JP2012504236A (ja) * | 2008-09-30 | 2012-02-16 | イルジン カッパー ホイル カンパニー リミテッド | 窒素酸化物ガスセンサー |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19623212A1 (de) * | 1996-06-11 | 1997-12-18 | Bosch Gmbh Robert | Sensor zur Bestimmung der Konzentration oxidierbarer Bestandteile in einem Gasgemisch |
DE19846487C5 (de) * | 1998-10-09 | 2004-12-30 | Basf Ag | Meßsonde für die Detektion der Momentankonzentrationen mehrerer Gasbestandteile eines Gases |
DE19932048A1 (de) * | 1999-07-09 | 2001-01-11 | Bosch Gmbh Robert | Meßfühler zur Bestimmung einer Konzentration von Gaskomponenten in Gasgemischen |
DE19944181A1 (de) | 1999-09-15 | 2001-04-12 | Bosch Gmbh Robert | Sensor zur Bestimmung der Konzentration von Gaskomponenten in Gasgemischen |
US6849239B2 (en) * | 2000-10-16 | 2005-02-01 | E. I. Du Pont De Nemours And Company | Method and apparatus for analyzing mixtures of gases |
FR2819314B1 (fr) * | 2001-01-08 | 2003-06-13 | Alstom | Procede pour controler de facon non intrusive un taux de melange d'un melange gazeux a au moins deux composants |
DE10310953B4 (de) * | 2003-03-13 | 2006-03-09 | Robert Bosch Gmbh | Unbeheiztes, planares Sensorelement zur Bestimmung der Konzentration einer Gaskomponente in einem Gasgemisch |
JP2006126056A (ja) * | 2004-10-29 | 2006-05-18 | Tdk Corp | 二酸化炭素センサ |
DE102005015569A1 (de) * | 2005-04-05 | 2006-10-12 | Robert Bosch Gmbh | Keramisches Widerstands- oder Sensorelement |
US20080110769A1 (en) * | 2006-11-09 | 2008-05-15 | Delphi Technologies Inc. | Exhaust gas sensors and methods for measuring concentrations of nox and ammonia and temperatures of the sensors |
KR20110000647A (ko) * | 2008-02-28 | 2011-01-04 | 넥스테크 머티리얼스, 엘티디. | 전류측정 전기화학 전지 및 센서 |
JP4996527B2 (ja) * | 2008-04-14 | 2012-08-08 | 日本特殊陶業株式会社 | 積層型ガスセンサ素子及びガスセンサ |
US8974657B2 (en) | 2010-09-03 | 2015-03-10 | Nextech Materials Ltd. | Amperometric electrochemical cells and sensors |
CH705070B1 (fr) * | 2011-07-15 | 2022-01-14 | Swatch Group Res & Dev Ltd | Capteur d'hydrogène à couche active et procédé de fabrication de capteurs d'hydrogène. |
CN104364639A (zh) | 2012-03-08 | 2015-02-18 | 内克斯特克材料公司 | 电流型固体电解质气体传感器和检测方法,其中传感电极包含至少一种钨酸盐或钼酸盐化合物 |
CN104374818A (zh) * | 2014-08-08 | 2015-02-25 | 杭州纳瑙新材料科技有限公司 | 一种平面型氧传感器 |
KR101769303B1 (ko) * | 2016-06-14 | 2017-08-18 | 현대자동차주식회사 | 고체전해질용 co2 센서 및 이의 제조방법 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2304464C2 (de) * | 1973-01-31 | 1983-03-10 | Robert Bosch Gmbh, 7000 Stuttgart | Meßfühler für die Überwachung der Funktionsfähigkeit von Katalysatoren in Abgas |
DE3004571A1 (de) * | 1980-02-07 | 1981-08-13 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 3400 Göttingen | Feste elektrode in einer elektrolytischen zelle |
JPS6061654A (ja) * | 1983-09-14 | 1985-04-09 | Ngk Insulators Ltd | 酸素・可燃ガス分圧測定方法及び装置 |
US5037525A (en) * | 1985-10-29 | 1991-08-06 | Commonwealth Scientific And Industrial Research Organisation | Composite electrodes for use in solid electrolyte devices |
DE3610364A1 (de) * | 1986-03-27 | 1987-10-01 | Kernforschungsz Karlsruhe | Verfahren zum verringern des no(pfeil abwaerts)x(pfeil abwaerts)-gehaltes in gasen, bei welchem dem gaststrom kontinuierlich nh(pfeil abwaerts)3(pfeil abwaerts) zugesetzt wird |
US4879016A (en) * | 1986-07-25 | 1989-11-07 | Ceramatec, Inc. | Electrolyte assembly for oxygen generating device and electrodes therefor |
US4931213A (en) * | 1987-01-23 | 1990-06-05 | Cass Richard B | Electrically-conductive titanium suboxides |
DE68927087T2 (de) * | 1988-11-01 | 1997-02-06 | Ngk Spark Plug Co | Sauerstoffempfindlicher Sensor und Verfahren zu dessen Herstellung |
JP2514701B2 (ja) * | 1988-12-02 | 1996-07-10 | 日本特殊陶業株式会社 | 酸素センサ |
DE4021929C2 (de) * | 1990-07-10 | 1998-04-30 | Abb Patent Gmbh | Sensor |
US5480535A (en) * | 1992-12-28 | 1996-01-02 | Kabushiki Kaisha Toyota Chuo Kenkyusho | Thin film multilayered air/fuel ratio sensor |
JPH06235715A (ja) * | 1993-02-10 | 1994-08-23 | Toyota Motor Corp | 酸素濃度センサ |
DE4311851A1 (de) * | 1993-04-10 | 1994-10-13 | Bosch Gmbh Robert | Sensoranordnung zur Bestimmung von Gaskomponenten und/oder von Gaskonzentrationen von Gasgemischen |
DE4408504A1 (de) * | 1994-03-14 | 1995-09-21 | Bosch Gmbh Robert | Sensor zur Bestimmung der Konzentration von Gaskomponenten in Gasgemischen |
DE4408361C2 (de) * | 1994-03-14 | 1996-02-01 | Bosch Gmbh Robert | Elektrochemischer Sensor zur Bestimmung der Sauerstoffkonzentration in Gasgemischen |
-
1996
- 1996-06-12 DE DE19623434A patent/DE19623434A1/de not_active Ceased
-
1997
- 1997-05-16 US US09/011,577 patent/US6022464A/en not_active Expired - Lifetime
- 1997-05-16 WO PCT/DE1997/000996 patent/WO1997047963A1/de not_active Application Discontinuation
- 1997-05-16 JP JP50103698A patent/JP4162262B2/ja not_active Expired - Fee Related
- 1997-05-16 EP EP97923831A patent/EP0843813A1/de not_active Withdrawn
- 1997-05-16 CN CN97190685A patent/CN1195403A/zh active Pending
- 1997-05-16 KR KR1019980701005A patent/KR19990036337A/ko not_active Application Discontinuation
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012504235A (ja) * | 2008-09-30 | 2012-02-16 | イルジン カッパー ホイル カンパニー リミテッド | 長期信号安定性を有する窒素酸化物ガスセンサー |
JP2012504236A (ja) * | 2008-09-30 | 2012-02-16 | イルジン カッパー ホイル カンパニー リミテッド | 窒素酸化物ガスセンサー |
US8399883B2 (en) | 2008-09-30 | 2013-03-19 | Iljin Copper Foil Co., Ltd. | Nitrogen-oxide gas sensor with long signal stability |
Also Published As
Publication number | Publication date |
---|---|
KR19990036337A (ko) | 1999-05-25 |
CN1195403A (zh) | 1998-10-07 |
DE19623434A1 (de) | 1997-12-18 |
WO1997047963A1 (de) | 1997-12-18 |
US6022464A (en) | 2000-02-08 |
EP0843813A1 (de) | 1998-05-27 |
JP4162262B2 (ja) | 2008-10-08 |
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