JPH1119563A - 塗布装置および塗布方法 - Google Patents
塗布装置および塗布方法Info
- Publication number
- JPH1119563A JPH1119563A JP17998997A JP17998997A JPH1119563A JP H1119563 A JPH1119563 A JP H1119563A JP 17998997 A JP17998997 A JP 17998997A JP 17998997 A JP17998997 A JP 17998997A JP H1119563 A JPH1119563 A JP H1119563A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- coating
- coating liquid
- nozzle
- coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 351
- 239000011248 coating agent Substances 0.000 title claims abstract description 342
- 239000007788 liquid Substances 0.000 claims abstract description 239
- 238000013459 approach Methods 0.000 claims abstract description 28
- 239000000758 substrate Substances 0.000 claims description 291
- 238000004140 cleaning Methods 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 15
- 230000009471 action Effects 0.000 claims description 12
- 238000001035 drying Methods 0.000 claims description 8
- 230000008569 process Effects 0.000 claims description 7
- 238000012545 processing Methods 0.000 claims description 3
- 230000001360 synchronised effect Effects 0.000 abstract description 3
- 238000009736 wetting Methods 0.000 abstract 1
- 238000000926 separation method Methods 0.000 description 53
- 230000007246 mechanism Effects 0.000 description 10
- 229910000831 Steel Inorganic materials 0.000 description 7
- 239000010959 steel Substances 0.000 description 7
- 230000008719 thickening Effects 0.000 description 6
- 230000005499 meniscus Effects 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 238000004528 spin coating Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000007599 discharging Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 101100524645 Toxoplasma gondii ROM5 gene Proteins 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001291 vacuum drying Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Liquid Crystal (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17998997A JPH1119563A (ja) | 1997-07-04 | 1997-07-04 | 塗布装置および塗布方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17998997A JPH1119563A (ja) | 1997-07-04 | 1997-07-04 | 塗布装置および塗布方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1119563A true JPH1119563A (ja) | 1999-01-26 |
| JPH1119563A5 JPH1119563A5 (enExample) | 2005-03-03 |
Family
ID=16075522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17998997A Abandoned JPH1119563A (ja) | 1997-07-04 | 1997-07-04 | 塗布装置および塗布方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1119563A (enExample) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003031238A (ja) * | 2001-07-11 | 2003-01-31 | Honda Motor Co Ltd | 燃料電池用セパレータのシール材塗布方法 |
| JP2007196190A (ja) * | 2006-01-30 | 2007-08-09 | Toyo Seikan Kaisha Ltd | 粘稠物の環状塗布方法およびその装置 |
| JP2007237072A (ja) * | 2006-03-08 | 2007-09-20 | Sumitomo Chemical Co Ltd | 塗布方法及びこれを用いたカラーフィルタの製造方法 |
| JP2007283214A (ja) * | 2006-04-17 | 2007-11-01 | Toyota Auto Body Co Ltd | 塗布剤の塗布方法とその塗布装置 |
| CN103100506A (zh) * | 2013-03-04 | 2013-05-15 | 深圳市信宇人科技有限公司 | 头尾厚度可精密控制的挤压式涂布头 |
| JP2014193449A (ja) * | 2013-03-29 | 2014-10-09 | Fujita Corp | 塗料の塗布方法および塗布装置 |
-
1997
- 1997-07-04 JP JP17998997A patent/JPH1119563A/ja not_active Abandoned
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003031238A (ja) * | 2001-07-11 | 2003-01-31 | Honda Motor Co Ltd | 燃料電池用セパレータのシール材塗布方法 |
| JP2007196190A (ja) * | 2006-01-30 | 2007-08-09 | Toyo Seikan Kaisha Ltd | 粘稠物の環状塗布方法およびその装置 |
| JP2007237072A (ja) * | 2006-03-08 | 2007-09-20 | Sumitomo Chemical Co Ltd | 塗布方法及びこれを用いたカラーフィルタの製造方法 |
| JP2007283214A (ja) * | 2006-04-17 | 2007-11-01 | Toyota Auto Body Co Ltd | 塗布剤の塗布方法とその塗布装置 |
| CN103100506A (zh) * | 2013-03-04 | 2013-05-15 | 深圳市信宇人科技有限公司 | 头尾厚度可精密控制的挤压式涂布头 |
| JP2014193449A (ja) * | 2013-03-29 | 2014-10-09 | Fujita Corp | 塗料の塗布方法および塗布装置 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Effective date: 20040401 Free format text: JAPANESE INTERMEDIATE CODE: A523 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20040401 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20060919 |
|
| A131 | Notification of reasons for refusal |
Effective date: 20060926 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
|
| A762 | Written abandonment of application |
Effective date: 20061108 Free format text: JAPANESE INTERMEDIATE CODE: A762 |