JPH11195504A - 電気抵抗薄膜及びその製造法並びにセンサデ バイス - Google Patents

電気抵抗薄膜及びその製造法並びにセンサデ バイス

Info

Publication number
JPH11195504A
JPH11195504A JP9370342A JP37034297A JPH11195504A JP H11195504 A JPH11195504 A JP H11195504A JP 9370342 A JP9370342 A JP 9370342A JP 37034297 A JP37034297 A JP 37034297A JP H11195504 A JPH11195504 A JP H11195504A
Authority
JP
Japan
Prior art keywords
less
thin film
resistance
film
electric resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9370342A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11195504A5 (enExample
Inventor
Eiji Niwa
英二 丹羽
Takeshi Masumoto
剛 増本
Hideo Kaneko
秀夫 金子
Sachihiro Sasaki
祥弘 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Research Institute for Electromagnetic Materials
Original Assignee
Research Institute for Electromagnetic Materials
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Research Institute for Electromagnetic Materials filed Critical Research Institute for Electromagnetic Materials
Priority to JP9370342A priority Critical patent/JPH11195504A/ja
Publication of JPH11195504A publication Critical patent/JPH11195504A/ja
Publication of JPH11195504A5 publication Critical patent/JPH11195504A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Adjustable Resistors (AREA)
JP9370342A 1997-12-26 1997-12-26 電気抵抗薄膜及びその製造法並びにセンサデ バイス Pending JPH11195504A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9370342A JPH11195504A (ja) 1997-12-26 1997-12-26 電気抵抗薄膜及びその製造法並びにセンサデ バイス

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9370342A JPH11195504A (ja) 1997-12-26 1997-12-26 電気抵抗薄膜及びその製造法並びにセンサデ バイス

Publications (2)

Publication Number Publication Date
JPH11195504A true JPH11195504A (ja) 1999-07-21
JPH11195504A5 JPH11195504A5 (enExample) 2005-07-28

Family

ID=18496664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9370342A Pending JPH11195504A (ja) 1997-12-26 1997-12-26 電気抵抗薄膜及びその製造法並びにセンサデ バイス

Country Status (1)

Country Link
JP (1) JPH11195504A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001221696A (ja) * 2000-02-10 2001-08-17 Res Inst Electric Magnetic Alloys 感温感歪複合センサ
JP2002048607A (ja) * 2000-08-02 2002-02-15 Res Inst Electric Magnetic Alloys 薄膜触覚センサ
JP2007294929A (ja) * 2006-03-28 2007-11-08 Mitsui Mining & Smelting Co Ltd 薄膜センサの製造方法、薄膜センサおよび薄膜センサモジュール
JP2011117971A (ja) * 2011-02-07 2011-06-16 Res Inst Electric Magnetic Alloys 感温感歪複合センサ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001221696A (ja) * 2000-02-10 2001-08-17 Res Inst Electric Magnetic Alloys 感温感歪複合センサ
JP2002048607A (ja) * 2000-08-02 2002-02-15 Res Inst Electric Magnetic Alloys 薄膜触覚センサ
JP2007294929A (ja) * 2006-03-28 2007-11-08 Mitsui Mining & Smelting Co Ltd 薄膜センサの製造方法、薄膜センサおよび薄膜センサモジュール
JP2011117971A (ja) * 2011-02-07 2011-06-16 Res Inst Electric Magnetic Alloys 感温感歪複合センサ

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