JPH11176733A - 露光方法および装置 - Google Patents

露光方法および装置

Info

Publication number
JPH11176733A
JPH11176733A JP9345562A JP34556297A JPH11176733A JP H11176733 A JPH11176733 A JP H11176733A JP 9345562 A JP9345562 A JP 9345562A JP 34556297 A JP34556297 A JP 34556297A JP H11176733 A JPH11176733 A JP H11176733A
Authority
JP
Japan
Prior art keywords
error
optical system
reticle
projection optical
mark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9345562A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11176733A5 (enExample
Inventor
Masahiko Yasuda
雅彦 安田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP9345562A priority Critical patent/JPH11176733A/ja
Publication of JPH11176733A publication Critical patent/JPH11176733A/ja
Publication of JPH11176733A5 publication Critical patent/JPH11176733A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP9345562A 1997-12-15 1997-12-15 露光方法および装置 Pending JPH11176733A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9345562A JPH11176733A (ja) 1997-12-15 1997-12-15 露光方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9345562A JPH11176733A (ja) 1997-12-15 1997-12-15 露光方法および装置

Publications (2)

Publication Number Publication Date
JPH11176733A true JPH11176733A (ja) 1999-07-02
JPH11176733A5 JPH11176733A5 (enExample) 2005-07-28

Family

ID=18377437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9345562A Pending JPH11176733A (ja) 1997-12-15 1997-12-15 露光方法および装置

Country Status (1)

Country Link
JP (1) JPH11176733A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002025711A1 (en) * 2000-09-21 2002-03-28 Nikon Corporation Method of measuring image characteristics and exposure method
JP2009170466A (ja) * 2008-01-10 2009-07-30 Canon Inc 評価方法、調整方法、露光装置、およびコンピュータプログラム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002025711A1 (en) * 2000-09-21 2002-03-28 Nikon Corporation Method of measuring image characteristics and exposure method
JP2009170466A (ja) * 2008-01-10 2009-07-30 Canon Inc 評価方法、調整方法、露光装置、およびコンピュータプログラム

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