JPH11174108A - 電極配線の検査装置 - Google Patents

電極配線の検査装置

Info

Publication number
JPH11174108A
JPH11174108A JP9362295A JP36229597A JPH11174108A JP H11174108 A JPH11174108 A JP H11174108A JP 9362295 A JP9362295 A JP 9362295A JP 36229597 A JP36229597 A JP 36229597A JP H11174108 A JPH11174108 A JP H11174108A
Authority
JP
Japan
Prior art keywords
substrate
electrode wiring
wiring
probe
predetermined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9362295A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11174108A5 (enExample
Inventor
Hiromi Maeda
博己 前田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP9362295A priority Critical patent/JPH11174108A/ja
Publication of JPH11174108A publication Critical patent/JPH11174108A/ja
Publication of JPH11174108A5 publication Critical patent/JPH11174108A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Gas-Filled Discharge Tubes (AREA)
JP9362295A 1997-12-12 1997-12-12 電極配線の検査装置 Pending JPH11174108A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9362295A JPH11174108A (ja) 1997-12-12 1997-12-12 電極配線の検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9362295A JPH11174108A (ja) 1997-12-12 1997-12-12 電極配線の検査装置

Publications (2)

Publication Number Publication Date
JPH11174108A true JPH11174108A (ja) 1999-07-02
JPH11174108A5 JPH11174108A5 (enExample) 2005-06-23

Family

ID=18476488

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9362295A Pending JPH11174108A (ja) 1997-12-12 1997-12-12 電極配線の検査装置

Country Status (1)

Country Link
JP (1) JPH11174108A (enExample)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010111969A (ko) * 2000-06-14 2001-12-20 은탁 자기헤드를 이용한 플라즈마 디스플레이 패널의 전극패턴검사 장치 및 그 방법
KR20020091691A (ko) * 2001-05-31 2002-12-06 주식회사 현대 디스플레이 테크놀로지 액정표시장치 테스트 프레임
KR100447192B1 (ko) * 2002-01-15 2004-09-04 엘지전자 주식회사 피디피 모듈의 이상 표시장치 및 방법
JP2007322428A (ja) * 2006-05-31 2007-12-13 Applied Materials Inc 大面積基板上での電子デバイス検査のためのプローバ
JP2008122145A (ja) * 2006-11-09 2008-05-29 Micronics Japan Co Ltd プローブ位置合わせ方法及び可動式プローブユニット機構並びに検査装置
KR100902246B1 (ko) 2008-01-03 2009-06-11 삼성모바일디스플레이주식회사 유기발광 표시장치의 원장단위 검사 장치
JP2009539112A (ja) * 2006-05-31 2009-11-12 アプライド マテリアルズ インコーポレイテッド Ｔｆｔ−ｌｃｄ検査のための小型プローバ
US7786742B2 (en) 2006-05-31 2010-08-31 Applied Materials, Inc. Prober for electronic device testing on large area substrates
JP2015057605A (ja) * 2006-05-31 2015-03-26 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 大面積基板上での電子デバイス検査のためのプローバ

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010111969A (ko) * 2000-06-14 2001-12-20 은탁 자기헤드를 이용한 플라즈마 디스플레이 패널의 전극패턴검사 장치 및 그 방법
KR20020091691A (ko) * 2001-05-31 2002-12-06 주식회사 현대 디스플레이 테크놀로지 액정표시장치 테스트 프레임
KR100447192B1 (ko) * 2002-01-15 2004-09-04 엘지전자 주식회사 피디피 모듈의 이상 표시장치 및 방법
JP2007322428A (ja) * 2006-05-31 2007-12-13 Applied Materials Inc 大面積基板上での電子デバイス検査のためのプローバ
JP2009539112A (ja) * 2006-05-31 2009-11-12 アプライド マテリアルズ インコーポレイテッド Ｔｆｔ−ｌｃｄ検査のための小型プローバ
US7786742B2 (en) 2006-05-31 2010-08-31 Applied Materials, Inc. Prober for electronic device testing on large area substrates
KR101088566B1 (ko) * 2006-05-31 2011-12-05 어플라이드 머티어리얼스, 인코포레이티드 대면적 기판을 테스트하기 위한 테스트 시스템 및 프로버 조립체
JP2015057605A (ja) * 2006-05-31 2015-03-26 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 大面積基板上での電子デバイス検査のためのプローバ
JP2008122145A (ja) * 2006-11-09 2008-05-29 Micronics Japan Co Ltd プローブ位置合わせ方法及び可動式プローブユニット機構並びに検査装置
KR100902246B1 (ko) 2008-01-03 2009-06-11 삼성모바일디스플레이주식회사 유기발광 표시장치의 원장단위 검사 장치

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