JPH11150075A5 - - Google Patents

Info

Publication number
JPH11150075A5
JPH11150075A5 JP1997351948A JP35194897A JPH11150075A5 JP H11150075 A5 JPH11150075 A5 JP H11150075A5 JP 1997351948 A JP1997351948 A JP 1997351948A JP 35194897 A JP35194897 A JP 35194897A JP H11150075 A5 JPH11150075 A5 JP H11150075A5
Authority
JP
Japan
Prior art keywords
quartz
diffusion
lid
sample
reference surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997351948A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11150075A (ja
JP4305682B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP35194897A priority Critical patent/JP4305682B2/ja
Priority claimed from JP35194897A external-priority patent/JP4305682B2/ja
Publication of JPH11150075A publication Critical patent/JPH11150075A/ja
Publication of JPH11150075A5 publication Critical patent/JPH11150075A5/ja
Application granted granted Critical
Publication of JP4305682B2 publication Critical patent/JP4305682B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP35194897A 1997-11-14 1997-11-14 拡散装置とこれを用いた半導体結晶への不純物拡散法 Expired - Lifetime JP4305682B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP35194897A JP4305682B2 (ja) 1997-11-14 1997-11-14 拡散装置とこれを用いた半導体結晶への不純物拡散法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP35194897A JP4305682B2 (ja) 1997-11-14 1997-11-14 拡散装置とこれを用いた半導体結晶への不純物拡散法

Publications (3)

Publication Number Publication Date
JPH11150075A JPH11150075A (ja) 1999-06-02
JPH11150075A5 true JPH11150075A5 (enExample) 2005-07-07
JP4305682B2 JP4305682B2 (ja) 2009-07-29

Family

ID=18420729

Family Applications (1)

Application Number Title Priority Date Filing Date
JP35194897A Expired - Lifetime JP4305682B2 (ja) 1997-11-14 1997-11-14 拡散装置とこれを用いた半導体結晶への不純物拡散法

Country Status (1)

Country Link
JP (1) JP4305682B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4941625B2 (ja) * 2005-02-28 2012-05-30 住友電気工業株式会社 フォトダイオードの作製方法
CN100377299C (zh) * 2005-12-05 2008-03-26 北京北方微电子基地设备工艺研究中心有限责任公司 一种石英盖定位保护装置
CN104716027B (zh) * 2013-12-13 2017-08-01 山东华光光电子股份有限公司 一种半导体激光器Zn杂质源扩散的装置及其应用

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