JPH11123658A5 - - Google Patents

Info

Publication number
JPH11123658A5
JPH11123658A5 JP1997306621A JP30662197A JPH11123658A5 JP H11123658 A5 JPH11123658 A5 JP H11123658A5 JP 1997306621 A JP1997306621 A JP 1997306621A JP 30662197 A JP30662197 A JP 30662197A JP H11123658 A5 JPH11123658 A5 JP H11123658A5
Authority
JP
Japan
Prior art keywords
dresser
dresser body
scraper
brush
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997306621A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11123658A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9306621A priority Critical patent/JPH11123658A/ja
Priority claimed from JP9306621A external-priority patent/JPH11123658A/ja
Priority to US09/134,695 priority patent/US6152813A/en
Publication of JPH11123658A publication Critical patent/JPH11123658A/ja
Publication of JPH11123658A5 publication Critical patent/JPH11123658A5/ja
Pending legal-status Critical Current

Links

JP9306621A 1997-10-21 1997-10-21 ドレッサ及びドレッシング装置 Pending JPH11123658A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP9306621A JPH11123658A (ja) 1997-10-21 1997-10-21 ドレッサ及びドレッシング装置
US09/134,695 US6152813A (en) 1997-10-21 1998-08-14 Dresser and dressing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9306621A JPH11123658A (ja) 1997-10-21 1997-10-21 ドレッサ及びドレッシング装置

Publications (2)

Publication Number Publication Date
JPH11123658A JPH11123658A (ja) 1999-05-11
JPH11123658A5 true JPH11123658A5 (enExample) 2005-06-09

Family

ID=17959299

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9306621A Pending JPH11123658A (ja) 1997-10-21 1997-10-21 ドレッサ及びドレッシング装置

Country Status (2)

Country Link
US (1) US6152813A (enExample)
JP (1) JPH11123658A (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6386963B1 (en) * 1999-10-29 2002-05-14 Applied Materials, Inc. Conditioning disk for conditioning a polishing pad
DE10046893A1 (de) * 2000-09-21 2002-01-31 Wacker Siltronic Halbleitermat Doppelseiten-Polierverfahren mit Tuchkonditionierung
DE10162597C1 (de) * 2001-12-19 2003-03-20 Wacker Siltronic Halbleitermat Verfahren zur Herstellung beidseitig polierter Halbleiterscheiben
US6821190B1 (en) * 2002-05-06 2004-11-23 Silterra Malaysia Sdn. Bhd. Static pad conditioner
US6764389B1 (en) * 2002-08-20 2004-07-20 Lsi Logic Corporation Conditioning bar assembly having an abrasion member supported on a polycarbonate member
US7170190B1 (en) * 2003-12-16 2007-01-30 Lam Research Corporation Apparatus for oscillating a head and methods for implementing the same
US7033253B2 (en) * 2004-08-12 2006-04-25 Micron Technology, Inc. Polishing pad conditioners having abrasives and brush elements, and associated systems and methods
JP5390750B2 (ja) * 2007-03-30 2014-01-15 ラムバス・インコーポレーテッド 研磨装置、および研磨パッド再生処理方法
JP2010179407A (ja) * 2009-02-05 2010-08-19 Elpida Memory Inc Ｃｍｐ装置
JP2011079076A (ja) * 2009-10-05 2011-04-21 Toshiba Corp 研磨装置及び研磨方法
CN110744450B (zh) * 2019-10-21 2021-11-26 西安奕斯伟材料科技有限公司 一种抛光垫的修整器及修整方法
JP7728108B2 (ja) * 2021-06-23 2025-08-22 株式会社ディスコ 剥離装置
JP7680125B2 (ja) * 2021-07-13 2025-05-20 東京エレクトロン株式会社 洗浄ブラシ、基板加工装置、及び基板加工方法
CN113927470A (zh) * 2021-11-10 2022-01-14 中航动力株洲航空零部件制造有限公司 一种高刚度珩磨装置
CN114952452B (zh) * 2022-04-19 2023-09-26 赛莱克斯微系统科技（北京）有限公司 抛光垫修整器、化学机械抛光装置和方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54129891A (en) * 1978-03-30 1979-10-08 Matsushita Electric Ind Co Ltd Semiconductor laser unit
FI73277C (fi) * 1985-10-15 1987-09-10 Lundin Lars Patent Rengoeringsredskapskombination foer rening av strandvatten och strandomraode som nedsmutsats av olja.
US5091753A (en) * 1991-05-13 1992-02-25 Eastman Kodak Company Cleaning apparatus having a surface-conforming blade
JPH04364730A (ja) * 1991-06-12 1992-12-17 Hitachi Ltd 自動ドレッシング装置
US5427644A (en) * 1993-01-11 1995-06-27 Tokyo Seimitsu Co., Ltd. Method of manufacturing semiconductor wafer and system therefor
JP2622069B2 (ja) * 1993-06-30 1997-06-18 三菱マテリアル株式会社 研磨布のドレッシング装置
USD362019S (en) 1993-11-03 1995-09-05 A.T. Cross Company Writing instrument
US5518542A (en) * 1993-11-05 1996-05-21 Tokyo Electron Limited Double-sided substrate cleaning apparatus
JP3044277B2 (ja) * 1994-12-21 2000-05-22 信越半導体株式会社 ウェーハの洗浄及び洗浄乾燥装置
TW316995B (enExample) * 1995-01-19 1997-10-01 Tokyo Electron Co Ltd
JP2887095B2 (ja) * 1995-08-31 1999-04-26 芝浦メカトロニクス株式会社 洗浄装置
US5746302A (en) * 1996-04-02 1998-05-05 Bowman; John H. Apparatus for cleaning conveyors
US5802667A (en) * 1996-09-09 1998-09-08 Paula Steates Duct cleaning device

Similar Documents

Publication Publication Date Title
JPH11123658A5 (enExample)
JPH0852648A (ja) ２つの機能を有して駆動される振動手工具
US20100024139A1 (en) Hand-Guided Device and Tool Connectable Thereto
AU7478598A (en) Apparatus and method for cleaning and finishing
JP2007533478A5 (enExample)
US20010041527A1 (en) Disk for conditioning polishing pads
EP0361505A2 (en) Surface working pad assemmbly
DE69914766D1 (de) Drehende abrichtrolle mit aufgelöteter diamantschicht
US6152813A (en) Dresser and dressing apparatus
CA2369657A1 (en) Rotary abrasive tool
JP2000127029A (ja) 研磨装置
WO2007044343A2 (en) Planetary drive heads for grinding/polishing pads
US20030092368A1 (en) Surface treatment tool
JP2003053665A (ja) ドレッサー
WO2010004601A1 (en) Abrasive member like abrasive sheet, strip, roll or belt for surface finishing or surface preparation of manufactured articles.
US3857135A (en) Vehicle polishing apparatus
JP2000218482A (ja) 枚葉式端面研磨機
AU719573B2 (en) Automatic floor washing apparatus
US4043081A (en) Dry lap polisher
JP2001179600A (ja) ドレッサ
JP3107068U (ja) 自動車ボディ用研磨バフ
JP3904619B2 (ja) バフ盤
JPH0234746B2 (enExample)
US6491576B1 (en) Grinding tool
JPH1015835A (ja) バ フ