JPH10340947A5 - - Google Patents

Info

Publication number
JPH10340947A5
JPH10340947A5 JP1997151048A JP15104897A JPH10340947A5 JP H10340947 A5 JPH10340947 A5 JP H10340947A5 JP 1997151048 A JP1997151048 A JP 1997151048A JP 15104897 A JP15104897 A JP 15104897A JP H10340947 A5 JPH10340947 A5 JP H10340947A5
Authority
JP
Japan
Prior art keywords
rotor
stator
end surface
underside
cylindrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997151048A
Other languages
English (en)
Japanese (ja)
Other versions
JP3909915B2 (ja
JPH10340947A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP15104897A priority Critical patent/JP3909915B2/ja
Priority claimed from JP15104897A external-priority patent/JP3909915B2/ja
Publication of JPH10340947A publication Critical patent/JPH10340947A/ja
Publication of JPH10340947A5 publication Critical patent/JPH10340947A5/ja
Application granted granted Critical
Publication of JP3909915B2 publication Critical patent/JP3909915B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP15104897A 1997-06-09 1997-06-09 スピン処理装置 Expired - Fee Related JP3909915B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15104897A JP3909915B2 (ja) 1997-06-09 1997-06-09 スピン処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15104897A JP3909915B2 (ja) 1997-06-09 1997-06-09 スピン処理装置

Publications (3)

Publication Number Publication Date
JPH10340947A JPH10340947A (ja) 1998-12-22
JPH10340947A5 true JPH10340947A5 (enrdf_load_stackoverflow) 2005-04-14
JP3909915B2 JP3909915B2 (ja) 2007-04-25

Family

ID=15510169

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15104897A Expired - Fee Related JP3909915B2 (ja) 1997-06-09 1997-06-09 スピン処理装置

Country Status (1)

Country Link
JP (1) JP3909915B2 (enrdf_load_stackoverflow)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4659168B2 (ja) * 1999-12-21 2011-03-30 芝浦メカトロニクス株式会社 スピン処理装置
JP4611482B2 (ja) * 2000-02-22 2011-01-12 株式会社テック・ヤスダ バイス用のインデックスワークホルダ
KR100367910B1 (ko) * 2000-11-09 2003-01-14 한국디엔에스 주식회사 박판 고정 장치
JP4681148B2 (ja) * 2001-04-27 2011-05-11 芝浦メカトロニクス株式会社 スピン処理装置
JP4177068B2 (ja) * 2002-10-08 2008-11-05 葵精機株式会社 基板処理装置およびその製造方法
TWI591757B (zh) * 2009-03-31 2017-07-11 蘭研究公司 用以處理盤狀物品的裝置
JP6179012B2 (ja) * 2013-07-28 2017-08-16 アテル株式会社 ウエハ位置決め装置
JP6554392B2 (ja) 2015-11-12 2019-07-31 株式会社ディスコ スピンナー装置
CN107186506A (zh) * 2017-06-19 2017-09-22 侯忠备 一种用于端面环形孔的钻孔夹具
CN107470955B (zh) * 2017-09-29 2020-04-17 利辛县雨若信息科技有限公司 一种汽车车轮支架专用液压夹具
CN110238674B (zh) * 2019-06-20 2020-11-13 徐州玉伟机械设备有限公司 一种后桥生产用高精度双主轴机床
CN113857887A (zh) * 2020-06-30 2021-12-31 东风（十堰）汽车液压动力有限公司 一种弹性自动矫正工件角度侧向定位组件
CN112658732A (zh) * 2020-12-24 2021-04-16 丁子晨 一种模具生产用固定装置
CN114823476B (zh) * 2022-06-27 2022-11-18 杭州众硅电子科技有限公司 一种晶圆旋转机构、晶圆旋转夹持机构及晶圆清洗干燥系统
CN119480768B (zh) * 2024-11-08 2025-09-09 江苏亚电科技股份有限公司 一种单片晶圆清洗装置晶圆支撑盘上支撑柱驱动结构
CN119973749A (zh) * 2025-03-24 2025-05-13 湖南睿弓机械科技有限公司 一种液压阀体加工夹具

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6428934A (en) * 1987-07-24 1989-01-31 Hitachi Electr Eng Wafer-positioning mechanism of surface inspection device
JPH09107023A (ja) * 1995-10-13 1997-04-22 Toshiba Microelectron Corp 被処理物の回転保持装置

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