JPH10303142A5 - - Google Patents
Info
- Publication number
- JPH10303142A5 JPH10303142A5 JP1997118807A JP11880797A JPH10303142A5 JP H10303142 A5 JPH10303142 A5 JP H10303142A5 JP 1997118807 A JP1997118807 A JP 1997118807A JP 11880797 A JP11880797 A JP 11880797A JP H10303142 A5 JPH10303142 A5 JP H10303142A5
- Authority
- JP
- Japan
- Prior art keywords
- titanium
- film
- nitride film
- contact hole
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11880797A JPH10303142A (ja) | 1997-04-22 | 1997-04-22 | 半導体装置及びその作製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11880797A JPH10303142A (ja) | 1997-04-22 | 1997-04-22 | 半導体装置及びその作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10303142A JPH10303142A (ja) | 1998-11-13 |
| JPH10303142A5 true JPH10303142A5 (enExample) | 2005-03-10 |
Family
ID=14745621
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11880797A Withdrawn JPH10303142A (ja) | 1997-04-22 | 1997-04-22 | 半導体装置及びその作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH10303142A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002202527A (ja) * | 2000-12-28 | 2002-07-19 | Nec Corp | アクティブマトリクス型液晶表示装置 |
| TW200710471A (en) * | 2005-07-20 | 2007-03-16 | Samsung Electronics Co Ltd | Array substrate for display device |
| JP4885914B2 (ja) * | 2008-07-16 | 2012-02-29 | 三菱電機株式会社 | 表示装置 |
| WO2012117692A1 (ja) * | 2011-02-28 | 2012-09-07 | シャープ株式会社 | 電極基板並びにそれを備えた表示装置及びタッチパネル |
-
1997
- 1997-04-22 JP JP11880797A patent/JPH10303142A/ja not_active Withdrawn
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