JPH10260139A - 基板自動検査装置 - Google Patents
基板自動検査装置Info
- Publication number
- JPH10260139A JPH10260139A JP9062881A JP6288197A JPH10260139A JP H10260139 A JPH10260139 A JP H10260139A JP 9062881 A JP9062881 A JP 9062881A JP 6288197 A JP6288197 A JP 6288197A JP H10260139 A JPH10260139 A JP H10260139A
- Authority
- JP
- Japan
- Prior art keywords
- image
- substrate
- macro
- inspection
- defect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 title claims abstract description 165
- 239000000758 substrate Substances 0.000 title claims abstract description 143
- 230000007547 defect Effects 0.000 claims abstract description 97
- 238000012545 processing Methods 0.000 claims abstract description 46
- 238000003384 imaging method Methods 0.000 claims description 37
- 238000009434 installation Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 30
- 239000004973 liquid crystal related substance Substances 0.000 abstract description 24
- 230000001788 irregular Effects 0.000 abstract 2
- 238000001514 detection method Methods 0.000 description 15
- 230000000694 effects Effects 0.000 description 13
- 238000005286 illumination Methods 0.000 description 13
- 238000010586 diagram Methods 0.000 description 12
- 230000002950 deficient Effects 0.000 description 10
- 238000012935 Averaging Methods 0.000 description 9
- 230000003287 optical effect Effects 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000006870 function Effects 0.000 description 3
- 230000003252 repetitive effect Effects 0.000 description 3
- 238000007665 sagging Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 235000019557 luminance Nutrition 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9062881A JPH10260139A (ja) | 1997-03-17 | 1997-03-17 | 基板自動検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9062881A JPH10260139A (ja) | 1997-03-17 | 1997-03-17 | 基板自動検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10260139A true JPH10260139A (ja) | 1998-09-29 |
| JPH10260139A5 JPH10260139A5 (enExample) | 2005-02-17 |
Family
ID=13213062
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9062881A Pending JPH10260139A (ja) | 1997-03-17 | 1997-03-17 | 基板自動検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH10260139A (enExample) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001124660A (ja) * | 1999-10-25 | 2001-05-11 | Horiba Ltd | 平面表示装置の欠陥・異物検査方法およびその検査装置 |
| JP2003158644A (ja) * | 2001-11-20 | 2003-05-30 | Toppan Printing Co Ltd | 一定周期パターンを持つ平面状被写体の撮像装置 |
| WO2003087923A1 (fr) * | 2002-04-03 | 2003-10-23 | Nh Techno Glass Corporation | Substrat de verre pour unite d'affichage a cristaux liquides, procede de production d'un verre de base et dispositif d'inspection de verre de base |
| CN101825781B (zh) | 2009-03-06 | 2012-02-29 | 北京京东方光电科技有限公司 | 光学测试装置 |
| KR101146081B1 (ko) | 2003-03-17 | 2012-05-15 | 오르보테크 엘티디. | 마이크로-검사 입력을 이용한 매크로 결함 검출 방법 및시스템 |
| JP2022067253A (ja) * | 2020-10-20 | 2022-05-06 | タカノ株式会社 | 厚みムラ検査装置及び厚みムラ検査方法 |
| JP2023124714A (ja) * | 2022-02-25 | 2023-09-06 | 日本ゼオン株式会社 | 検査方法及び検査装置 |
-
1997
- 1997-03-17 JP JP9062881A patent/JPH10260139A/ja active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001124660A (ja) * | 1999-10-25 | 2001-05-11 | Horiba Ltd | 平面表示装置の欠陥・異物検査方法およびその検査装置 |
| JP2003158644A (ja) * | 2001-11-20 | 2003-05-30 | Toppan Printing Co Ltd | 一定周期パターンを持つ平面状被写体の撮像装置 |
| WO2003087923A1 (fr) * | 2002-04-03 | 2003-10-23 | Nh Techno Glass Corporation | Substrat de verre pour unite d'affichage a cristaux liquides, procede de production d'un verre de base et dispositif d'inspection de verre de base |
| JPWO2003087923A1 (ja) * | 2002-04-03 | 2005-08-25 | エヌエッチ・テクノグラス株式会社 | 液晶表示装置用ガラス基板及びそのマザーガラスの製造方法並びにマザーガラス検査装置 |
| CN100462789C (zh) * | 2002-04-03 | 2009-02-18 | Nh科技玻璃株式会社 | 液晶显示器用玻璃基板及其基样玻璃制造方法和检测装置 |
| KR101146081B1 (ko) | 2003-03-17 | 2012-05-15 | 오르보테크 엘티디. | 마이크로-검사 입력을 이용한 매크로 결함 검출 방법 및시스템 |
| CN101825781B (zh) | 2009-03-06 | 2012-02-29 | 北京京东方光电科技有限公司 | 光学测试装置 |
| JP2022067253A (ja) * | 2020-10-20 | 2022-05-06 | タカノ株式会社 | 厚みムラ検査装置及び厚みムラ検査方法 |
| JP2023124714A (ja) * | 2022-02-25 | 2023-09-06 | 日本ゼオン株式会社 | 検査方法及び検査装置 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3892906B2 (ja) | 透明な構造における三次元の欠陥位置を検出するための技術 | |
| JP2002195910A (ja) | 光学部品の検査装置 | |
| JPWO2007074770A1 (ja) | 画像解析によって欠陥検査を行う欠陥検査装置 | |
| JP5085953B2 (ja) | 表面検査装置 | |
| JP2010197367A (ja) | ガラス表面の異物検査装置及びその方法｛ｄｅｔｅｃｔｉｏｎａｐｐａｒａｔｕｓｆｏｒｐａｒｔｉｃｌｅｏｎｔｈｅｇｌａｓｓａｎｄｄｅｔｅｃｔｉｏｎｍｅｔｈｏｄｕｓｉｎｇｔｈｅｓａｍｅ｝ | |
| JP4583155B2 (ja) | 欠陥検査方法及びシステム、並びにフォトマスクの製造方法 | |
| JP3752338B2 (ja) | マクロ検査装置及びプロセスモニタリング方法 | |
| JPWO2007132925A1 (ja) | 表面検査装置 | |
| JPS61256237A (ja) | 周期性パタ−ンの欠陥検査方法 | |
| JP2009204388A (ja) | 欠陥検査方法 | |
| JP4414533B2 (ja) | 欠陥検査装置 | |
| JPH10260139A (ja) | 基板自動検査装置 | |
| JP2001209798A (ja) | 外観検査方法及び検査装置 | |
| US8358406B2 (en) | Defect inspection method and defect inspection system | |
| JP5200353B2 (ja) | 周期性パターンのムラ検査装置 | |
| JP2009139209A (ja) | 欠陥検査方法 | |
| JP2004117290A (ja) | 周期性パターンの検査方法及び装置 | |
| JP4009595B2 (ja) | パターン欠陥検査装置およびパターン欠陥検査方法 | |
| JP2009063298A (ja) | カラーフィルタの外観検査方法 | |
| JP2004108902A (ja) | カラー表示画面の欠陥分類方法およびその装置 | |
| JP4857917B2 (ja) | カラーフィルタの外観検査方法及び外観検査装置 | |
| JPH09281051A (ja) | 検査装置 | |
| JP2004117150A (ja) | パターン欠陥検査装置およびパターン欠陥検査方法 | |
| JPS6221046A (ja) | シヤドウマスクの欠陥検査方法 | |
| JPH08159984A (ja) | パタンムラ検査装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20040312 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20040312 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20050616 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20050621 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050822 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20060620 |