JPH10197854A5 - - Google Patents

Info

Publication number
JPH10197854A5
JPH10197854A5 JP1996358958A JP35895896A JPH10197854A5 JP H10197854 A5 JPH10197854 A5 JP H10197854A5 JP 1996358958 A JP1996358958 A JP 1996358958A JP 35895896 A JP35895896 A JP 35895896A JP H10197854 A5 JPH10197854 A5 JP H10197854A5
Authority
JP
Japan
Prior art keywords
aluminum nitride
nitride film
display device
substrate
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996358958A
Other languages
English (en)
Japanese (ja)
Other versions
JP4112036B2 (ja
JPH10197854A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP35895896A priority Critical patent/JP4112036B2/ja
Priority claimed from JP35895896A external-priority patent/JP4112036B2/ja
Publication of JPH10197854A publication Critical patent/JPH10197854A/ja
Publication of JPH10197854A5 publication Critical patent/JPH10197854A5/ja
Application granted granted Critical
Publication of JP4112036B2 publication Critical patent/JP4112036B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP35895896A 1996-12-30 1996-12-30 表示装置 Expired - Fee Related JP4112036B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP35895896A JP4112036B2 (ja) 1996-12-30 1996-12-30 表示装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP35895896A JP4112036B2 (ja) 1996-12-30 1996-12-30 表示装置

Publications (3)

Publication Number Publication Date
JPH10197854A JPH10197854A (ja) 1998-07-31
JPH10197854A5 true JPH10197854A5 (https=) 2004-12-09
JP4112036B2 JP4112036B2 (ja) 2008-07-02

Family

ID=18461998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP35895896A Expired - Fee Related JP4112036B2 (ja) 1996-12-30 1996-12-30 表示装置

Country Status (1)

Country Link
JP (1) JP4112036B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000172191A (ja) 1998-12-04 2000-06-23 Fujitsu Ltd 平面表示装置
JP4978138B2 (ja) * 2006-09-29 2012-07-18 セイコーエプソン株式会社 電気光学装置及び電子機器

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