JPH10168027A5 - - Google Patents

Info

Publication number
JPH10168027A5
JPH10168027A5 JP1997321795A JP32179597A JPH10168027A5 JP H10168027 A5 JPH10168027 A5 JP H10168027A5 JP 1997321795 A JP1997321795 A JP 1997321795A JP 32179597 A JP32179597 A JP 32179597A JP H10168027 A5 JPH10168027 A5 JP H10168027A5
Authority
JP
Japan
Prior art keywords
ruthenium
reducing agent
iii
hydrazine
carboxylic acid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997321795A
Other languages
English (en)
Japanese (ja)
Other versions
JP3999320B2 (ja
JPH10168027A (ja
Filing date
Publication date
Application filed filed Critical
Publication of JPH10168027A publication Critical patent/JPH10168027A/ja
Publication of JPH10168027A5 publication Critical patent/JPH10168027A5/ja
Application granted granted Critical
Publication of JP3999320B2 publication Critical patent/JP3999320B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP32179597A 1996-11-26 1997-11-21 酢酸ルテニウム（ｉｉｉ）溶液の製造方法 Expired - Lifetime JP3999320B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US3182396P 1996-11-26 1996-11-26
US60/031823 1996-11-26

Publications (3)

Publication Number Publication Date
JPH10168027A JPH10168027A (ja) 1998-06-23
JPH10168027A5 true JPH10168027A5 (enExample) 2005-06-23
JP3999320B2 JP3999320B2 (ja) 2007-10-31

Family

ID=21861602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32179597A Expired - Lifetime JP3999320B2 (ja) 1996-11-26 1997-11-21 酢酸ルテニウム（ｉｉｉ）溶液の製造方法

Country Status (18)

Country Link
US (1) US5886204A (enExample)
EP (1) EP0844251B1 (enExample)
JP (1) JP3999320B2 (enExample)
KR (1) KR100536791B1 (enExample)
CN (1) CN1279012C (enExample)
AR (1) AR010654A1 (enExample)
BR (1) BR9705903A (enExample)
CA (1) CA2222119C (enExample)
DE (1) DE69714384T2 (enExample)
ID (1) ID18998A (enExample)
MY (1) MY117386A (enExample)
NO (1) NO975429L (enExample)
NZ (1) NZ329244A (enExample)
RU (1) RU2184119C2 (enExample)
SA (1) SA98190044B1 (enExample)
TW (1) TW521075B (enExample)
UA (1) UA56134C2 (enExample)
ZA (1) ZA9710220B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100406534B1 (ko) * 2001-05-03 2003-11-20 주식회사 하이닉스반도체 루테늄 박막의 제조 방법
JP5293930B2 (ja) * 2007-03-22 2013-09-18 Ｊｓｒ株式会社 化学気相成長材料及び化学気相成長方法
DE102007014914B4 (de) 2007-03-26 2013-09-12 Heraeus Precious Metals Gmbh & Co. Kg Katalytisch hochwirksame Edelmetall-Carboxylat-Verbindungen von Ir, Ru, Rh, Pd, Pt und Au
KR101526633B1 (ko) * 2008-03-17 2015-06-05 제이에스알 가부시끼가이샤 디루테늄 착체 및 화학 기상 성장의 재료 및 방법
CN115141093A (zh) * 2022-06-28 2022-10-04 浙江微通催化新材料有限公司 一种醋酸钌的制备方法
CN115536520A (zh) * 2022-11-02 2022-12-30 金川集团股份有限公司 一种醋酸钌的制备方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1405592A (en) * 1971-08-11 1975-09-10 Johnson Matthey Co Ltd Compounds of ruthenium
JPS63315509A (ja) * 1987-06-17 1988-12-23 Hitachi Ltd 蒸発缶の硝酸液処理システム
RU2033442C1 (ru) * 1991-07-08 1995-04-20 Институт неорганической химии СО РАН Способ разделения металлов платиновой группы

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