JPH09505943A - コンデンサを製造するための方法 - Google Patents
コンデンサを製造するための方法Info
- Publication number
- JPH09505943A JPH09505943A JP7515450A JP51545095A JPH09505943A JP H09505943 A JPH09505943 A JP H09505943A JP 7515450 A JP7515450 A JP 7515450A JP 51545095 A JP51545095 A JP 51545095A JP H09505943 A JPH09505943 A JP H09505943A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- filaments
- deposition
- filament
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims abstract description 72
- 239000003990 capacitor Substances 0.000 title claims abstract description 38
- 238000004519 manufacturing process Methods 0.000 title abstract description 15
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 58
- 239000007789 gas Substances 0.000 claims abstract description 34
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 29
- 239000002243 precursor Substances 0.000 claims abstract description 21
- 238000010494 dissociation reaction Methods 0.000 claims abstract description 10
- 230000005593 dissociations Effects 0.000 claims abstract description 10
- 238000006116 polymerization reaction Methods 0.000 claims abstract description 7
- 125000000082 organogermanium group Chemical group 0.000 claims abstract description 5
- 238000000151 deposition Methods 0.000 claims description 52
- 230000008021 deposition Effects 0.000 claims description 45
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 17
- 239000001301 oxygen Substances 0.000 claims description 17
- 229910052760 oxygen Inorganic materials 0.000 claims description 17
- 150000002500 ions Chemical class 0.000 claims description 13
- 150000003961 organosilicon compounds Chemical class 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 239000000956 alloy Substances 0.000 claims description 8
- 229910045601 alloy Inorganic materials 0.000 claims description 8
- 150000004696 coordination complex Chemical group 0.000 claims description 8
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 claims description 5
- 238000005476 soldering Methods 0.000 claims description 4
- UHUUYVZLXJHWDV-UHFFFAOYSA-N trimethyl(methylsilyloxy)silane Chemical compound C[SiH2]O[Si](C)(C)C UHUUYVZLXJHWDV-UHFFFAOYSA-N 0.000 claims description 4
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical group S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 claims description 3
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 claims description 3
- FWMUJAIKEJWSSY-UHFFFAOYSA-N sulfur dichloride Chemical group ClSCl FWMUJAIKEJWSSY-UHFFFAOYSA-N 0.000 claims description 3
- 125000005595 acetylacetonate group Chemical group 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 11
- 239000002019 doping agent Substances 0.000 description 11
- 239000004020 conductor Substances 0.000 description 10
- 229920002457 flexible plastic Polymers 0.000 description 9
- 239000002985 plastic film Substances 0.000 description 8
- 238000002347 injection Methods 0.000 description 6
- 239000007924 injection Substances 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- -1 polypropylene Polymers 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 4
- 239000003989 dielectric material Substances 0.000 description 4
- 229910002808 Si–O–Si Inorganic materials 0.000 description 3
- LCKIEQZJEYYRIY-UHFFFAOYSA-N Titanium ion Chemical group [Ti+4] LCKIEQZJEYYRIY-UHFFFAOYSA-N 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 229910052732 germanium Inorganic materials 0.000 description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 3
- 230000002459 sustained effect Effects 0.000 description 3
- 241000047703 Nonion Species 0.000 description 2
- 229910008051 Si-OH Inorganic materials 0.000 description 2
- 229910006358 Si—OH Inorganic materials 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 230000008033 biological extinction Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229920006255 plastic film Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- POILWHVDKZOXJZ-ARJAWSKDSA-M (z)-4-oxopent-2-en-2-olate Chemical compound C\C([O-])=C\C(C)=O POILWHVDKZOXJZ-ARJAWSKDSA-M 0.000 description 1
- 241001529936 Murinae Species 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000006071 cream Substances 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910000037 hydrogen sulfide Inorganic materials 0.000 description 1
- 229940087654 iron carbonyl Drugs 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
- SOQBVABWOPYFQZ-UHFFFAOYSA-N oxygen(2-);titanium(4+) Chemical group [O-2].[O-2].[Ti+4] SOQBVABWOPYFQZ-UHFFFAOYSA-N 0.000 description 1
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001021 polysulfide Polymers 0.000 description 1
- 239000005077 polysulfide Substances 0.000 description 1
- 150000008117 polysulfides Polymers 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- LMHHRCOWPQNFTF-UHFFFAOYSA-N s-propan-2-yl azepane-1-carbothioate Chemical compound CC(C)SC(=O)N1CCCCCC1 LMHHRCOWPQNFTF-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F38/00—Adaptations of transformers or inductances for specific applications or functions
- H01F38/20—Instruments transformers
- H01F38/22—Instruments transformers for single phase ac
- H01F38/28—Current transformers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
- H01G4/008—Selection of materials
- H01G4/0085—Fried electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
- H01G4/012—Form of non-self-supporting electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/30—Stacked capacitors
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR93/14519 | 1993-12-03 | ||
| FR9314519A FR2713388B1 (fr) | 1993-12-03 | 1993-12-03 | Procédé de fabrication de condensateur et condensateur issu d'un tel procédé. |
| PCT/FR1994/001404 WO1995015570A1 (fr) | 1993-12-03 | 1994-12-01 | Procede de fabrication de condensateur et condensateur issu d'un tel procede |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH09505943A true JPH09505943A (ja) | 1997-06-10 |
Family
ID=9453535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7515450A Pending JPH09505943A (ja) | 1993-12-03 | 1994-12-01 | コンデンサを製造するための方法 |
Country Status (7)
| Country | Link |
|---|---|
| EP (1) | EP0731974A1 (sv) |
| JP (1) | JPH09505943A (sv) |
| KR (1) | KR960706683A (sv) |
| CA (1) | CA2177987A1 (sv) |
| FI (1) | FI962293A (sv) |
| FR (1) | FR2713388B1 (sv) |
| WO (1) | WO1995015570A1 (sv) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5701686A (en) * | 1991-07-08 | 1997-12-30 | Herr; Hugh M. | Shoe and foot prosthesis with bending beam spring structures |
| AUPN363595A0 (en) * | 1995-06-19 | 1995-07-13 | Intag International Limited | Fabrication of capacitors |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59200753A (ja) * | 1983-04-30 | 1984-11-14 | Mitsubishi Electric Corp | 薄膜形成装置 |
| US4599678A (en) * | 1985-03-19 | 1986-07-08 | Wertheimer Michael R | Plasma-deposited capacitor dielectrics |
-
1993
- 1993-12-03 FR FR9314519A patent/FR2713388B1/fr not_active Expired - Fee Related
-
1994
- 1994-12-01 EP EP95902822A patent/EP0731974A1/fr not_active Withdrawn
- 1994-12-01 KR KR1019960702896A patent/KR960706683A/ko not_active Application Discontinuation
- 1994-12-01 JP JP7515450A patent/JPH09505943A/ja active Pending
- 1994-12-01 CA CA002177987A patent/CA2177987A1/en not_active Abandoned
- 1994-12-01 WO PCT/FR1994/001404 patent/WO1995015570A1/fr not_active Application Discontinuation
-
1996
- 1996-05-31 FI FI962293A patent/FI962293A/sv not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| EP0731974A1 (fr) | 1996-09-18 |
| FR2713388B1 (fr) | 1996-01-26 |
| KR960706683A (ko) | 1996-12-09 |
| CA2177987A1 (en) | 1995-06-08 |
| FR2713388A1 (fr) | 1995-06-09 |
| FI962293A0 (sv) | 1996-05-31 |
| WO1995015570A1 (fr) | 1995-06-08 |
| FI962293A (sv) | 1996-07-22 |
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