KR960706683A - 커패시터의 제조방법(Method for the manufacture of a capacitor and capacitor obtained) - Google Patents
커패시터의 제조방법(Method for the manufacture of a capacitor and capacitor obtained)Info
- Publication number
- KR960706683A KR960706683A KR1019960702896A KR19960702896A KR960706683A KR 960706683 A KR960706683 A KR 960706683A KR 1019960702896 A KR1019960702896 A KR 1019960702896A KR 19960702896 A KR19960702896 A KR 19960702896A KR 960706683 A KR960706683 A KR 960706683A
- Authority
- KR
- South Korea
- Prior art keywords
- mask
- manufacturing
- stack type
- type capacitor
- conductive
- Prior art date
Links
- 239000003990 capacitor Substances 0.000 title claims abstract 25
- 238000004519 manufacturing process Methods 0.000 title claims abstract 15
- 238000000034 method Methods 0.000 title claims 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract 12
- 239000007789 gas Substances 0.000 claims abstract 7
- 230000008021 deposition Effects 0.000 claims abstract 6
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract 6
- 239000002243 precursor Substances 0.000 claims abstract 5
- 238000010494 dissociation reaction Methods 0.000 claims abstract 4
- 230000005593 dissociations Effects 0.000 claims abstract 4
- 229910052732 germanium Inorganic materials 0.000 claims abstract 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims abstract 2
- 229910052710 silicon Inorganic materials 0.000 claims abstract 2
- 239000010703 silicon Substances 0.000 claims abstract 2
- 238000000151 deposition Methods 0.000 claims 9
- 238000005520 cutting process Methods 0.000 claims 4
- 150000004696 coordination complex Chemical group 0.000 claims 3
- 239000000956 alloy Substances 0.000 claims 2
- 229910045601 alloy Inorganic materials 0.000 claims 2
- 239000004020 conductor Substances 0.000 claims 2
- 150000003961 organosilicon compounds Chemical class 0.000 claims 2
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical group S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 claims 1
- 125000005595 acetylacetonate group Chemical group 0.000 claims 1
- -1 alkoxy silane Chemical compound 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 claims 1
- 230000005495 cold plasma Effects 0.000 claims 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 claims 1
- 229910000037 hydrogen sulfide Inorganic materials 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 238000006116 polymerization reaction Methods 0.000 claims 1
- 238000002360 preparation method Methods 0.000 claims 1
- 229910000077 silane Inorganic materials 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- FWMUJAIKEJWSSY-UHFFFAOYSA-N sulfur dichloride Chemical group ClSCl FWMUJAIKEJWSSY-UHFFFAOYSA-N 0.000 claims 1
- UHUUYVZLXJHWDV-UHFFFAOYSA-N trimethyl(methylsilyloxy)silane Chemical compound C[SiH2]O[Si](C)(C)C UHUUYVZLXJHWDV-UHFFFAOYSA-N 0.000 claims 1
- 229920000642 polymer Polymers 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
- H01G4/008—Selection of materials
- H01G4/0085—Fried electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F38/00—Adaptations of transformers or inductances for specific applications or functions
- H01F38/20—Instruments transformers
- H01F38/22—Instruments transformers for single phase ac
- H01F38/28—Current transformers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
- H01G4/012—Form of non-self-supporting electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/30—Stacked capacitors
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR9314519A FR2713388B1 (fr) | 1993-12-03 | 1993-12-03 | Procédé de fabrication de condensateur et condensateur issu d'un tel procédé. |
| FR14519 | 1993-12-03 | ||
| PCT/FR1994/001404 WO1995015570A1 (fr) | 1993-12-03 | 1994-12-01 | Procede de fabrication de condensateur et condensateur issu d'un tel procede |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR960706683A true KR960706683A (ko) | 1996-12-09 |
Family
ID=9453535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019960702896A KR960706683A (ko) | 1993-12-03 | 1994-12-01 | 커패시터의 제조방법(Method for the manufacture of a capacitor and capacitor obtained) |
Country Status (7)
| Country | Link |
|---|---|
| EP (1) | EP0731974A1 (sv) |
| JP (1) | JPH09505943A (sv) |
| KR (1) | KR960706683A (sv) |
| CA (1) | CA2177987A1 (sv) |
| FI (1) | FI962293A (sv) |
| FR (1) | FR2713388B1 (sv) |
| WO (1) | WO1995015570A1 (sv) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5701686A (en) * | 1991-07-08 | 1997-12-30 | Herr; Hugh M. | Shoe and foot prosthesis with bending beam spring structures |
| AUPN363595A0 (en) * | 1995-06-19 | 1995-07-13 | Intag International Limited | Fabrication of capacitors |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59200753A (ja) * | 1983-04-30 | 1984-11-14 | Mitsubishi Electric Corp | 薄膜形成装置 |
| US4599678A (en) * | 1985-03-19 | 1986-07-08 | Wertheimer Michael R | Plasma-deposited capacitor dielectrics |
-
1993
- 1993-12-03 FR FR9314519A patent/FR2713388B1/fr not_active Expired - Fee Related
-
1994
- 1994-12-01 WO PCT/FR1994/001404 patent/WO1995015570A1/fr not_active Application Discontinuation
- 1994-12-01 CA CA002177987A patent/CA2177987A1/en not_active Abandoned
- 1994-12-01 JP JP7515450A patent/JPH09505943A/ja active Pending
- 1994-12-01 KR KR1019960702896A patent/KR960706683A/ko not_active Application Discontinuation
- 1994-12-01 EP EP95902822A patent/EP0731974A1/fr not_active Withdrawn
-
1996
- 1996-05-31 FI FI962293A patent/FI962293A/sv not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| CA2177987A1 (en) | 1995-06-08 |
| FI962293A (sv) | 1996-07-22 |
| JPH09505943A (ja) | 1997-06-10 |
| WO1995015570A1 (fr) | 1995-06-08 |
| EP0731974A1 (fr) | 1996-09-18 |
| FR2713388B1 (fr) | 1996-01-26 |
| FI962293A0 (sv) | 1996-05-31 |
| FR2713388A1 (fr) | 1995-06-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |