JPH09504261A - 被覆体とこの被覆体を製造する方法およびその使用 - Google Patents
被覆体とこの被覆体を製造する方法およびその使用Info
- Publication number
- JPH09504261A JPH09504261A JP51242395A JP51242395A JPH09504261A JP H09504261 A JPH09504261 A JP H09504261A JP 51242395 A JP51242395 A JP 51242395A JP 51242395 A JP51242395 A JP 51242395A JP H09504261 A JPH09504261 A JP H09504261A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- diamond
- enrichment
- coating
- concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T407/00—Cutters, for shaping
- Y10T407/27—Cutters, for shaping comprising tool of specific chemical composition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31678—Of metal
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Glass Compositions (AREA)
- Laminated Bodies (AREA)
- Electronic Switches (AREA)
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1.多相材料からなる基体と1つ以上のダイヤモンド皮膜とを含んでなる、少 なくとも一部被覆された基体において、元素富化なしで同様にダイヤモンド被覆 した同じ基体における同一の元素の濃度よりも高い濃度で、元素富化を基体とダ イヤモンド皮膜との相間区域に組み入れたことを特徴とする被覆体。 2.ダイヤモンド皮膜の厚さが、50μm以下、好ましくは2ないし30μm (いずれの限界値も含む)であることを特徴とする請求項1に記載の被覆体。 3.ダイヤモンド皮膜の密度が、元素富化なしで同様にダイヤモンド被覆した 前記基体におけるダイヤモンド皮膜の密度とほぼ等しいことを特徴とする請求項 1または2に記載の被覆体。 4.相間区域の厚さが、数μm、好ましくは15μm以下であり、特に好まし くは10μm以下であることを特徴とする請求項1から3のいずれか1項に記載 の被覆体。 5.元素富化の濃度推移が、相間区域の大部分で少なくとも概ね一定であり、 または相間区域で少なくとも1つの最大箇所を有することを特徴とする請求項1 から4のいずれか1項に記載の被覆体。 6.元素富化が、富化を行わない基体の同じダイヤモンド被覆における同一の 元素の濃度よりも0.01原子%、好ましくは0.05原子%、特に好ましくは 0.5原子%、特に1原子%高い濃度を少なくとも1つ有することを特徴とする 請求項1から5のいずれか1項に記載の被覆体。 7.相間区域における元素濃度が、元素富化なしで同様にダイヤモンド被覆し た基体の相間区域における元素濃度よりも、せいぜい 50原子%、好ましくは2ないし20原子%(いずれの限界値も含む)高いこと を特徴とする請求項1から6のいずれか1項に記載の被覆体。 8.富化元素が、金属Mg、Al、Cuの少なくとも1つ、特にAlを含み、 もしくはそのような金属によって構成されており、あるいはメタロイドB、Si 、Ge、S、Pの少なくとも1つを包含し、もしくはそのような金属によって構 成されていることを特徴とする請求項1から7のいずれか1項に記載の被覆体。 9.基体が、本質的な成分として1つ以上の炭化物とコバルトを均一に分布し た混合物として包含しており、好ましくは基体の表面近傍区域でコバルト貧化さ れており、さらに好ましくはこの貧化区域の基体側に続く区域でコバルト富化さ れていることを特徴とする請求項1から8のいずれか1項に記載の被覆体。 10.相間区域にAlCoxCy化合物が存在し、好ましくは優勢な割合で存在 していることを特徴とする請求項1から9のいずれか1項に記載の被覆体。 11.元素富化を、少なくとも一部はダイヤモンド析出と同時に行うことを特徴 とする請求項1から10のいずれか1項に記載の被覆体を製造する方法。 12.元素富化をダイヤモンド析出の直前と開始時のみか、またはダイヤモンド 析出の開始時のみ行うことを特徴とする請求項11に記載の方法。 13.元素富化を気相から行って、好ましくは有機金属気体または有機メタロイ ド気体を用いることを特徴とする請求項11または12に記載の方法。 14.元素富化をPVD法により、好ましくは蒸着、たとえば電子線蒸着を用い て実現するか、または固体とのプラズマ化学反応によ って実現し、この場合に好ましくは固体としてセラミックを用い、このセラミッ クから少なくとも1つの元素がプラズマ化学反応によってプロセス雰囲気中に気 相で遊離することを特徴とする請求項11から13のいずれか1項に記載の方法 。 15.基体材料として1つ以上の炭化物とコバルトを使用し、ダイヤモンド被覆 の前に基体表面区域を好ましくは焼結または化学的腐食プロセスでコバルト貧化 して、好ましくはこのコバルト貧化区域の基体側に続くコバルト富化区域を実現 することを特徴とする請求項11から14のいずれか1項に記載の方法。 16.少なくとも一部はダイヤモンド被覆の間に富化元素を蒸着させて、プロセ ス雰囲気におけるその濃度を、この元素に対する蒸着源の蒸着出力の調節によっ て制御または調整することを特徴とする請求項11から15のいずれか1項に記 載の方法。 17.少なくとも一部はダイヤモンド被覆の間に、固体とのプラズマ化学反応に よって富化元素をプロセス雰囲気に組み入れて、プロセス雰囲気におけるその濃 度をプラズマ放電の出力の調節および/または被覆雰囲気の気体組成によって制 御または調節することを特徴とする請求項11から16のいずれか1項に記載の 方法。 18.被覆雰囲気中の富化元素の濃度を発光分光器によって、プロセス雰囲気に おける元素濃度を操作する制御回路における実際値の測定として、または濃度制 御に対する比較値として測定することを特徴とする請求項16または17に記載 の方法。 19.請求項1から10のいずれか1項に記載の被覆体を、摩耗しにくい部材ま たは工具、特に切削工具として使用。 20.請求項11から18のいずれか1項に記載の方法を、摩耗しにくい物体、 特に工具体の製造に使用。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH3267/93 | 1993-10-29 | ||
CH3268/93 | 1993-10-29 | ||
CH326793 | 1993-10-29 | ||
CH326893 | 1993-10-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH09504261A true JPH09504261A (ja) | 1997-04-28 |
JP3166919B2 JP3166919B2 (ja) | 2001-05-14 |
Family
ID=25692615
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51242395A Expired - Lifetime JP3166919B2 (ja) | 1993-10-29 | 1994-10-28 | 被覆体とこの被覆体を製造する方法およびその使用 |
Country Status (11)
Country | Link |
---|---|
US (1) | US5897942A (ja) |
EP (1) | EP0730670B1 (ja) |
JP (1) | JP3166919B2 (ja) |
KR (1) | KR100374975B1 (ja) |
CN (1) | CN1152979C (ja) |
AT (1) | ATE180288T1 (ja) |
AU (1) | AU8105294A (ja) |
BR (1) | BR9407924A (ja) |
DE (1) | DE59408289D1 (ja) |
PL (1) | PL314108A1 (ja) |
WO (1) | WO1995012009A1 (ja) |
Cited By (1)
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JP2021084150A (ja) * | 2019-11-26 | 2021-06-03 | 株式会社日進エンジニアリング | ダイヤモンド被膜を備えた超硬合金製切削工具 |
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-
1994
- 1994-10-28 WO PCT/EP1994/003562 patent/WO1995012009A1/de active IP Right Grant
- 1994-10-28 BR BR9407924A patent/BR9407924A/pt not_active Application Discontinuation
- 1994-10-28 EP EP95900095A patent/EP0730670B1/de not_active Expired - Lifetime
- 1994-10-28 US US08/424,325 patent/US5897942A/en not_active Expired - Lifetime
- 1994-10-28 JP JP51242395A patent/JP3166919B2/ja not_active Expired - Lifetime
- 1994-10-28 CN CNB941947394A patent/CN1152979C/zh not_active Expired - Lifetime
- 1994-10-28 PL PL31410894A patent/PL314108A1/xx unknown
- 1994-10-28 AU AU81052/94A patent/AU8105294A/en not_active Abandoned
- 1994-10-28 DE DE59408289T patent/DE59408289D1/de not_active Expired - Lifetime
- 1994-10-28 AT AT95900095T patent/ATE180288T1/de not_active IP Right Cessation
- 1994-10-28 KR KR1019960702160A patent/KR100374975B1/ko not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021084150A (ja) * | 2019-11-26 | 2021-06-03 | 株式会社日進エンジニアリング | ダイヤモンド被膜を備えた超硬合金製切削工具 |
Also Published As
Publication number | Publication date |
---|---|
EP0730670A1 (de) | 1996-09-11 |
DE59408289D1 (de) | 1999-06-24 |
BR9407924A (pt) | 1996-11-26 |
US5897942A (en) | 1999-04-27 |
JP3166919B2 (ja) | 2001-05-14 |
WO1995012009A1 (de) | 1995-05-04 |
AU8105294A (en) | 1995-05-22 |
KR100374975B1 (ko) | 2003-07-22 |
CN1152979C (zh) | 2004-06-09 |
CN1139958A (zh) | 1997-01-08 |
ATE180288T1 (de) | 1999-06-15 |
PL314108A1 (en) | 1996-08-19 |
EP0730670B1 (de) | 1999-05-19 |
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