JPH09266148A5 - - Google Patents

Info

Publication number
JPH09266148A5
JPH09266148A5 JP1996072894A JP7289496A JPH09266148A5 JP H09266148 A5 JPH09266148 A5 JP H09266148A5 JP 1996072894 A JP1996072894 A JP 1996072894A JP 7289496 A JP7289496 A JP 7289496A JP H09266148 A5 JPH09266148 A5 JP H09266148A5
Authority
JP
Japan
Prior art keywords
chamber
outside air
exposure apparatus
airtightness
air inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996072894A
Other languages
English (en)
Japanese (ja)
Other versions
JPH09266148A (ja
JP3601171B2 (ja
Filing date
Publication date
Priority claimed from JP07289496A external-priority patent/JP3601171B2/ja
Priority to JP07289496A priority Critical patent/JP3601171B2/ja
Application filed filed Critical
Priority to KR1019970012127A priority patent/KR100542414B1/ko
Publication of JPH09266148A publication Critical patent/JPH09266148A/ja
Priority to US09/266,873 priority patent/US6535270B1/en
Priority to US10/237,133 priority patent/US20030035087A1/en
Publication of JPH09266148A5 publication Critical patent/JPH09266148A5/ja
Publication of JP3601171B2 publication Critical patent/JP3601171B2/ja
Application granted granted Critical
Priority to US11/071,106 priority patent/US20050185156A1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP07289496A 1996-03-27 1996-03-27 露光装置 Expired - Fee Related JP3601171B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP07289496A JP3601171B2 (ja) 1996-03-27 1996-03-27 露光装置
KR1019970012127A KR100542414B1 (ko) 1996-03-27 1997-03-27 노광장치및공조장치
US09/266,873 US6535270B1 (en) 1996-03-27 1999-03-12 Exposure apparatus and air-conditioning apparatus for use with exposure apparatus
US10/237,133 US20030035087A1 (en) 1996-03-27 2002-09-09 Exposure apparatus and air-conditioning apparatus for use with exposure apparatus
US11/071,106 US20050185156A1 (en) 1996-03-27 2005-03-04 Exposure apparatus and air-conditioning apparatus for use with exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07289496A JP3601171B2 (ja) 1996-03-27 1996-03-27 露光装置

Publications (3)

Publication Number Publication Date
JPH09266148A JPH09266148A (ja) 1997-10-07
JPH09266148A5 true JPH09266148A5 (enExample) 2004-07-29
JP3601171B2 JP3601171B2 (ja) 2004-12-15

Family

ID=13502525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP07289496A Expired - Fee Related JP3601171B2 (ja) 1996-03-27 1996-03-27 露光装置

Country Status (1)

Country Link
JP (1) JP3601171B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105988296B (zh) * 2015-01-28 2017-12-29 南通大学 一种净化曝光装置
CN116300338A (zh) * 2023-03-30 2023-06-23 苏州清越光电科技股份有限公司 曝光灯箱、曝光机

Similar Documents

Publication Publication Date Title
KR970067589A (ko) 노광장치 및 이에 사용되는 공조장치
US5430303A (en) Exposure apparatus
US6559922B2 (en) Method and apparatus for a non-contact scavenging seal
JPH10270333A5 (enExample)
TW490731B (en) Optical device, exposure system, and laser beam source, and gas feed method, exposure method, and device manufacturing method
US6961114B2 (en) Optical apparatus and exposure apparatus incorporating the apparatus
EP1020897A4 (en) ALIGNMENT DEVICE, LIGHTING METHOD, METHOD FOR PRINTING AN OPTICAL PROJECTION SYSTEM, AND METHOD FOR COMPOSING THIS ALIGNMENT DEVICE
TW452851B (en) Exposure method and apparatus
US6208406B1 (en) Environmental control apparatus for exposure apparatus
US5166530A (en) Illuminator for microlithographic integrated circuit manufacture
JP3629790B2 (ja) 露光装置
JPH09270385A5 (enExample)
KR20010034055A (ko) 노광시스템, 노광장치 및 도포현상 노광장치
JP2004228497A (ja) 露光装置及び電子デバイスの製造方法
JPH09266148A5 (enExample)
JPH07219212A (ja) フォトマスクの撓み矯正装置およびその方法
JPH09283401A5 (enExample)
KR20000034896A (ko) 노광 장치용 광학계와 노광 장치 및 그 조립 방법
JP3552363B2 (ja) 走査型露光装置
JPH09275055A5 (enExample)
JP3097429B2 (ja) レ−ザ加工装置
TW440918B (en) Exposure apparatus and optical system therefor
JPH09266147A5 (enExample)
JP3601171B2 (ja) 露光装置
JPH11195585A (ja) 露光装置および露光方法