JP3601171B2 - 露光装置 - Google Patents

露光装置 Download PDF

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Publication number
JP3601171B2
JP3601171B2 JP07289496A JP7289496A JP3601171B2 JP 3601171 B2 JP3601171 B2 JP 3601171B2 JP 07289496 A JP07289496 A JP 07289496A JP 7289496 A JP7289496 A JP 7289496A JP 3601171 B2 JP3601171 B2 JP 3601171B2
Authority
JP
Japan
Prior art keywords
chamber
outside air
unit
exposure apparatus
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP07289496A
Other languages
English (en)
Japanese (ja)
Other versions
JPH09266148A (ja
JPH09266148A5 (enExample
Inventor
正幸 村山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP07289496A priority Critical patent/JP3601171B2/ja
Priority to KR1019970012127A priority patent/KR100542414B1/ko
Publication of JPH09266148A publication Critical patent/JPH09266148A/ja
Priority to US09/266,873 priority patent/US6535270B1/en
Priority to US10/237,133 priority patent/US20030035087A1/en
Publication of JPH09266148A5 publication Critical patent/JPH09266148A5/ja
Application granted granted Critical
Publication of JP3601171B2 publication Critical patent/JP3601171B2/ja
Priority to US11/071,106 priority patent/US20050185156A1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature

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  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP07289496A 1996-03-27 1996-03-27 露光装置 Expired - Fee Related JP3601171B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP07289496A JP3601171B2 (ja) 1996-03-27 1996-03-27 露光装置
KR1019970012127A KR100542414B1 (ko) 1996-03-27 1997-03-27 노광장치및공조장치
US09/266,873 US6535270B1 (en) 1996-03-27 1999-03-12 Exposure apparatus and air-conditioning apparatus for use with exposure apparatus
US10/237,133 US20030035087A1 (en) 1996-03-27 2002-09-09 Exposure apparatus and air-conditioning apparatus for use with exposure apparatus
US11/071,106 US20050185156A1 (en) 1996-03-27 2005-03-04 Exposure apparatus and air-conditioning apparatus for use with exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07289496A JP3601171B2 (ja) 1996-03-27 1996-03-27 露光装置

Publications (3)

Publication Number Publication Date
JPH09266148A JPH09266148A (ja) 1997-10-07
JPH09266148A5 JPH09266148A5 (enExample) 2004-07-29
JP3601171B2 true JP3601171B2 (ja) 2004-12-15

Family

ID=13502525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP07289496A Expired - Fee Related JP3601171B2 (ja) 1996-03-27 1996-03-27 露光装置

Country Status (1)

Country Link
JP (1) JP3601171B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105988296B (zh) * 2015-01-28 2017-12-29 南通大学 一种净化曝光装置
CN116300338A (zh) * 2023-03-30 2023-06-23 苏州清越光电科技股份有限公司 曝光灯箱、曝光机

Also Published As

Publication number Publication date
JPH09266148A (ja) 1997-10-07

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