CN105988296B - 一种净化曝光装置 - Google Patents
一种净化曝光装置 Download PDFInfo
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- CN105988296B CN105988296B CN201510045211.1A CN201510045211A CN105988296B CN 105988296 B CN105988296 B CN 105988296B CN 201510045211 A CN201510045211 A CN 201510045211A CN 105988296 B CN105988296 B CN 105988296B
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CN201510045211.1A CN105988296B (zh) | 2015-01-28 | 2015-01-28 | 一种净化曝光装置 |
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CN201510045211.1A CN105988296B (zh) | 2015-01-28 | 2015-01-28 | 一种净化曝光装置 |
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Publication Number | Publication Date |
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CN105988296A CN105988296A (zh) | 2016-10-05 |
CN105988296B true CN105988296B (zh) | 2017-12-29 |
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CN201510045211.1A Expired - Fee Related CN105988296B (zh) | 2015-01-28 | 2015-01-28 | 一种净化曝光装置 |
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Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108906787A (zh) * | 2018-06-29 | 2018-11-30 | 上海微电子装备(集团)股份有限公司 | 一种工艺处理装置 |
CN116294548A (zh) * | 2023-03-03 | 2023-06-23 | 上海至纯洁净系统科技股份有限公司 | 一种优化摆动型马兰格尼干燥流场的干燥槽体结构 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1570761A (zh) * | 2003-03-11 | 2005-01-26 | Asml荷兰有限公司 | 光刻投影组件、装载锁闭装置和转移物体的方法 |
CN1704848A (zh) * | 2004-06-01 | 2005-12-07 | 株式会社Orc制作所 | 曝光装置 |
CN201311547Y (zh) * | 2008-11-04 | 2009-09-16 | 邱碧青 | 无尘设备结构 |
CN202122962U (zh) * | 2011-05-24 | 2012-01-25 | 青岛柏镁仪器有限公司 | 组合式生物安全操作间 |
CN102781670A (zh) * | 2010-03-31 | 2012-11-14 | 株式会社杰士汤浅国际 | 紫外线照射装置及喷墨打印装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3601171B2 (ja) * | 1996-03-27 | 2004-12-15 | 株式会社ニコン | 露光装置 |
JP3676160B2 (ja) * | 1999-12-27 | 2005-07-27 | 株式会社日立産機システム | クリーンブース |
JP2002321174A (ja) * | 2002-01-11 | 2002-11-05 | Hitachi Ltd | 清浄作業台 |
JP4096886B2 (ja) * | 2004-02-04 | 2008-06-04 | 日本エアーテック株式会社 | バイオハザード対策用キャビネット及びキャビネットフィルター交換時期検知方法 |
KR20060027648A (ko) * | 2004-09-23 | 2006-03-28 | 삼성전자주식회사 | 정전기를 이용한 파티클 제거 장치 및 이를 구비한 반도체제조용 노광 장치 |
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- 2015-01-28 CN CN201510045211.1A patent/CN105988296B/zh not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1570761A (zh) * | 2003-03-11 | 2005-01-26 | Asml荷兰有限公司 | 光刻投影组件、装载锁闭装置和转移物体的方法 |
CN1704848A (zh) * | 2004-06-01 | 2005-12-07 | 株式会社Orc制作所 | 曝光装置 |
CN201311547Y (zh) * | 2008-11-04 | 2009-09-16 | 邱碧青 | 无尘设备结构 |
CN102781670A (zh) * | 2010-03-31 | 2012-11-14 | 株式会社杰士汤浅国际 | 紫外线照射装置及喷墨打印装置 |
CN202122962U (zh) * | 2011-05-24 | 2012-01-25 | 青岛柏镁仪器有限公司 | 组合式生物安全操作间 |
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CN105988296A (zh) | 2016-10-05 |
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Inventor after: Wang Qiang Inventor after: Wu Tingxi Inventor after: Deng Jie Inventor after: Zhu Haifeng Inventor before: Wang Qiang Inventor before: Deng Jie Inventor before: Zhu Haifeng |
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