JPH085553Y2 - ウエハの受渡装置 - Google Patents

ウエハの受渡装置

Info

Publication number
JPH085553Y2
JPH085553Y2 JP1988136475U JP13647588U JPH085553Y2 JP H085553 Y2 JPH085553 Y2 JP H085553Y2 JP 1988136475 U JP1988136475 U JP 1988136475U JP 13647588 U JP13647588 U JP 13647588U JP H085553 Y2 JPH085553 Y2 JP H085553Y2
Authority
JP
Japan
Prior art keywords
wafer
pins
ring
delivery device
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988136475U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0258336U (OSRAM
Inventor
勉 水村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Priority to JP1988136475U priority Critical patent/JPH085553Y2/ja
Publication of JPH0258336U publication Critical patent/JPH0258336U/ja
Application granted granted Critical
Publication of JPH085553Y2 publication Critical patent/JPH085553Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Intermediate Stations On Conveyors (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1988136475U 1988-10-19 1988-10-19 ウエハの受渡装置 Expired - Lifetime JPH085553Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988136475U JPH085553Y2 (ja) 1988-10-19 1988-10-19 ウエハの受渡装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988136475U JPH085553Y2 (ja) 1988-10-19 1988-10-19 ウエハの受渡装置

Publications (2)

Publication Number Publication Date
JPH0258336U JPH0258336U (OSRAM) 1990-04-26
JPH085553Y2 true JPH085553Y2 (ja) 1996-02-14

Family

ID=31397022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988136475U Expired - Lifetime JPH085553Y2 (ja) 1988-10-19 1988-10-19 ウエハの受渡装置

Country Status (1)

Country Link
JP (1) JPH085553Y2 (OSRAM)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6153930U (OSRAM) * 1984-09-14 1986-04-11
JPS6214434A (ja) * 1985-07-12 1987-01-23 Canon Inc ウエハチヤツク

Also Published As

Publication number Publication date
JPH0258336U (OSRAM) 1990-04-26

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