JPH0258335U - - Google Patents

Info

Publication number
JPH0258335U
JPH0258335U JP13647488U JP13647488U JPH0258335U JP H0258335 U JPH0258335 U JP H0258335U JP 13647488 U JP13647488 U JP 13647488U JP 13647488 U JP13647488 U JP 13647488U JP H0258335 U JPH0258335 U JP H0258335U
Authority
JP
Japan
Prior art keywords
pulley
ring
lower ends
transfer mechanism
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13647488U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0639449Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13647488U priority Critical patent/JPH0639449Y2/ja
Publication of JPH0258335U publication Critical patent/JPH0258335U/ja
Application granted granted Critical
Publication of JPH0639449Y2 publication Critical patent/JPH0639449Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Discharge Of Articles From Conveyors (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP13647488U 1988-10-19 1988-10-19 ウエハ受渡し機構 Expired - Fee Related JPH0639449Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13647488U JPH0639449Y2 (ja) 1988-10-19 1988-10-19 ウエハ受渡し機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13647488U JPH0639449Y2 (ja) 1988-10-19 1988-10-19 ウエハ受渡し機構

Publications (2)

Publication Number Publication Date
JPH0258335U true JPH0258335U (OSRAM) 1990-04-26
JPH0639449Y2 JPH0639449Y2 (ja) 1994-10-12

Family

ID=31397020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13647488U Expired - Fee Related JPH0639449Y2 (ja) 1988-10-19 1988-10-19 ウエハ受渡し機構

Country Status (1)

Country Link
JP (1) JPH0639449Y2 (OSRAM)

Also Published As

Publication number Publication date
JPH0639449Y2 (ja) 1994-10-12

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees