JPS62192Y2 - - Google Patents

Info

Publication number
JPS62192Y2
JPS62192Y2 JP1981018516U JP1851681U JPS62192Y2 JP S62192 Y2 JPS62192 Y2 JP S62192Y2 JP 1981018516 U JP1981018516 U JP 1981018516U JP 1851681 U JP1851681 U JP 1851681U JP S62192 Y2 JPS62192 Y2 JP S62192Y2
Authority
JP
Japan
Prior art keywords
wafer
centering
arm
chuck
suction chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981018516U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57132454U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981018516U priority Critical patent/JPS62192Y2/ja
Publication of JPS57132454U publication Critical patent/JPS57132454U/ja
Application granted granted Critical
Publication of JPS62192Y2 publication Critical patent/JPS62192Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP1981018516U 1981-02-12 1981-02-12 Expired JPS62192Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981018516U JPS62192Y2 (OSRAM) 1981-02-12 1981-02-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981018516U JPS62192Y2 (OSRAM) 1981-02-12 1981-02-12

Publications (2)

Publication Number Publication Date
JPS57132454U JPS57132454U (OSRAM) 1982-08-18
JPS62192Y2 true JPS62192Y2 (OSRAM) 1987-01-07

Family

ID=29816479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981018516U Expired JPS62192Y2 (OSRAM) 1981-02-12 1981-02-12

Country Status (1)

Country Link
JP (1) JPS62192Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1300357C (en) * 1986-04-04 1992-05-12 Materials Research Corporation Method and apparatus for handling and processing wafer-like materials

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS513743U (OSRAM) * 1974-06-25 1976-01-12

Also Published As

Publication number Publication date
JPS57132454U (OSRAM) 1982-08-18

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