JPH08174427A - 研磨材ボデー - Google Patents

研磨材ボデー

Info

Publication number
JPH08174427A
JPH08174427A JP7208908A JP20890895A JPH08174427A JP H08174427 A JPH08174427 A JP H08174427A JP 7208908 A JP7208908 A JP 7208908A JP 20890895 A JP20890895 A JP 20890895A JP H08174427 A JPH08174427 A JP H08174427A
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JP
Japan
Prior art keywords
mixture
abrasive particles
abrasive
group
particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7208908A
Other languages
English (en)
Other versions
JP3595036B2 (ja
Inventor
Iakovos Sigalas
シガラス イアコボス
Bronwyn Annette Roberts
アネット ロバーツ ブロンウィン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
De Beers Industrial Diamond Division Pty Ltd
Original Assignee
De Beers Industrial Diamond Division Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by De Beers Industrial Diamond Division Pty Ltd filed Critical De Beers Industrial Diamond Division Pty Ltd
Publication of JPH08174427A publication Critical patent/JPH08174427A/ja
Application granted granted Critical
Publication of JP3595036B2 publication Critical patent/JP3595036B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • C04B35/632—Organic additives
    • C04B35/6325—Organic additives based on organo-metallic compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
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    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
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    • B24D3/14—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings
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Abstract

(57)【要約】 【課題】 ダイヤモンド又は立方晶系窒化硼素（ＣＢ
Ｎ）のような超硬度研磨材粒子が、セラミックマトリッ
クス中に分散した研摩材の製造方法を提供する。 【解決手段】 （ｉ） 熱分解してセラミック粒子を生
成することができる有機金属重合体と一群の研磨材粒子
とを含む混合物を与え、（ii） 前記混合物に熱を加え
て前記重合体を熱分解し、そして（iii) 熱分解した混
合物を凝集研磨材ボデーへ焼結する、諸工程を有する研
磨材ボデーの製造方法。

Description

【発明の詳細な説明】
【０００１】
【発明の属する技術分野】本発明は、摩耗部品、切削差
込み工具等として用いるための研磨材ボデーに関する。
【０００２】
【従来の技術】研磨材成形体(compact）は、切削、ミリ
ング、研磨、削孔、及び他の研磨操作で広く用いられて
いる。それらは一般に第二相マトリックス中に分散させ
た超硬度研磨材粒子を含んでいる。マトリックスは金属
か又はセラミックである。超硬度研磨材粒子は、ダイヤ
モンド又は立方晶系窒化硼素（ＣＢＮ）でもよい。これ
らの粒子は一般に用いられている高圧高温圧搾製造工程
中、互いに結合して多結晶質物体を形成することが知ら
れている。そのようにして製造したボデーは、ＰＣＤ又
はＰＣＢＮとしても知られている。
【０００３】ダイヤモンド及び立方晶系窒化硼素研磨材
成形体の例は、米国特許第３，７４５，６２３号、第
３，７６７，３７１号、第３，７４３，４８９号、及び
第４，３３４，９２８号明細書に記載されている。
【０００４】例えば、米国特許第４，３３４，９２８号
明細書は、８０〜２０体積％の高圧型窒化硼素、及び残
余の、周期表第IVａ族又は第Ｖａ族遷移金属の炭化物、
窒化物、炭窒化物、硼化物、及び珪化物、それらの混合
物、及びそれらの固溶体化合物からなる群から選択した
少なくとも一種類の結合剤化合物材料のマトリックスか
ら本質的になる工具用焼結成形体を教示しており、その
マトリックスは焼結ボデー中の連続結合構造体を形成し
ており、高圧窒化硼素が連続マトリックス中に分散して
いる。
【０００５】耐火セラミックは、有機前駆物質を熱分解
することにより比較的低い温度で周囲圧力で合成されて
きた。種々の形の焼結セラミックボデーは、この経路を
用いることにより製造することができる。次の文献はそ
のような方法を記載している。
【０００６】１． Wright, J.K. and Evans, J.R.G.,
Br. Ceram. Trans. J., 89, 163-167, 1990. ２． Interrante L.V. et al, Mat. Res. Soc. Symp.
Proc. Vol. 249, 31,1992. ３． Paine R.T. et al, Polymer Preprints, Vol. 34
No. 1, 336, 1993. ４． Seyferth D. et al, J. Am. Ceram. Soc., 75
(5), 1300, 1992. ５． Bouillon E. et al, J. of Mat. Sci., 26 1333,
1991. ６． Soraru G.D., et al, J. of Mat. Sci., 25 388
6, 1990. ７． Gilbert M. Brown and Leon Maya T., Amer. Cer
am. Ceram. Soc. 71,78-82 (1988).
【０００７】一群のダイヤモンド粒子をセラミックマト
リックス中に分散させたものからなるダイヤモンド砥石
車も当分野で知られている。
【０００８】
【発明が解決しようとする課題】ダイヤモンド又は立方
晶系窒化硼素（ＣＢＮ）のような超硬度研磨材粒子が、
セラミックマトリックス中に分散した研摩材の製造方法
を提供する。
【０００９】
【課題を解決するための手段】本発明による研磨材ボデ
ー製造方法は、 （ｉ） 熱分解してセラミック粒子を生成することがで
きる有機金属重合体と一群の研磨材粒子とからなる混合
物を与え、（ii） 前記混合物に熱を加えて前記重合体
を熱分解し、そして（iii) 熱分解した混合物を凝集研
磨材ボデーへ焼結する、諸工程を含む。
【００１０】本発明の方法により製造される焼結研磨材
ボデーは、第二相材料中に研磨材粒子が分散したものか
らなる。第二相材料は、セラミックであり、好ましくは
耐火セラミックである。適当なセラミックの例は、炭化
珪素、窒化珪素、炭窒化珪素、二酸化珪素、窒化硼素、
炭化硼素、窒化アルミニウム、炭化タングステン、炭化
チタン、窒化チタン、及び一般に遷移金属の種々の炭化
物、窒化物、硼化物である。
【００１１】隣合った研磨材粒子は一般に互いに結合し
ていないが、取り巻く第二相材料には強く結合してお
り、その第二相は連続相を形成している。研磨材粒子
は、ダイヤモンド及び立方晶系窒化硼素又はその混合物
を含む群から選択するのが好ましい。
【００１２】生成した焼結研磨材ボデーは強靭で耐摩耗
性をもち、例えば、ベアリング表面又は差込み工具のよ
うな耐摩耗性表面として用いるのに適している。研磨材
粒子が立方晶系窒化硼素（ＣＢＮ）である場合、ボデー
は、鉄合金又は鉄ニッケル基合金又はニッケル基超合金
を切削又は機械加工するのに用いることができる。研磨
材粒子がダイヤモンドの場合、ボデーは工学及び鉱業で
の種々の切削、機械加工及び削孔の用途で用いることが
できる。例えば、木工業用、或はアルミニウム珪素合金
の機械加工に、或は繊維補強重合体又は金属マトリック
ス複合体の機械加工での耐摩耗性作動切削工具として用
いることができる。また、コーリング(coring)又は油削
孔バイトで切削又は計器保持具(gauge keeping elemen
t）として用いることができる。
【００１３】
【発明の実施の形態】本発明の方法の工程（ｉ）で、熱
分解してセラミック粒子を生成することができる有機金
属重合体と一群の研磨材粒子とからなる混合物を与え
る。これは、種々の方法で達成することができ、その例
を下に記載する。
【００１４】１ 混合物は次のようにして調製すること
ができる。容器中で適当な溶媒中に重合体の有機金属前
駆物質を溶解する。次に研磨材粒子をその溶液に添加す
る。次にその混合物を加熱し、溶媒を蒸発し、続いて有
機金属前駆物質を重合する。重合は、含まれる前駆物質
により、一般に１００℃〜５００℃（両端の数字を含
む）の範囲の温度で行う。得られた混合物は、凝集固体
状になっており、容器の形に従った形になっているが、
重合体中に研磨材粒子が分散したものからなる。次にそ
の混合物をボールミルにかける。
【００１５】２ 重合体の有機金属前駆物質と一群の研
磨材粒子とを一緒にミリングし、前駆物質を重合し、次
に任意に混合物をミリングすることにより微粉末状の混
合物を製造する。
【００１６】３ 重合体の有機金属前駆物質と一群の研
磨材粒子とを同時に混合及び重合し、次に任意にその混
合物をミリングすることにより、微粉末状の混合物を製
造する。
【００１７】４ 重合体と一群の研磨材粒子とをミリン
グすることにより微粉末状の混合物を製造する。
【００１８】混合物中の研磨材粒子の濃度は、最終的焼
結研磨材ボデー中のそれらの濃度が３０体積％〜９０体
積％（両端の数字を含む）の範囲、好ましくは５０体積
％〜８０体積％（両端の数字を含む）の範囲になるよう
な濃度にすべきである。
【００１９】本発明の方法は、工程（ｉ）と工程（ii）
との間に、工程（ii）のための未焼成ボデーを形成する
ために工程（ｉ）の混合物をプレスする工程を含んでい
てもよい。
【００２０】本発明の方法の工程（ii）で、工程（ｉ）
の混合物、又は中間工程の未焼成ボデーに熱を加えて重
合体を熱分解する。
【００２１】熱分解工程では、混合物を３００℃〜１０
００℃（両端の数字を含む）の範囲の温度に加熱し、重
合体を分解し、ガス状副生成物を除去する。
【００２２】工程（ii）は、 （ii）（ａ） 混合物を、温度が約３００℃に到達する
まで急速に、例えば、１０℃／分までの加熱速度で加熱
する； （ii）（ｂ） 次に温度が約３００℃から約８００℃ま
で、混合物をゆっくり、例えば、１０℃〜２０℃／時
（両端の数字を含む）の加熱速度で加熱し；そして （ii）（ｃ） 次に温度が約１０００℃に到達するまで
混合物を急速に、例えば、１０℃／分までの加熱速度で
加熱する； の三つの段階で行うことができる。
【００２３】混合物は最終的温度で重合体の熱分解を確
実に行わせる時間維持してもよい。例えば、混合物を最
終的温度に４時間保持してもよい。
【００２４】加熱速度を変化させる理由は、中間温度で
ゆっくり加熱することが必要だからである。なぜなら、
未焼成ボデーの熱分解中、Ｈ2 、ＣＨ4 、及び他の揮発
性物が主に３００℃〜８００℃で一時的な開口気孔を通
って蒸発するからである。
【００２５】工程（ii）は、窒素又は窒素混合物の不活
性雰囲気中で行うのが好ましい。
【００２６】工程（ii）の結果、セラミック粒子が得ら
れ、その結晶子粒径は１０〜５００ｎｍの程度であり、
それと研磨材粒子はよく混合されている。そのようなセ
ラミック粒子は通常大きな表面積をもち、それに伴う大
きな活性度を有する特徴を持つ。
【００２７】本発明の方法の工程（iii ）では、熱分解
した混合物を凝集研磨材ボデーに焼結する。
【００２８】混合物の焼結は、研磨材粒子上の表面不純
物を除去し、セラミック粒子中或は上の反応部位と結合
するそれらの傾向を増大する。
【００２９】セラミック／研磨材粒子混合物の焼結は、
一般に１０００℃〜１４００℃（両端の数字を含む）の
温度で行う。混合物中の研磨材粒子がダイヤモンドであ
る場合、１０００℃〜１１００℃（両端の数字を含む）
の温度を用いる。混合物中の研磨材粒子がＣＢＮである
場合、１０００℃〜１４００℃（両端の数字を含む）の
温度を用いる。
【００３０】用いる温度は最終的焼結研磨材ボデーの組
成を決定する。焼結温度範囲の下端では、無定形マトリ
ックスが形成されるのに対し、その範囲の上端では結晶
化マトリックスが形成する。
【００３１】研磨材ボデーの密度を増大するため、焼結
は加圧下で行なってもよい。圧力は一般に２０ｋバール
を越えない。好ましい圧力範囲は１０バール〜１０ｋバ
ールである。比較的低い圧力或は非加圧焼結したを用い
ることにより、従来法に勝る利点を与える。圧力を加え
る場合、その適用後、加圧焼結ボデー中の研磨材粒子の
含有量は９０体積％程の高さになる。
【００３２】本発明の方法で用いるのに好ましい有機金
属重合体は、ＮＣＰ２００〔ヘキスト社(Hoechst Aktie
ngesellschat）の製品〕のような重合したポリオルガノ
シラザンであり、それは無定形炭窒化珪素セラミックマ
トリックスに転化することができる。
【００３３】本発明を次の実施例により例示する。
【００３４】
【実施例】
例１ 或る量の微粉砕テトラキス（ジメチルアミド）チタン
を、０．５〜２μｍの範囲の粒径を有する或る量のＣＢ
Ｎ粒子と混合した。次にその混合物をヘリウム雰囲気中
で反応容器中に入れ、今度はそれを真空導管に接続し、
蒸留により液体アンモニアで満たした。反応容器を真空
中で密封し、混合物を室温へ暖めた。れんが色のチタン
アンモノリシス生成物が実質的に直ちに析出するが、そ
れにも拘わらず反応容器を時々振りながら４日以上放置
した。析出物を沈降させ、上澄み液を傾瀉して除去し
た。アンモニアを蒸留して固体に戻し、それを洗浄し、
そしてその傾瀉・蒸留・洗浄工程を数回繰り返した。ア
ンモニア及び残留ジアルキルアミンを蒸留により除去
し、微細に分散したＣＢＮを含有する固体チタン化合物
をポンプにより一晩乾燥した。固体アンモノリシス生成
物は、Ｔｉ3(Ｎ（ＣＨ3)2)（ＮＨ2)2(Ｎ)3の実験式を持
つことが判明した その化合物は重合体であり、窒素を
含む官能基（ニトリド、イミド、アミド）により架橋さ
れていた。
【００３５】次に混合物を真空中で熱分解した。４００
℃より低い温度で殆どのガス状生成物〔主にＮＨ（ＣＨ
3)2 及びＮＨ3 〕が放出されるので、混合物を８００℃
まで加熱した。チタン重合体生成物は分解してＴｉＮに
なり、緊密なＴｉＮ／ＣＢＮ混合物を与えた。この熱分
解は化学量論的であり、式： Ｔｉ3(Ｎ（ＣＨ3)2)（ＮＨ2)2(Ｎ)3 Δ ＴｉＮ＋ＮＨ
（ＣＨ3)＋ＮＨ3 と記述される。
【００３６】ＴｉＮ生成物中には、残留炭素がＴｉＣ又
は無定形炭素として残っていた。
【００３７】得られた混合物を加圧容器中に入れ、１１
００℃及び１０ｋバールまで１５分間加熱した。そのプ
レスから取り出すと、気孔率が５％未満である凝集ボデ
ーが形成されていることが判明した。そのボデーの組成
は、５８体積％ＣＢＮ、３５体積％のＴｉＮ及び７体積
％のＴｉＣであった。
【００３８】例２ 例１と同様な方法により、トルエンに溶解したビニルシ
ラン及びダイヤモンド粉末（粒径範囲平均０．５〜２
μ）の混合物を調製した。溶媒を蒸発した後、混合物を
局限しない不活性雰囲気中で徐々に加熱し、ビニルシラ
ンを重合し、次に８００℃でポリビニルシランを熱分解
した。更に１０ｋバールの圧力で１１００℃に加熱する
ことにより、混合物を焼結し、１質量％より低い遊離珪
素含有量を有する研磨材ボデーにした。そのボデーを一
辺が５ｍｍの大きさの三角形にレーザーで切断し、マト
リックスドリルバイトを製造するのに従来用いられてい
るろう付け合金により結合炭化タングステン支柱にろう
付けした。冷却すると、研磨材ボデーは炭化物支柱から
剥離しなかった。
【００３９】例３ ジエチルアルミニウムアミド、Ｅｔ2 ＡｌＮＨ2 を、ト
リエチルアルミニウムとアンモニアとを炭化水素溶媒中
で次の反応： ＡｌＥｔ3 ＋ＮＨ3 →Ｅｔ2 ＡｌＮＨ2 ＋Ｃ2 Ｈ6 に従い反応させることにより製造した。
【００４０】エタンを除去し、高度に揮発性の三量体Ｅ
ｔ2 ＡｌＮＨ2 中間体を残した。次にこの中間体の溶液
を或る量の０．５〜２μｍ粒径の立方晶系窒化硼素微粉
末と混合した。その粉末を極めてゆっくり混合し、次に
超音波撹拌することにより均質にした。混合物を不活性
雰囲気中の入ったグローブボックス(glovebox)中の反応
容器中に入れ、真空導管に接続した。容器を１５０℃に
加熱し、そこで混合物を固化し、アルミニウム中間体を
分解して名目上ＥｔＡｌＮＨとして記述される生成物に
した。この生成物は種々の組成（その熱履歴による）を
持つが、広い分布の分子量を持つ不溶性重合体として分
類される。
【００４１】更に４００℃まで加熱すると、アルミニウ
ム生成物は熱分解： ＥｔＡｌＮＨ Δ ＡｌＮ＋Ｃ2 Ｈ6 によりＡｌＮへ転化した。
【００４２】得られたＡｌＮ／ＣＢＮ混合物をプレス中
に入れ、１０ｋバールの圧力で１０００℃へ加熱し、気
孔を除去した。得られたボデーは窒化アルミニウムマト
リックス中に主にばらばらのＣＢＮ粒子を６０体積％含
んでいた。
【００４３】例４ 例３と同じ手順を繰り返した。但しＣＢＮ粉末を混合し
た後、ＳｉＣウィスカーを１０体積％添加した。得られ
た生成物は、例３の非補強生成物と比較して向上した靭
性を持っていた。
【００４４】例５ この例ではポリオルガノシラザンを無定形炭窒化珪素セ
ラミックマトリックスへ転化した。このセラミックマト
リックスは、ハイブリッド処理と呼ばれている重合体か
らセラミックへの転化法により生成させた。
【００４５】第一の段階では、ポリシラザンとダイヤモ
ンド又はＣＢＮ研磨材粒子とからなる混合物を与えるた
め、三つの異なった経路が研究された。 （ａ） ＣＢＮ又はダイヤモンドをドープしたポリシラ
ザンＮＣＰ２００をボールミルにかける。重合（架橋と
も呼ばれている）後、複合体微粉末を生成させるのに更
にボールミルにかける必要があった。 （ｂ） ポリシラザンＮＣＰ２００及び或る量の研磨材
粒子の混合及び重合を同時に行う。ＮＣＰ２００は液体
で、重合中発砲するので、研磨材粒子は重合後、重合体
中に均一に分布する。次にボールミルにかけることによ
り粉末が生成する。 （ｃ） 重合したＮＣＰ２００／研磨材粒子混合物をボ
ールミルにかける。
【００４６】Ｓｉ3 Ｎ4 又はＳｉＣの如き種子粒子を混
合段階中に添加してもよい。
【００４７】得られた粉末を３２μｍ篩を通して篩い分
け、６３０ＭＰａでコールドアイソスタティックプレス
にかけ、円柱状の未焼成ボデーを得た。
【００４８】次にその未焼成ボデーをＡｒ中で熱処理に
かけた。熱分解工程の加熱計画は、３００℃までの１０
℃／分の大きな加熱速度、３００℃〜８００℃の間で１
０℃〜２０℃／時の低下した加熱速度、及び１０００℃
までの１０℃／分の加速した加熱速度を用いることによ
り、全処理時間に対して最適にした。最終温度での等温
保持は４時間であった。中間的温度でのゆっくりした加
熱は、未焼成ボデーの熱分解中、Ｈ2 及びＣＨ4 が主に
３００℃〜８００℃で一時的開口気孔を通って揮発する
ので必要であった。
【００４９】然る後、ボデーを１１００℃〜１４００℃
で更に熱処理にかけ、セラミックマトリックスを結晶化
し、焼結した。この場合も、混合物中の研磨材粒子がダ
イヤモンドである場合、１０００℃〜１１００℃の温度
を用い、研磨材粒子がＣＢＮである場合、１０００℃〜
１４００℃の温度を用いた。
【００５０】純粋なポリシラザンから誘導された炭窒化
珪素は、１４００℃より高い温度で結晶化するので、Ｓ
ｉ3 Ｎ4 又はＳｉＣの如き種子粒子を存在させた場合の
結晶化開始温度の低下が研究された。即ち、二種類の異
なったセラミック複合体を形成した：ダイヤモンド又は
ＣＢＮを無定形Ｓｉ−Ｃ−Ｎマトリックス中に埋込んだ
もの、又はダイヤモンド又はＣＢＮを多結晶質Ｓｉ3 Ｎ
4 ／ＳｉＣマトリックス中に埋込んだもの。
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 // Ｂ２３Ｂ 27/14 Ｂ (72)発明者 ブロンウィン アネット ロバーツ 南アフリカ国ヨハネスブルグ，パークハー スト，エイティーンス ストリート 94

Claims (22)

    【特許請求の範囲】
  1. 【請求項１】 （ｉ） 熱分解してセラミック粒子を生
    成することができる有機金属重合体及び一群の研磨材粒
    子を含む混合物を与え、 （ii） 前記混合物に熱を加えて前記重合体を熱分解
    し、そして（iii) 熱分解した混合物を凝集研磨材ボデ
    ーへ焼結する、 諸工程を有する研磨材ボデーの製造方法。
  2. 【請求項２】 工程（ｉ）で、混合物を、重合体の有機
    金属前駆物質を適当な溶媒中に溶解し、一群の研磨材粒
    子を前記溶液に添加し、前記有機金属前駆物質を重合す
    ることにより与える、請求項１に記載の方法。
  3. 【請求項３】 工程（ｉ）で、重合を１００℃〜５００
    ℃（両端の数字を含む）の範囲の温度で行う、請求項２
    に記載の方法。
  4. 【請求項４】 工程（ｉ）で、混合物を、重合体の有機
    金属前駆物質を一群の研磨材粒子と共にミリングし、前
    記前駆物質を重合し、次に任意に前記混合物をミリング
    することにより与える、請求項１に記載の方法。
  5. 【請求項５】 工程（ｉ）で、混合物を、重合体の有機
    金属前駆物質と、一群の研磨材粒子とを同時に混合及び
    重合し、次に任意にその混合物をミリングすることによ
    り与える、請求項１に記載の方法。
  6. 【請求項６】 工程（ｉ）で、混合物を、重合体と一群
    の研磨材粒子とを一緒にミリングすることにより与え
    る、請求項１に記載の方法。
  7. 【請求項７】 工程（ｉ）で、混合物中の研磨材粒子の
    濃度が、最終的凝集研磨材ボデー中のそれらの濃度が３
    ０体積％〜９０体積％（両端の数字を含む）の範囲に入
    る濃度である、請求項１〜６のいずれか１項に記載の方
    法。
  8. 【請求項８】 工程（ｉ）で、混合物中の研磨材粒子の
    濃度が、最終的凝集研磨材ボデー中のそれらの濃度が５
    ０体積％〜８０体積％（両端の数字を含む）の範囲に入
    る濃度である、請求項７に記載の方法。
  9. 【請求項９】 工程（ｉ）と工程（ii）の間に、工程
    （ｉ）の混合物をプレスして工程（ii）のための未焼成
    ボデーを形成する工程を含む、請求項１〜８のいずれか
    １項に記載の方法。
  10. 【請求項１０】 工程（ii）で、混合物を３００℃〜１
    ０００℃（両端の数字を含む）の範囲の温度に加熱し、
    重合体を重合させる、請求項１〜９のいずれか１項に記
    載の方法。
  11. 【請求項１１】 工程（ii）で、加熱を、 （ii）（ａ） 混合物を、温度が約３００℃に到達する
    まで急速に加熱する； （ii）（ｂ） 次に温度が約３００℃〜約８００℃ｋ間
    にある時、混合物をゆっくり加熱し；そして （ii）（ｃ） 次に温度が約１０００℃に到達するまで
    混合物を急速に加熱する；の三つの段階で行う、請求項
    １０に記載の方法。
  12. 【請求項１２】 工程（ii）で、混合物を最終温度に、
    重合体の熱分解を確実に行わせる時間維持する、請求項
    １０又は１１に記載の方法。
  13. 【請求項１３】 工程（iii)で、熱分解した混合物を１
    ０００℃〜１４００℃（両端の数字を含む）温度で焼結
    する、請求項１〜１２のいずれか１項に記載の方法。
  14. 【請求項１４】 工程（iii)で、焼結を加圧下で行う、
    請求項１〜１３のいずれか１項に記載の方法。
  15. 【請求項１５】 研磨材粒子を、ダイヤモンド、立方晶
    系窒化硼素及びそれらの混合物からなる群から選択す
    る、請求項１〜１４のいずれか１項に記載の方法。
  16. 【請求項１６】 生成したセラミックが、炭化珪素、窒
    化珪素、炭窒化珪素、二酸化珪素、窒化硼素、炭化硼
    素、窒化アルミニウム、炭化タングステン、炭化チタ
    ン、窒化チタン、及び遷移金属の炭化物、窒化物、及び
    硼化物からなる群から選択されたものである、請求項１
    〜１５のいずれか１項に記載の方法。
  17. 【請求項１７】 有機金属重合体が重合したポリ有機シ
    ラザンである、請求項１〜１６のいずれか１項に記載の
    方法。
  18. 【請求項１８】 一群の研磨材粒子をセラミックマトリ
    ックス中に分散したものからなる複合研磨材ボデーにお
    いて、前記ボデーが、前記研磨材粒子が前記複合研磨材
    ボデーの３０体積％〜９０体積％（両端の数字を含む）
    を占め、前記研磨材粒子が前記複合研磨材ボデー中の連
    続相を形成するセラミックマトリックスに結合してお
    り、前記セラミックマトリックスが、熱分解してセラミ
    ック粒子を生成することができる有機金属重合体と前記
    一群の研磨材粒子との熱分解及び続く焼結により形成さ
    れていることを特徴とする複合研磨材ボデー。
  19. 【請求項１９】 複合研磨材ボデー中の研磨材粒子の濃
    度が５０体積％〜８０体積％（両端の数字を含む）の範
    囲にある、請求項１８に記載の複合研磨材ボデー。
  20. 【請求項２０】 研磨材粒子を、ダイヤモンド、立方晶
    系窒化硼素及びそれらの混合物からなる群から選択す
    る、請求項１８又は１９に記載の複合研磨材ボデー。
  21. 【請求項２１】 セラミックマトリックスを、炭化珪
    素、窒化珪素、炭窒化珪素、二酸化珪素、窒化硼素、炭
    化硼素、窒化アルミニウム、炭化タングステン、炭化チ
    タン、窒化チタン、及び遷移金属の炭化物、窒化物、及
    び硼化物からなる群から選択する、請求項１８〜２０の
    いずれか１項に記載の複合研磨材ボデー。
  22. 【請求項２２】 有機金属重合体が重合されたポリオル
    ガノシラザンである、請求項１８〜２１のいずれか１項
    に記載の複合研磨材ボデー。
JP20890895A 1994-08-17 1995-08-16 研磨材ボデー Expired - Fee Related JP3595036B2 (ja)

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US5649984A (en) 1997-07-22
JP3595036B2 (ja) 2004-12-02
EP0698447A3 (en) 1996-08-14
ZA956408B (en) 1996-03-11
EP0698447A2 (en) 1996-02-28
KR960007507A (ko) 1996-03-22
DE69519408D1 (de) 2000-12-21
DE69519408T2 (de) 2001-04-19
CA2156347C (en) 2004-01-06
EP0698447B1 (en) 2000-11-15

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