JPH079152Y2 - 基板処理装置 - Google Patents

基板処理装置

Info

Publication number
JPH079152Y2
JPH079152Y2 JP1988042030U JP4203088U JPH079152Y2 JP H079152 Y2 JPH079152 Y2 JP H079152Y2 JP 1988042030 U JP1988042030 U JP 1988042030U JP 4203088 U JP4203088 U JP 4203088U JP H079152 Y2 JPH079152 Y2 JP H079152Y2
Authority
JP
Japan
Prior art keywords
substrate
tank
developing
buffer tank
processing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988042030U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01146240U (enrdf_load_stackoverflow
Inventor
均 佐藤
長市 木村
Original Assignee
株式会社芝浦製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社芝浦製作所 filed Critical 株式会社芝浦製作所
Priority to JP1988042030U priority Critical patent/JPH079152Y2/ja
Publication of JPH01146240U publication Critical patent/JPH01146240U/ja
Application granted granted Critical
Publication of JPH079152Y2 publication Critical patent/JPH079152Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988042030U 1988-03-31 1988-03-31 基板処理装置 Expired - Lifetime JPH079152Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988042030U JPH079152Y2 (ja) 1988-03-31 1988-03-31 基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988042030U JPH079152Y2 (ja) 1988-03-31 1988-03-31 基板処理装置

Publications (2)

Publication Number Publication Date
JPH01146240U JPH01146240U (enrdf_load_stackoverflow) 1989-10-09
JPH079152Y2 true JPH079152Y2 (ja) 1995-03-06

Family

ID=31268457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988042030U Expired - Lifetime JPH079152Y2 (ja) 1988-03-31 1988-03-31 基板処理装置

Country Status (1)

Country Link
JP (1) JPH079152Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5366301U (enrdf_load_stackoverflow) * 1976-11-05 1978-06-03
JPS6324552U (enrdf_load_stackoverflow) * 1986-08-01 1988-02-18

Also Published As

Publication number Publication date
JPH01146240U (enrdf_load_stackoverflow) 1989-10-09

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