JPH01146240U - - Google Patents

Info

Publication number
JPH01146240U
JPH01146240U JP4203088U JP4203088U JPH01146240U JP H01146240 U JPH01146240 U JP H01146240U JP 4203088 U JP4203088 U JP 4203088U JP 4203088 U JP4203088 U JP 4203088U JP H01146240 U JPH01146240 U JP H01146240U
Authority
JP
Japan
Prior art keywords
substrate
fixing
edge
lower edge
nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4203088U
Other languages
English (en)
Japanese (ja)
Other versions
JPH079152Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988042030U priority Critical patent/JPH079152Y2/ja
Publication of JPH01146240U publication Critical patent/JPH01146240U/ja
Application granted granted Critical
Publication of JPH079152Y2 publication Critical patent/JPH079152Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988042030U 1988-03-31 1988-03-31 基板処理装置 Expired - Lifetime JPH079152Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988042030U JPH079152Y2 (ja) 1988-03-31 1988-03-31 基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988042030U JPH079152Y2 (ja) 1988-03-31 1988-03-31 基板処理装置

Publications (2)

Publication Number Publication Date
JPH01146240U true JPH01146240U (enrdf_load_stackoverflow) 1989-10-09
JPH079152Y2 JPH079152Y2 (ja) 1995-03-06

Family

ID=31268457

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988042030U Expired - Lifetime JPH079152Y2 (ja) 1988-03-31 1988-03-31 基板処理装置

Country Status (1)

Country Link
JP (1) JPH079152Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5366301U (enrdf_load_stackoverflow) * 1976-11-05 1978-06-03
JPS6324552U (enrdf_load_stackoverflow) * 1986-08-01 1988-02-18

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5366301U (enrdf_load_stackoverflow) * 1976-11-05 1978-06-03
JPS6324552U (enrdf_load_stackoverflow) * 1986-08-01 1988-02-18

Also Published As

Publication number Publication date
JPH079152Y2 (ja) 1995-03-06

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