JPH0426542U - - Google Patents

Info

Publication number
JPH0426542U
JPH0426542U JP6764090U JP6764090U JPH0426542U JP H0426542 U JPH0426542 U JP H0426542U JP 6764090 U JP6764090 U JP 6764090U JP 6764090 U JP6764090 U JP 6764090U JP H0426542 U JPH0426542 U JP H0426542U
Authority
JP
Japan
Prior art keywords
wafer boat
wafer
boat
detecting
reference member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6764090U
Other languages
English (en)
Japanese (ja)
Other versions
JP2522981Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6764090U priority Critical patent/JP2522981Y2/ja
Publication of JPH0426542U publication Critical patent/JPH0426542U/ja
Application granted granted Critical
Publication of JP2522981Y2 publication Critical patent/JP2522981Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP6764090U 1990-06-26 1990-06-26 ウェーハボートの位置検出装置 Expired - Lifetime JP2522981Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6764090U JP2522981Y2 (ja) 1990-06-26 1990-06-26 ウェーハボートの位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6764090U JP2522981Y2 (ja) 1990-06-26 1990-06-26 ウェーハボートの位置検出装置

Publications (2)

Publication Number Publication Date
JPH0426542U true JPH0426542U (enrdf_load_stackoverflow) 1992-03-03
JP2522981Y2 JP2522981Y2 (ja) 1997-01-22

Family

ID=31601387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6764090U Expired - Lifetime JP2522981Y2 (ja) 1990-06-26 1990-06-26 ウェーハボートの位置検出装置

Country Status (1)

Country Link
JP (1) JP2522981Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003273199A (ja) * 2002-03-13 2003-09-26 Hitachi Kokusai Electric Inc 半導体製造装置に於ける基板保持具変形確認方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003273199A (ja) * 2002-03-13 2003-09-26 Hitachi Kokusai Electric Inc 半導体製造装置に於ける基板保持具変形確認方法

Also Published As

Publication number Publication date
JP2522981Y2 (ja) 1997-01-22

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