JPH0426542U - - Google Patents
Info
- Publication number
- JPH0426542U JPH0426542U JP6764090U JP6764090U JPH0426542U JP H0426542 U JPH0426542 U JP H0426542U JP 6764090 U JP6764090 U JP 6764090U JP 6764090 U JP6764090 U JP 6764090U JP H0426542 U JPH0426542 U JP H0426542U
- Authority
- JP
- Japan
- Prior art keywords
- wafer boat
- wafer
- boat
- detecting
- reference member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims 3
- 229910003460 diamond Inorganic materials 0.000 claims 1
- 239000010432 diamond Substances 0.000 claims 1
- 229910052594 sapphire Inorganic materials 0.000 claims 1
- 239000010980 sapphire Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 1
Description
第１図は本考案に係るウエーハボート位置検出
装置の要部のみを略示的に示した説明図、第２図
は同要部の更に一部を示す説明図、第３図は一般
的に使用されている熱処理装置の略示的斜視図、
第４図は同装置のウエーハボート移載機における
要部を示す説明図、第５図は一般的なウエーハボ
ートの正面図である。
４……ウエーハボート、４ａ……支持溝、１１
……ウエーハ移載機、１６……ウエーハ、２１…
…基準部材、２２……突起、２３……検出手段、
２４……接触子。
Fig. 1 is an explanatory diagram schematically showing only the main parts of the wafer boat position detection device according to the present invention, Fig. 2 is an explanatory diagram showing a further part of the main parts, and Fig. 3 is a general diagram. a schematic perspective view of the heat treatment equipment used;
FIG. 4 is an explanatory diagram showing the main parts of the wafer boat transfer machine of the same apparatus, and FIG. 5 is a front view of a general wafer boat. 4...Wafer boat, 4a...Support groove, 11
...Wafer transfer machine, 16...Wafer, 21...
...Reference member, 22...Protrusion, 23...Detection means,
24...Contact child.
Claims (1)
ーハ移載機のウエーハ位置とを一致させるウエー
ハボート位置検出装置であつて、前記ウエーハボ
ートの基準部材と、該基準部材に当接して位置を
検出する検出手段とを具備し、該検出手段の接触
子をウエーハボートと同質の材料で形成したこと
を特徴とするウエーハボートの位置検出装置。 (2) 検出手段の当接部が、ウエーハボートと同
質の材料に代えて、サフアイヤー又はダイヤモン
ドから選ばれる１種の素材から形成されている請
求項(1)記載のウエーハボートの位置検出装置。[Claims for Utility Model Registration] (1) A wafer boat position detection device that matches a wafer support groove of a wafer boat with a wafer position of a wafer transfer machine, comprising a reference member of the wafer boat and the reference member. 1. A position detecting device for a wafer boat, comprising: detecting means for detecting the position by contacting the wafer boat, and a contactor of the detecting means is made of the same material as the wafer boat. (2) The position detecting device for a wafer boat according to claim 1, wherein the abutting portion of the detection means is made of one material selected from sapphire or diamond instead of the same material as the wafer boat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6764090U JP2522981Y2 (en) | 1990-06-26 | 1990-06-26 | Wafer boat position detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6764090U JP2522981Y2 (en) | 1990-06-26 | 1990-06-26 | Wafer boat position detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0426542U true JPH0426542U (en) | 1992-03-03 |
| JP2522981Y2 JP2522981Y2 (en) | 1997-01-22 |
Family
ID=31601387
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6764090U Expired - Lifetime JP2522981Y2 (en) | 1990-06-26 | 1990-06-26 | Wafer boat position detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2522981Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003273199A (en) * | 2002-03-13 | 2003-09-26 | Hitachi Kokusai Electric Inc | Method for confirming deformation of substrate holder in semiconductor manufacturing device |
-
1990
- 1990-06-26 JP JP6764090U patent/JP2522981Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003273199A (en) * | 2002-03-13 | 2003-09-26 | Hitachi Kokusai Electric Inc | Method for confirming deformation of substrate holder in semiconductor manufacturing device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2522981Y2 (en) | 1997-01-22 |
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