JPS63136325U - - Google Patents

Info

Publication number
JPS63136325U
JPS63136325U JP2743587U JP2743587U JPS63136325U JP S63136325 U JPS63136325 U JP S63136325U JP 2743587 U JP2743587 U JP 2743587U JP 2743587 U JP2743587 U JP 2743587U JP S63136325 U JPS63136325 U JP S63136325U
Authority
JP
Japan
Prior art keywords
susceptor
indicator
barrel
detection device
position detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2743587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0539626Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2743587U priority Critical patent/JPH0539626Y2/ja
Publication of JPS63136325U publication Critical patent/JPS63136325U/ja
Application granted granted Critical
Publication of JPH0539626Y2 publication Critical patent/JPH0539626Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2743587U 1987-02-27 1987-02-27 Expired - Lifetime JPH0539626Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2743587U JPH0539626Y2 (enrdf_load_stackoverflow) 1987-02-27 1987-02-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2743587U JPH0539626Y2 (enrdf_load_stackoverflow) 1987-02-27 1987-02-27

Publications (2)

Publication Number Publication Date
JPS63136325U true JPS63136325U (enrdf_load_stackoverflow) 1988-09-07
JPH0539626Y2 JPH0539626Y2 (enrdf_load_stackoverflow) 1993-10-07

Family

ID=30829462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2743587U Expired - Lifetime JPH0539626Y2 (enrdf_load_stackoverflow) 1987-02-27 1987-02-27

Country Status (1)

Country Link
JP (1) JPH0539626Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0539626Y2 (enrdf_load_stackoverflow) 1993-10-07

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