JPH0178022U - - Google Patents

Info

Publication number
JPH0178022U
JPH0178022U JP1987172074U JP17207487U JPH0178022U JP H0178022 U JPH0178022 U JP H0178022U JP 1987172074 U JP1987172074 U JP 1987172074U JP 17207487 U JP17207487 U JP 17207487U JP H0178022 U JPH0178022 U JP H0178022U
Authority
JP
Japan
Prior art keywords
boat
quartz tube
tray
isolates
outside air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987172074U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987172074U priority Critical patent/JPH0178022U/ja
Publication of JPH0178022U publication Critical patent/JPH0178022U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP1987172074U 1987-11-12 1987-11-12 Pending JPH0178022U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987172074U JPH0178022U (enrdf_load_stackoverflow) 1987-11-12 1987-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987172074U JPH0178022U (enrdf_load_stackoverflow) 1987-11-12 1987-11-12

Publications (1)

Publication Number Publication Date
JPH0178022U true JPH0178022U (enrdf_load_stackoverflow) 1989-05-25

Family

ID=31464065

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987172074U Pending JPH0178022U (enrdf_load_stackoverflow) 1987-11-12 1987-11-12

Country Status (1)

Country Link
JP (1) JPH0178022U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54159170A (en) * 1978-06-07 1979-12-15 Hitachi Ltd Tool for wafer processing
JPS5731132B2 (enrdf_load_stackoverflow) * 1981-06-19 1982-07-02

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54159170A (en) * 1978-06-07 1979-12-15 Hitachi Ltd Tool for wafer processing
JPS5731132B2 (enrdf_load_stackoverflow) * 1981-06-19 1982-07-02

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