JPH0751229Y2 - 基板の位置整合装置 - Google Patents

基板の位置整合装置

Info

Publication number
JPH0751229Y2
JPH0751229Y2 JP10261290U JP10261290U JPH0751229Y2 JP H0751229 Y2 JPH0751229 Y2 JP H0751229Y2 JP 10261290 U JP10261290 U JP 10261290U JP 10261290 U JP10261290 U JP 10261290U JP H0751229 Y2 JPH0751229 Y2 JP H0751229Y2
Authority
JP
Japan
Prior art keywords
substrate
elevating
tool
pusher
pushers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP10261290U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0460636U (en, 2012
Inventor
一成 田邊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP10261290U priority Critical patent/JPH0751229Y2/ja
Publication of JPH0460636U publication Critical patent/JPH0460636U/ja
Application granted granted Critical
Publication of JPH0751229Y2 publication Critical patent/JPH0751229Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Control Of Conveyors (AREA)
  • Specific Conveyance Elements (AREA)
  • Liquid Crystal (AREA)
  • Jigs For Machine Tools (AREA)
  • Special Conveying (AREA)
JP10261290U 1990-09-29 1990-09-29 基板の位置整合装置 Expired - Fee Related JPH0751229Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10261290U JPH0751229Y2 (ja) 1990-09-29 1990-09-29 基板の位置整合装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10261290U JPH0751229Y2 (ja) 1990-09-29 1990-09-29 基板の位置整合装置

Publications (2)

Publication Number Publication Date
JPH0460636U JPH0460636U (en, 2012) 1992-05-25
JPH0751229Y2 true JPH0751229Y2 (ja) 1995-11-22

Family

ID=31847007

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10261290U Expired - Fee Related JPH0751229Y2 (ja) 1990-09-29 1990-09-29 基板の位置整合装置

Country Status (1)

Country Link
JP (1) JPH0751229Y2 (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4642610B2 (ja) * 2005-09-05 2011-03-02 東京エレクトロン株式会社 基板位置合わせ装置および基板収容ユニット
JP5931389B2 (ja) * 2011-09-29 2016-06-08 川崎重工業株式会社 搬送システム

Also Published As

Publication number Publication date
JPH0460636U (en, 2012) 1992-05-25

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Legal Events

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