JPH07501160A - 酸化ガリウムから成る薄膜及びその製造方法 - Google Patents

酸化ガリウムから成る薄膜及びその製造方法

Info

Publication number
JPH07501160A
JPH07501160A JP6502907A JP50290794A JPH07501160A JP H07501160 A JPH07501160 A JP H07501160A JP 6502907 A JP6502907 A JP 6502907A JP 50290794 A JP50290794 A JP 50290794A JP H07501160 A JPH07501160 A JP H07501160A
Authority
JP
Japan
Prior art keywords
manufacturing
fatty acid
acid alkanolamide
neutralization
carried out
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6502907A
Other languages
English (en)
Japanese (ja)
Inventor
ゲンズヴェイン，ベルンハルト
Original Assignee
カール−ツアイス−シュティフテュング・ハンデルンド・アルツ・カール・ツアイス
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by カール−ツアイス−シュティフテュング・ハンデルンド・アルツ・カール・ツアイス filed Critical カール−ツアイス−シュティフテュング・ハンデルンド・アルツ・カール・ツアイス
Publication of JPH07501160A publication Critical patent/JPH07501160A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/228—Other specific oxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/10—Deposition methods
    • C03C2218/15—Deposition methods from the vapour phase
    • C03C2218/152—Deposition methods from the vapour phase by cvd

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Optics & Photonics (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Inorganic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Optical Elements (AREA)
JP6502907A 1992-07-06 1993-07-01 酸化ガリウムから成る薄膜及びその製造方法 Pending JPH07501160A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4222144.7 1992-07-06
DE4222144 1992-07-06
PCT/EP1993/001692 WO1994001792A1 (de) 1992-07-06 1993-07-01 Dünne schicht aus galliumoxid und herstellverfahren dafür

Publications (1)

Publication Number Publication Date
JPH07501160A true JPH07501160A (ja) 1995-02-02

Family

ID=6462579

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6502907A Pending JPH07501160A (ja) 1992-07-06 1993-07-01 酸化ガリウムから成る薄膜及びその製造方法

Country Status (5)

Country Link
US (1) US5474851A (de)
JP (1) JPH07501160A (de)
CH (1) CH685137A5 (de)
DE (1) DE4321301A1 (de)
WO (1) WO1994001792A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5451548A (en) * 1994-03-23 1995-09-19 At&T Corp. Electron beam deposition of gallium oxide thin films using a single high purity crystal source
US5550089A (en) * 1994-03-23 1996-08-27 Lucent Technologies Inc. Gallium oxide coatings for optoelectronic devices using electron beam evaporation of a high purity single crystal Gd3 Ga5 O12 source.
US5597768A (en) * 1996-03-21 1997-01-28 Motorola, Inc. Method of forming a Ga2 O3 dielectric layer
DE19855623C1 (de) * 1998-12-02 2000-02-24 Lpkf Laser & Electronics Ag Verfahren zur Erzeugung einer Markierung in einem Glaskörper
US7223441B2 (en) * 2004-03-10 2007-05-29 Pilkington North America, Inc. Method for depositing gallium oxide coatings on flat glass

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4187336A (en) * 1977-04-04 1980-02-05 Gordon Roy G Non-iridescent glass structures
US4331737A (en) * 1978-04-01 1982-05-25 Zaidan Hojin Handotai Kenkyu Shinkokai Oxynitride film and its manufacturing method
JPS5645092A (en) * 1979-09-20 1981-04-24 Nippon Telegr & Teleph Corp <Ntt> Semiconductor luminous element
US4371587A (en) * 1979-12-17 1983-02-01 Hughes Aircraft Company Low temperature process for depositing oxide layers by photochemical vapor deposition
US4595634A (en) * 1983-08-01 1986-06-17 Gordon Roy G Coating process for making non-iridescent glass
JPH01225315A (ja) * 1988-03-04 1989-09-08 Fuji Electric Co Ltd スパッタリング方法

Also Published As

Publication number Publication date
US5474851A (en) 1995-12-12
CH685137A5 (de) 1995-03-31
WO1994001792A1 (de) 1994-01-20
DE4321301A1 (de) 1994-01-13

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