JPH0749791Y2 - 枚葉式スピン乾燥装置 - Google Patents

枚葉式スピン乾燥装置

Info

Publication number
JPH0749791Y2
JPH0749791Y2 JP1989034389U JP3438989U JPH0749791Y2 JP H0749791 Y2 JPH0749791 Y2 JP H0749791Y2 JP 1989034389 U JP1989034389 U JP 1989034389U JP 3438989 U JP3438989 U JP 3438989U JP H0749791 Y2 JPH0749791 Y2 JP H0749791Y2
Authority
JP
Japan
Prior art keywords
work
peripheral
wafer
center
spin dryer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989034389U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02127033U (enrdf_load_stackoverflow
Inventor
一郎 矢沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP1989034389U priority Critical patent/JPH0749791Y2/ja
Publication of JPH02127033U publication Critical patent/JPH02127033U/ja
Application granted granted Critical
Publication of JPH0749791Y2 publication Critical patent/JPH0749791Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP1989034389U 1989-03-28 1989-03-28 枚葉式スピン乾燥装置 Expired - Lifetime JPH0749791Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989034389U JPH0749791Y2 (ja) 1989-03-28 1989-03-28 枚葉式スピン乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989034389U JPH0749791Y2 (ja) 1989-03-28 1989-03-28 枚葉式スピン乾燥装置

Publications (2)

Publication Number Publication Date
JPH02127033U JPH02127033U (enrdf_load_stackoverflow) 1990-10-19
JPH0749791Y2 true JPH0749791Y2 (ja) 1995-11-13

Family

ID=31538817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989034389U Expired - Lifetime JPH0749791Y2 (ja) 1989-03-28 1989-03-28 枚葉式スピン乾燥装置

Country Status (1)

Country Link
JP (1) JPH0749791Y2 (enrdf_load_stackoverflow)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5737837A (en) * 1980-08-20 1982-03-02 Toshiba Corp Drying device for semiconductor wafer
JPS60163436A (ja) * 1984-02-06 1985-08-26 Seiichiro Sogo 半導体材料の洗浄乾燥方法
JPS63185029A (ja) * 1987-01-28 1988-07-30 Hitachi Ltd ウエハ処理装置

Also Published As

Publication number Publication date
JPH02127033U (enrdf_load_stackoverflow) 1990-10-19

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term