JPH0748667Y2 - 成膜装置の基板回転機構 - Google Patents

成膜装置の基板回転機構

Info

Publication number
JPH0748667Y2
JPH0748667Y2 JP1989063497U JP6349789U JPH0748667Y2 JP H0748667 Y2 JPH0748667 Y2 JP H0748667Y2 JP 1989063497 U JP1989063497 U JP 1989063497U JP 6349789 U JP6349789 U JP 6349789U JP H0748667 Y2 JPH0748667 Y2 JP H0748667Y2
Authority
JP
Japan
Prior art keywords
substrate
holder
rotation
film forming
rotating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989063497U
Other languages
English (en)
Japanese (ja)
Other versions
JPH031961U (OSRAM
Inventor
富佐雄 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1989063497U priority Critical patent/JPH0748667Y2/ja
Publication of JPH031961U publication Critical patent/JPH031961U/ja
Application granted granted Critical
Publication of JPH0748667Y2 publication Critical patent/JPH0748667Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1989063497U 1989-05-31 1989-05-31 成膜装置の基板回転機構 Expired - Lifetime JPH0748667Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989063497U JPH0748667Y2 (ja) 1989-05-31 1989-05-31 成膜装置の基板回転機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989063497U JPH0748667Y2 (ja) 1989-05-31 1989-05-31 成膜装置の基板回転機構

Publications (2)

Publication Number Publication Date
JPH031961U JPH031961U (OSRAM) 1991-01-10
JPH0748667Y2 true JPH0748667Y2 (ja) 1995-11-08

Family

ID=31593599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989063497U Expired - Lifetime JPH0748667Y2 (ja) 1989-05-31 1989-05-31 成膜装置の基板回転機構

Country Status (1)

Country Link
JP (1) JPH0748667Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1630260B1 (en) * 2004-08-20 2011-07-13 JDS Uniphase Inc. Magnetic latch for a vapour deposition system

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5920022B2 (ja) * 1977-07-07 1984-05-10 ユニチカ株式会社 スパン調織編物の製造方法
JPS6029167U (ja) * 1983-08-04 1985-02-27 日本電子株式会社 エッチング装置等用試料駆動装置
JPH0689447B2 (ja) * 1986-10-07 1994-11-09 日本真空技術株式会社 自公転式基板ホルダ取付装置
JPS6428371A (en) * 1987-07-24 1989-01-30 Oki Electric Ind Co Ltd Substrate turning mechanism

Also Published As

Publication number Publication date
JPH031961U (OSRAM) 1991-01-10

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