JPH0746437Y2 - 静電チャック - Google Patents

静電チャック

Info

Publication number
JPH0746437Y2
JPH0746437Y2 JP4469689U JP4469689U JPH0746437Y2 JP H0746437 Y2 JPH0746437 Y2 JP H0746437Y2 JP 4469689 U JP4469689 U JP 4469689U JP 4469689 U JP4469689 U JP 4469689U JP H0746437 Y2 JPH0746437 Y2 JP H0746437Y2
Authority
JP
Japan
Prior art keywords
electrostatic chuck
internal electrode
fixing base
wafer
electrostatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4469689U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02135141U (OSRAM
Inventor
俊也 渡部
雄二 麻生
Original Assignee
東陶機器株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東陶機器株式会社 filed Critical 東陶機器株式会社
Priority to JP4469689U priority Critical patent/JPH0746437Y2/ja
Publication of JPH02135141U publication Critical patent/JPH02135141U/ja
Application granted granted Critical
Publication of JPH0746437Y2 publication Critical patent/JPH0746437Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP4469689U 1989-04-17 1989-04-17 静電チャック Expired - Lifetime JPH0746437Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4469689U JPH0746437Y2 (ja) 1989-04-17 1989-04-17 静電チャック

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4469689U JPH0746437Y2 (ja) 1989-04-17 1989-04-17 静電チャック

Publications (2)

Publication Number Publication Date
JPH02135141U JPH02135141U (OSRAM) 1990-11-09
JPH0746437Y2 true JPH0746437Y2 (ja) 1995-10-25

Family

ID=31558227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4469689U Expired - Lifetime JPH0746437Y2 (ja) 1989-04-17 1989-04-17 静電チャック

Country Status (1)

Country Link
JP (1) JPH0746437Y2 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10304714B2 (en) 2015-06-11 2019-05-28 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Device comprising film for electrostatic coupling of a substrate to a substrate carrier

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3699349B2 (ja) * 1990-12-25 2005-09-28 日本碍子株式会社 ウエハー吸着加熱装置
JP3662909B2 (ja) * 1990-12-25 2005-06-22 日本碍子株式会社 ウエハー吸着加熱装置及びウエハー吸着装置
JPH04300138A (ja) * 1991-03-28 1992-10-23 Shin Etsu Chem Co Ltd 静電チャック
JP2804664B2 (ja) * 1992-01-21 1998-09-30 株式会社日立製作所 試料の静電吸着機構及び電子線描画装置
JP3596127B2 (ja) * 1995-12-04 2004-12-02 ソニー株式会社 静電チャック、薄板保持装置、半導体製造装置、搬送方法及び半導体の製造方法
JP3847920B2 (ja) * 1997-10-06 2006-11-22 株式会社アルバック 静電吸着ホットプレート、真空処理装置、及び真空処理方法
JP4357630B2 (ja) * 1999-04-02 2009-11-04 本田技研工業株式会社 冷却機構を備えた切削加工装置
JP2001144167A (ja) * 1999-11-12 2001-05-25 Ngk Insulators Ltd 半導体保持装置
JP4698097B2 (ja) * 2001-09-26 2011-06-08 京セラ株式会社 ウェハ支持部材
JP4783213B2 (ja) * 2005-06-09 2011-09-28 日本碍子株式会社 静電チャック
US20120120545A1 (en) * 2009-07-02 2012-05-17 Hiroshi Fujisawa Electrostatic attracting structure and fabricating method therefor
KR102247439B1 (ko) * 2014-01-22 2021-05-03 가부시키가이샤 아루박 플라즈마 처리 장치 및 웨이퍼 반송용 트레이
JP2016136552A (ja) * 2015-01-23 2016-07-28 株式会社日立ハイテクノロジーズ プラズマ処理装置
JP6811144B2 (ja) * 2017-05-30 2021-01-13 東京エレクトロン株式会社 プラズマ処理装置の静電チャックを運用する方法
JP6924618B2 (ja) * 2017-05-30 2021-08-25 東京エレクトロン株式会社 静電チャック及びプラズマ処理装置
KR102700261B1 (ko) * 2022-06-28 2024-08-28 엔지케이 인슐레이터 엘티디 웨이퍼 배치대

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10304714B2 (en) 2015-06-11 2019-05-28 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Device comprising film for electrostatic coupling of a substrate to a substrate carrier

Also Published As

Publication number Publication date
JPH02135141U (OSRAM) 1990-11-09

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Legal Events

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