JPH0739227Y2 - 多層構造の石英ガラス製炉芯管 - Google Patents
多層構造の石英ガラス製炉芯管Info
- Publication number
- JPH0739227Y2 JPH0739227Y2 JP1985106556U JP10655685U JPH0739227Y2 JP H0739227 Y2 JPH0739227 Y2 JP H0739227Y2 JP 1985106556 U JP1985106556 U JP 1985106556U JP 10655685 U JP10655685 U JP 10655685U JP H0739227 Y2 JPH0739227 Y2 JP H0739227Y2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- quartz glass
- tube
- furnace core
- core tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims description 25
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 23
- 239000010410 layer Substances 0.000 description 35
- 230000000052 comparative effect Effects 0.000 description 10
- 238000009792 diffusion process Methods 0.000 description 8
- 239000012535 impurity Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 229910052783 alkali metal Inorganic materials 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 230000009545 invasion Effects 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000004227 thermal cracking Methods 0.000 description 1
- 238000009279 wet oxidation reaction Methods 0.000 description 1
Landscapes
- Heat Treatments In General, Especially Conveying And Cooling (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985106556U JPH0739227Y2 (ja) | 1985-07-12 | 1985-07-12 | 多層構造の石英ガラス製炉芯管 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985106556U JPH0739227Y2 (ja) | 1985-07-12 | 1985-07-12 | 多層構造の石英ガラス製炉芯管 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6214722U JPS6214722U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-01-29 |
| JPH0739227Y2 true JPH0739227Y2 (ja) | 1995-09-06 |
Family
ID=30982026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985106556U Expired - Lifetime JPH0739227Y2 (ja) | 1985-07-12 | 1985-07-12 | 多層構造の石英ガラス製炉芯管 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0739227Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2610056B2 (ja) * | 1989-06-13 | 1997-05-14 | 信越石英株式会社 | 半導体熱処理用石英ガラス部材及びその製造方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5917242A (ja) * | 1982-07-20 | 1984-01-28 | Toshiba Ceramics Co Ltd | 半導体製造用石英ガラス |
-
1985
- 1985-07-12 JP JP1985106556U patent/JPH0739227Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6214722U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-01-29 |
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