JPH0738046B2 - 内部的構造を有する半透光性シート状試料の表面検査装置 - Google Patents

内部的構造を有する半透光性シート状試料の表面検査装置

Info

Publication number
JPH0738046B2
JPH0738046B2 JP62078484A JP7848487A JPH0738046B2 JP H0738046 B2 JPH0738046 B2 JP H0738046B2 JP 62078484 A JP62078484 A JP 62078484A JP 7848487 A JP7848487 A JP 7848487A JP H0738046 B2 JPH0738046 B2 JP H0738046B2
Authority
JP
Japan
Prior art keywords
focus
microscope
sample
illumination system
sample stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62078484A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63243907A (ja
Inventor
誠一 宮本
洋 田島
勝 丸喜
勝 華谷
Original Assignee
新王子製紙株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 新王子製紙株式会社 filed Critical 新王子製紙株式会社
Priority to JP62078484A priority Critical patent/JPH0738046B2/ja
Priority to US07/173,416 priority patent/US4897537A/en
Priority to DE3810882A priority patent/DE3810882A1/de
Publication of JPS63243907A publication Critical patent/JPS63243907A/ja
Publication of JPH0738046B2 publication Critical patent/JPH0738046B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/241—Devices for focusing
    • G02B21/244—Devices for focusing using image analysis techniques

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microscoopes, Condenser (AREA)
  • Automatic Focus Adjustment (AREA)
JP62078484A 1987-03-30 1987-03-30 内部的構造を有する半透光性シート状試料の表面検査装置 Expired - Lifetime JPH0738046B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP62078484A JPH0738046B2 (ja) 1987-03-30 1987-03-30 内部的構造を有する半透光性シート状試料の表面検査装置
US07/173,416 US4897537A (en) 1987-03-30 1988-03-25 Automatic focus adjusting system of microscope employed in surface inspection apparatus
DE3810882A DE3810882A1 (de) 1987-03-30 1988-03-30 Automatische scharfeinstellungsvorrichtung eines mikroskops in einer oberflaechenpruefvorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62078484A JPH0738046B2 (ja) 1987-03-30 1987-03-30 内部的構造を有する半透光性シート状試料の表面検査装置

Publications (2)

Publication Number Publication Date
JPS63243907A JPS63243907A (ja) 1988-10-11
JPH0738046B2 true JPH0738046B2 (ja) 1995-04-26

Family

ID=13663262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62078484A Expired - Lifetime JPH0738046B2 (ja) 1987-03-30 1987-03-30 内部的構造を有する半透光性シート状試料の表面検査装置

Country Status (3)

Country Link
US (1) US4897537A (en, 2012)
JP (1) JPH0738046B2 (en, 2012)
DE (1) DE3810882A1 (en, 2012)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3828381C2 (de) * 1988-08-20 1997-09-11 Zeiss Carl Fa Verfahren und Einrichtung zur automatischen Fokussierung eines optischen Systems
US4945220A (en) * 1988-11-16 1990-07-31 Prometrix Corporation Autofocusing system for microscope having contrast detection means
US5260825A (en) * 1989-03-20 1993-11-09 Olympus Optical Co., Ltd. Microscope
JP3032214B2 (ja) * 1989-07-06 2000-04-10 株式会社トプコン 手術用顕微鏡
JP3011950B2 (ja) * 1989-08-23 2000-02-21 株式会社トプコン 手術用顕微鏡
EP0418928B1 (en) * 1989-09-22 1996-05-01 Fuji Photo Film Co., Ltd. Scanning microscope and scanning mechanism for the same
DE3934744A1 (de) * 1989-10-18 1991-04-25 Krupp Gmbh Verfahren zur beruehrungslosen ermittlung der dicke transparenter werkstoffe und vorrichtung zur durchfuehrung des verfahrens
JPH04326316A (ja) * 1991-04-26 1992-11-16 Olympus Optical Co Ltd 顕微鏡用写真撮影装置
JPH0630420A (ja) * 1992-05-13 1994-02-04 Olympus Optical Co Ltd 面順次式撮像装置
US5757544A (en) * 1993-03-09 1998-05-26 Olympus Optical Co., Ltd. Image display apparatus
CA2227225A1 (en) * 1995-07-19 1997-02-06 Ryan S. Raz Automatic focus system
US7133078B2 (en) * 1997-05-21 2006-11-07 Olympus Optical Co., Ltd. Automatic focal point sensing device
US6400502B1 (en) 1998-08-18 2002-06-04 Nikon Corporation Microscope
DE10033483C1 (de) 2000-07-10 2002-01-03 Zsp Geodaetische Sys Gmbh Verfahren zur Autofokussierung für Fernrohre von Vermessungsgeräten
DE10050823A1 (de) * 2000-10-06 2002-04-18 Zeiss Carl Jena Gmbh Mikroskop, insbesondere inverses Mikroskop
DE10330714A1 (de) * 2003-07-03 2005-01-20 Carl Zeiss Sms Gmbh Verfahren zum automatischen Fokussieren bei der Abbildung eines Objektes
US20050174085A1 (en) * 2004-02-10 2005-08-11 Olympus Corporation Micromanipulation system
JP2005316036A (ja) * 2004-04-28 2005-11-10 Olympus Corp 撮像装置、照明光制御方法および照明光制御プログラム
US10025084B2 (en) * 2014-10-08 2018-07-17 Biotek Instruments, Inc. Autofocus algorithm for microscopy system based on cross-correlation

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4200354A (en) * 1974-09-05 1980-04-29 Robert Hoffman Microscopy systems with rectangular illumination particularly adapted for viewing transparent objects
JPS5228340A (en) * 1975-08-29 1977-03-03 Hitachi Ltd Automatial focus adjustment unit for microscope
JPS53116852A (en) * 1977-03-23 1978-10-12 Olympus Optical Co Ltd Automatic focus adjusting system
JPS55108628A (en) * 1979-02-13 1980-08-21 Asahi Optical Co Ltd Focus detector of camera
US4510384A (en) * 1981-08-17 1985-04-09 National Research Development Corporation Automatic focusing device with frequency weighted amplification
JPS5994713A (ja) * 1982-11-22 1984-05-31 Olympus Optical Co Ltd 合焦検出方法
DE3406578C2 (de) * 1983-02-24 1985-09-05 Olympus Optical Co., Ltd., Tokio/Tokyo Automatische Brennpunktermittlungsvorrichtung
DE3340647A1 (de) * 1983-11-10 1985-05-23 Will Wetzlar Gmbh, 6330 Wetzlar Verfahren zur fokussierung eines mikroskopes sowie mikroskop zur durchfuehrung des verfahrens
JPH0658205B2 (ja) * 1985-05-08 1994-08-03 株式会社ニコン 光学式検査装置

Also Published As

Publication number Publication date
JPS63243907A (ja) 1988-10-11
DE3810882A1 (de) 1988-10-20
DE3810882C2 (en, 2012) 1990-12-06
US4897537A (en) 1990-01-30

Similar Documents

Publication Publication Date Title
JPH0738046B2 (ja) 内部的構造を有する半透光性シート状試料の表面検査装置
US6583928B2 (en) Microscope
TW201321743A (zh) 自動外觀檢查裝置
KR20230014686A (ko) 표면을 광학적으로 검사하기 위한 방법 및 검사 장치
JPH1062354A (ja) 透明板の欠陥検査装置及び欠陥検査方法
JP4186263B2 (ja) 顕微鏡
JP2000162134A (ja) 表面検査装置
JP3896196B2 (ja) 走査型顕微鏡
JPH0527084B2 (en, 2012)
JP2007033381A (ja) 光学式検査装置及びその照明方法
JP2002303581A (ja) パネル検査装置及びパネル検査方法
CN116519595A (zh) 一种用于晶圆宏观缺陷检测的显微装置
JP2005249946A (ja) 表示装置の欠陥検査装置
JPH10123425A (ja) ズーム機能付き蛍光顕微鏡
JP3418244B2 (ja) 顕微鏡自動焦点検出方法
JP4654408B2 (ja) 検査装置、検査方法及びパターン基板の製造方法
JPH09250912A (ja) パターン測定装置
JP4186264B2 (ja) 顕微鏡
JP2000066110A (ja) 顕微鏡
JPH09230250A (ja) 光学顕微鏡自動合焦点装置
JPS59232306A (ja) 顕微鏡用焦点検出装置
JPH05164971A (ja) 顕微鏡写真撮影装置
JP2000066108A (ja) 顕微鏡
JPH09304297A (ja) 欠陥検査方法及びその装置
JPH09166750A (ja) 観察方法及び顕微鏡