JPH0737312Y2 - 遠心乾燥装置 - Google Patents
遠心乾燥装置Info
- Publication number
- JPH0737312Y2 JPH0737312Y2 JP1985021038U JP2103885U JPH0737312Y2 JP H0737312 Y2 JPH0737312 Y2 JP H0737312Y2 JP 1985021038 U JP1985021038 U JP 1985021038U JP 2103885 U JP2103885 U JP 2103885U JP H0737312 Y2 JPH0737312 Y2 JP H0737312Y2
- Authority
- JP
- Japan
- Prior art keywords
- cradle
- rotating frame
- arm
- centrifugal
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985021038U JPH0737312Y2 (ja) | 1985-02-16 | 1985-02-16 | 遠心乾燥装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985021038U JPH0737312Y2 (ja) | 1985-02-16 | 1985-02-16 | 遠心乾燥装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61138242U JPS61138242U (enExample) | 1986-08-27 |
| JPH0737312Y2 true JPH0737312Y2 (ja) | 1995-08-23 |
Family
ID=30512077
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985021038U Expired - Lifetime JPH0737312Y2 (ja) | 1985-02-16 | 1985-02-16 | 遠心乾燥装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0737312Y2 (enExample) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5991731U (ja) * | 1982-12-13 | 1984-06-21 | 日本電気株式会社 | ウエハ−収納容器固定用箱の起立装置 |
-
1985
- 1985-02-16 JP JP1985021038U patent/JPH0737312Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61138242U (enExample) | 1986-08-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2003534848A (ja) | 粒状物・穀物コーティング装置 | |
| JP2909432B2 (ja) | スピン洗浄処理ユニット | |
| JPH02138737A (ja) | 半導体ウエハの枚葉式スピン乾燥装置 | |
| JPS629635A (ja) | 半導体ウエハの回転乾燥装置 | |
| CN106298588A (zh) | 用于处理晶片状物件的双模式室 | |
| JPS6211495B2 (enExample) | ||
| JP2000011374A (ja) | 回転ディスクの洗浄方法および装置 | |
| WO2023162464A1 (ja) | ウェットプロセス装置 | |
| JP3550385B2 (ja) | 回転乾燥装置におけるウエハ保持機構 | |
| JP3390956B2 (ja) | 振とうアタッチメント交換切替型のハイブリダイゼーションオーブン | |
| JPH09260331A (ja) | 洗浄装置 | |
| JPH0316278Y2 (enExample) | ||
| JPS637822B2 (enExample) | ||
| JPH0143858Y2 (enExample) | ||
| JP2548552B2 (ja) | 基板保持機構 | |
| JPH08219638A (ja) | 乾燥装置及び乾燥方法 | |
| JPS5917261A (ja) | ウエハ搬送装置 | |
| JPH0361510B2 (enExample) | ||
| JPH0151405B2 (enExample) | ||
| JPH07221163A (ja) | 基板搬送装置 | |
| JP2559653B2 (ja) | 薄葉片等の分離乾燥装置 | |
| JPH0760206A (ja) | 洗浄装置 | |
| JPH0323623A (ja) | 塗布装置 | |
| JP2000033319A5 (enExample) | ||
| JP2000033319A (ja) | 塗布装置及び塗布方法 |