JP2000033319A5 - - Google Patents
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- Publication number
- JP2000033319A5 JP2000033319A5 JP1998218707A JP21870798A JP2000033319A5 JP 2000033319 A5 JP2000033319 A5 JP 2000033319A5 JP 1998218707 A JP1998218707 A JP 1998218707A JP 21870798 A JP21870798 A JP 21870798A JP 2000033319 A5 JP2000033319 A5 JP 2000033319A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- container
- opening
- coating
- holding member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000576 coating method Methods 0.000 claims description 77
- 239000011248 coating agent Substances 0.000 claims description 72
- 239000000758 substrate Substances 0.000 claims description 66
- 239000007788 liquid Substances 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 claims 1
- 239000011521 glass Substances 0.000 description 19
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21870798A JP3780104B2 (ja) | 1998-07-17 | 1998-07-17 | 塗布装置及び塗布方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21870798A JP3780104B2 (ja) | 1998-07-17 | 1998-07-17 | 塗布装置及び塗布方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000033319A JP2000033319A (ja) | 2000-02-02 |
| JP2000033319A5 true JP2000033319A5 (enExample) | 2004-11-18 |
| JP3780104B2 JP3780104B2 (ja) | 2006-05-31 |
Family
ID=16724174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21870798A Expired - Fee Related JP3780104B2 (ja) | 1998-07-17 | 1998-07-17 | 塗布装置及び塗布方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3780104B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5257915B2 (ja) * | 2006-09-29 | 2013-08-07 | 国立大学法人東北大学 | 膜塗布装置および膜塗布方法 |
-
1998
- 1998-07-17 JP JP21870798A patent/JP3780104B2/ja not_active Expired - Fee Related
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