JPH0737311Y2 - 処理装置の気泡発生防止装置 - Google Patents
処理装置の気泡発生防止装置Info
- Publication number
- JPH0737311Y2 JPH0737311Y2 JP1990032816U JP3281690U JPH0737311Y2 JP H0737311 Y2 JPH0737311 Y2 JP H0737311Y2 JP 1990032816 U JP1990032816 U JP 1990032816U JP 3281690 U JP3281690 U JP 3281690U JP H0737311 Y2 JPH0737311 Y2 JP H0737311Y2
- Authority
- JP
- Japan
- Prior art keywords
- processing
- tank
- discharge port
- substrate
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990032816U JPH0737311Y2 (ja) | 1990-03-30 | 1990-03-30 | 処理装置の気泡発生防止装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990032816U JPH0737311Y2 (ja) | 1990-03-30 | 1990-03-30 | 処理装置の気泡発生防止装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH03124635U JPH03124635U (US07321065-20080122-C00160.png) | 1991-12-17 |
JPH0737311Y2 true JPH0737311Y2 (ja) | 1995-08-23 |
Family
ID=31536016
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990032816U Expired - Lifetime JPH0737311Y2 (ja) | 1990-03-30 | 1990-03-30 | 処理装置の気泡発生防止装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0737311Y2 (US07321065-20080122-C00160.png) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009032217A1 (de) * | 2009-07-06 | 2011-01-13 | Gebr. Schmid Gmbh & Co. | Verfahren und Vorrichtung zur Behandlung von Substraten |
JP2011106888A (ja) * | 2009-11-13 | 2011-06-02 | Aloka Co Ltd | 液体計量容器および液体計量装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6319331U (US07321065-20080122-C00160.png) * | 1986-07-25 | 1988-02-08 |
-
1990
- 1990-03-30 JP JP1990032816U patent/JPH0737311Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH03124635U (US07321065-20080122-C00160.png) | 1991-12-17 |
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