JPH0735295Y2 - イオン注入装置 - Google Patents

イオン注入装置

Info

Publication number
JPH0735295Y2
JPH0735295Y2 JP1989143826U JP14382689U JPH0735295Y2 JP H0735295 Y2 JPH0735295 Y2 JP H0735295Y2 JP 1989143826 U JP1989143826 U JP 1989143826U JP 14382689 U JP14382689 U JP 14382689U JP H0735295 Y2 JPH0735295 Y2 JP H0735295Y2
Authority
JP
Japan
Prior art keywords
mask
chamber
sample
gate valve
front chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1989143826U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0382552U (enrdf_load_stackoverflow
Inventor
弘行 石田
Original Assignee
日新ハイボルテージ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日新ハイボルテージ株式会社 filed Critical 日新ハイボルテージ株式会社
Priority to JP1989143826U priority Critical patent/JPH0735295Y2/ja
Publication of JPH0382552U publication Critical patent/JPH0382552U/ja
Application granted granted Critical
Publication of JPH0735295Y2 publication Critical patent/JPH0735295Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP1989143826U 1989-12-13 1989-12-13 イオン注入装置 Expired - Fee Related JPH0735295Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989143826U JPH0735295Y2 (ja) 1989-12-13 1989-12-13 イオン注入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989143826U JPH0735295Y2 (ja) 1989-12-13 1989-12-13 イオン注入装置

Publications (2)

Publication Number Publication Date
JPH0382552U JPH0382552U (enrdf_load_stackoverflow) 1991-08-22
JPH0735295Y2 true JPH0735295Y2 (ja) 1995-08-09

Family

ID=31690579

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989143826U Expired - Fee Related JPH0735295Y2 (ja) 1989-12-13 1989-12-13 イオン注入装置

Country Status (1)

Country Link
JP (1) JPH0735295Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7794486B2 (en) * 2005-12-15 2010-09-14 Kimberly-Clark Worldwide, Inc. Therapeutic kit employing a thermal insert

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926151A (enrdf_load_stackoverflow) * 1972-07-04 1974-03-08
JPS57152653A (en) * 1981-03-17 1982-09-21 Ulvac Corp Wafer processing equipment for ion implanting device
JPS63200452A (ja) * 1987-02-16 1988-08-18 Nec Corp 線状電子ビ−ム装置

Also Published As

Publication number Publication date
JPH0382552U (enrdf_load_stackoverflow) 1991-08-22

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees