JPH0382552U - - Google Patents

Info

Publication number
JPH0382552U
JPH0382552U JP14382689U JP14382689U JPH0382552U JP H0382552 U JPH0382552 U JP H0382552U JP 14382689 U JP14382689 U JP 14382689U JP 14382689 U JP14382689 U JP 14382689U JP H0382552 U JPH0382552 U JP H0382552U
Authority
JP
Japan
Prior art keywords
chamber
gate valve
mask
sample
irradiated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14382689U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0735295Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989143826U priority Critical patent/JPH0735295Y2/ja
Publication of JPH0382552U publication Critical patent/JPH0382552U/ja
Application granted granted Critical
Publication of JPH0735295Y2 publication Critical patent/JPH0735295Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP1989143826U 1989-12-13 1989-12-13 イオン注入装置 Expired - Fee Related JPH0735295Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989143826U JPH0735295Y2 (ja) 1989-12-13 1989-12-13 イオン注入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989143826U JPH0735295Y2 (ja) 1989-12-13 1989-12-13 イオン注入装置

Publications (2)

Publication Number Publication Date
JPH0382552U true JPH0382552U (enrdf_load_stackoverflow) 1991-08-22
JPH0735295Y2 JPH0735295Y2 (ja) 1995-08-09

Family

ID=31690579

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989143826U Expired - Fee Related JPH0735295Y2 (ja) 1989-12-13 1989-12-13 イオン注入装置

Country Status (1)

Country Link
JP (1) JPH0735295Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009519747A (ja) * 2005-12-15 2009-05-21 キンバリー クラーク ワールドワイド インコーポレイテッド サーマルインサートを採用した治療キット

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926151A (enrdf_load_stackoverflow) * 1972-07-04 1974-03-08
JPS57152653A (en) * 1981-03-17 1982-09-21 Ulvac Corp Wafer processing equipment for ion implanting device
JPS63200452A (ja) * 1987-02-16 1988-08-18 Nec Corp 線状電子ビ−ム装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926151A (enrdf_load_stackoverflow) * 1972-07-04 1974-03-08
JPS57152653A (en) * 1981-03-17 1982-09-21 Ulvac Corp Wafer processing equipment for ion implanting device
JPS63200452A (ja) * 1987-02-16 1988-08-18 Nec Corp 線状電子ビ−ム装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009519747A (ja) * 2005-12-15 2009-05-21 キンバリー クラーク ワールドワイド インコーポレイテッド サーマルインサートを採用した治療キット

Also Published As

Publication number Publication date
JPH0735295Y2 (ja) 1995-08-09

Similar Documents

Publication Publication Date Title
JPH0382552U (enrdf_load_stackoverflow)
JPH03107636U (enrdf_load_stackoverflow)
JPS61161486U (enrdf_load_stackoverflow)
JPH03129607U (enrdf_load_stackoverflow)
JPH0386984U (enrdf_load_stackoverflow)
JPS6357267U (enrdf_load_stackoverflow)
JPS62151801U (enrdf_load_stackoverflow)
JPH0329789U (enrdf_load_stackoverflow)
JPH0348181U (enrdf_load_stackoverflow)
JPH01134443U (enrdf_load_stackoverflow)
JPH0418162U (enrdf_load_stackoverflow)
JPH044980U (enrdf_load_stackoverflow)
JPS6353887U (enrdf_load_stackoverflow)
JPS6271285U (enrdf_load_stackoverflow)
JPS63145922U (enrdf_load_stackoverflow)
JPS6442046U (enrdf_load_stackoverflow)
JPS6189284U (enrdf_load_stackoverflow)
JPH03102957U (enrdf_load_stackoverflow)
JPS6335022U (enrdf_load_stackoverflow)
JPH0316875U (enrdf_load_stackoverflow)
JPS63159008U (enrdf_load_stackoverflow)
JPS63111539U (enrdf_load_stackoverflow)
JPS6386286U (enrdf_load_stackoverflow)
JPH0176723U (enrdf_load_stackoverflow)
JPS6175223U (enrdf_load_stackoverflow)

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees