JPH073309Y2 - 一体形差圧センサ - Google Patents
一体形差圧センサInfo
- Publication number
- JPH073309Y2 JPH073309Y2 JP13242188U JP13242188U JPH073309Y2 JP H073309 Y2 JPH073309 Y2 JP H073309Y2 JP 13242188 U JP13242188 U JP 13242188U JP 13242188 U JP13242188 U JP 13242188U JP H073309 Y2 JPH073309 Y2 JP H073309Y2
- Authority
- JP
- Japan
- Prior art keywords
- silicon chip
- substrate
- measurement
- diaphragm
- measurement chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Measuring Fluid Pressure (AREA)
- Measuring Volume Flow (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13242188U JPH073309Y2 (ja) | 1988-10-11 | 1988-10-11 | 一体形差圧センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13242188U JPH073309Y2 (ja) | 1988-10-11 | 1988-10-11 | 一体形差圧センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0252139U JPH0252139U (US08177716-20120515-C00003.png) | 1990-04-13 |
JPH073309Y2 true JPH073309Y2 (ja) | 1995-01-30 |
Family
ID=31389366
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13242188U Expired - Lifetime JPH073309Y2 (ja) | 1988-10-11 | 1988-10-11 | 一体形差圧センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH073309Y2 (US08177716-20120515-C00003.png) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4570149B2 (ja) * | 2005-04-05 | 2010-10-27 | 株式会社デンソー | 気体密度比検出装置、濃度検出装置及び燃料蒸気処理装置 |
-
1988
- 1988-10-11 JP JP13242188U patent/JPH073309Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0252139U (US08177716-20120515-C00003.png) | 1990-04-13 |
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