JPH0731545Y2 - 真空ピンセット - Google Patents
真空ピンセットInfo
- Publication number
- JPH0731545Y2 JPH0731545Y2 JP1988140423U JP14042388U JPH0731545Y2 JP H0731545 Y2 JPH0731545 Y2 JP H0731545Y2 JP 1988140423 U JP1988140423 U JP 1988140423U JP 14042388 U JP14042388 U JP 14042388U JP H0731545 Y2 JPH0731545 Y2 JP H0731545Y2
- Authority
- JP
- Japan
- Prior art keywords
- suction
- vacuum tweezers
- plate
- vacuum
- suction hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 28
- 239000000919 ceramic Substances 0.000 claims description 12
- 238000001179 sorption measurement Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 description 12
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000001513 hot isostatic pressing Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910002077 partially stabilized zirconia Inorganic materials 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988140423U JPH0731545Y2 (ja) | 1988-10-27 | 1988-10-27 | 真空ピンセット |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988140423U JPH0731545Y2 (ja) | 1988-10-27 | 1988-10-27 | 真空ピンセット |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0260247U JPH0260247U (enrdf_load_stackoverflow) | 1990-05-02 |
| JPH0731545Y2 true JPH0731545Y2 (ja) | 1995-07-19 |
Family
ID=31404578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988140423U Expired - Lifetime JPH0731545Y2 (ja) | 1988-10-27 | 1988-10-27 | 真空ピンセット |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0731545Y2 (enrdf_load_stackoverflow) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56107896A (en) * | 1980-01-23 | 1981-08-27 | Hitachi Ltd | Suction type vacuum tweezer |
| JPS60109859U (ja) * | 1983-12-28 | 1985-07-25 | 株式会社 デイスコ | 半導体ウエ−ハ表面研削装置 |
| JPS62287638A (ja) * | 1986-06-06 | 1987-12-14 | Hitachi Ltd | ウエハ保持具 |
| JPS6385046A (ja) * | 1986-09-29 | 1988-04-15 | 日産自動車株式会社 | ジルコニア質焼結体の製造方法 |
-
1988
- 1988-10-27 JP JP1988140423U patent/JPH0731545Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0260247U (enrdf_load_stackoverflow) | 1990-05-02 |
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