JPH0723899Y2 - 基板検出装置 - Google Patents

基板検出装置

Info

Publication number
JPH0723899Y2
JPH0723899Y2 JP1986073417U JP7341786U JPH0723899Y2 JP H0723899 Y2 JPH0723899 Y2 JP H0723899Y2 JP 1986073417 U JP1986073417 U JP 1986073417U JP 7341786 U JP7341786 U JP 7341786U JP H0723899 Y2 JPH0723899 Y2 JP H0723899Y2
Authority
JP
Japan
Prior art keywords
substrate
holder
light
detection device
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986073417U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62184667U (enrdf_load_html_response
Inventor
利明 石田
史郎 塩尻
恒雄 平松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1986073417U priority Critical patent/JPH0723899Y2/ja
Publication of JPS62184667U publication Critical patent/JPS62184667U/ja
Application granted granted Critical
Publication of JPH0723899Y2 publication Critical patent/JPH0723899Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986073417U 1986-05-15 1986-05-15 基板検出装置 Expired - Lifetime JPH0723899Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986073417U JPH0723899Y2 (ja) 1986-05-15 1986-05-15 基板検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986073417U JPH0723899Y2 (ja) 1986-05-15 1986-05-15 基板検出装置

Publications (2)

Publication Number Publication Date
JPS62184667U JPS62184667U (enrdf_load_html_response) 1987-11-24
JPH0723899Y2 true JPH0723899Y2 (ja) 1995-05-31

Family

ID=30917730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986073417U Expired - Lifetime JPH0723899Y2 (ja) 1986-05-15 1986-05-15 基板検出装置

Country Status (1)

Country Link
JP (1) JPH0723899Y2 (enrdf_load_html_response)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60193250A (ja) * 1984-03-15 1985-10-01 Toshiba Corp イオン注入装置

Also Published As

Publication number Publication date
JPS62184667U (enrdf_load_html_response) 1987-11-24

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