JPS62184667U - - Google Patents

Info

Publication number
JPS62184667U
JPS62184667U JP7341786U JP7341786U JPS62184667U JP S62184667 U JPS62184667 U JP S62184667U JP 7341786 U JP7341786 U JP 7341786U JP 7341786 U JP7341786 U JP 7341786U JP S62184667 U JPS62184667 U JP S62184667U
Authority
JP
Japan
Prior art keywords
light
holder
substrate
light emitter
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7341786U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0723899Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986073417U priority Critical patent/JPH0723899Y2/ja
Publication of JPS62184667U publication Critical patent/JPS62184667U/ja
Application granted granted Critical
Publication of JPH0723899Y2 publication Critical patent/JPH0723899Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986073417U 1986-05-15 1986-05-15 基板検出装置 Expired - Lifetime JPH0723899Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986073417U JPH0723899Y2 (ja) 1986-05-15 1986-05-15 基板検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986073417U JPH0723899Y2 (ja) 1986-05-15 1986-05-15 基板検出装置

Publications (2)

Publication Number Publication Date
JPS62184667U true JPS62184667U (enrdf_load_html_response) 1987-11-24
JPH0723899Y2 JPH0723899Y2 (ja) 1995-05-31

Family

ID=30917730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986073417U Expired - Lifetime JPH0723899Y2 (ja) 1986-05-15 1986-05-15 基板検出装置

Country Status (1)

Country Link
JP (1) JPH0723899Y2 (enrdf_load_html_response)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60193250A (ja) * 1984-03-15 1985-10-01 Toshiba Corp イオン注入装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60193250A (ja) * 1984-03-15 1985-10-01 Toshiba Corp イオン注入装置

Also Published As

Publication number Publication date
JPH0723899Y2 (ja) 1995-05-31

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